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Gasb-to-Si Direct Wafer Bonding and Thermal Budget Considerations for Photonic Applications

Martinez, William M.; Anderson, Evan M.; Wood, Michael G.; Friedmann, Thomas A.; Arterburn, Shawn C.; Reyna, Robert; Gutierrez, Jordan E.; Harris, Christian A.; Kotula, Paul G.; Cummings, Damion P.; Bahr, Matthew N.; Patel, Victor J.; Muhowski, Aaron; Hawkins, Samuel D.; Long, Christopher M.; Klem, John F.; Shank, Joshua; Wygant, Melissa L.

Abstract not provided.

Exploring AlGaInP for Use in Si Photomultiplier Analogs

2024 IEEE Research and Applications of Photonics in Defense Conference, RAPID 2024 - Proceedings

Anderson, Evan M.; Armstrong, Andrew A.; Caravello, Lisa A.; Garcia, Eduardo; Klesko, Joseph P.; Hawkins, Samuel D.; Klem, John F.; Shaner, Eric A.; Muhowski, Aaron

We present a materials study of AlGaInP grown on GaAs leveraging deep-level optical spectroscopy and time resolved photoluminescence. Our materials may serve as the basis for wide-bandgap analogs of silicon photomultipliers optimized for short wavelength sensing.

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Record quantum efficiency from strain compensated superlattice GaAs/GaAsP photocathode for spin polarized electron source

AIP Advances

Biswas, Jyoti; Cultrera, Luca; Liu, Wei; Wang, Erdong; Skaritka, John; Kisslinger, Kim; Hawkins, Samuel D.; Lee, Stephen R.; Klem, John F.

Photocathodes based on GaAs and other III-V semiconductors are capable of producing highly spin-polarized electron beams. GaAs/GaAsP superlattice photocathodes exhibit high spin polarization; however, the quantum efficiency (QE) is limited to 1% or less. To increase the QE, we fabricated a GaAs/GaAsP superlattice photocathode with a Distributed Bragg Reflector (DBR) underneath. This configuration creates a Fabry-Pérot cavity between the DBR and GaAs surface, which enhances the absorption of incident light and, consequently, the QE. These photocathode structures were grown using molecular beam epitaxy and achieved record quantum efficiencies exceeding 15% and electron spin polarization of about 75% when illuminated with near-bandgap photon energies.

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Radiation Damage and Mitigation by Minority Carrier Injection in InAsSb/AlAsSb Heterojunction Barrier Mid-Wave Infrared Detector

Journal of Electronic Materials

Peale, Robert E.; Fredricksen, C.J.; Klem, John F.

Here, the effects of gamma and proton irradiation, and of forward bias minority carrier injection, on photo-response were investigated for InAsSb/AlAsSb pBn mid-wave infrared (MWIR) detectors with an engineered majority-carrier barrier. Room-temperature gamma irradiation had an insignificant effect on 77 K photo-response. Gamma irradiation at 77 K detector temperature, however, decreased in situ photo-response by 19% after a cumulative dose of ~ 500 krad(Si). Subsequent forward bias minority carrier injection had no effect on photo-response. The 77 K detectors irradiated with 30 MeV protons up to 2 Mrad(Si) had photo-response degraded by up to 70%, but here forward bias minority carrier (hole) injection caused up to 12% recovery that persisted more than 30 min. These results suggest a mitigation strategy for maintaining the photo-response of similar detectors in radiation environments that cause displacement damage defects.

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All-epitaxial resonant cavity enhanced long-wave infrared detectors for focal plane arrays

Applied Physics Letters

Petluru, P.; Muhowski, Aaron; Kamboj, A.; Mansfield, N.C.; Bergthold, M.; Shaner, Eric A.; Klem, John F.; Wasserman, D.

We demonstrate a monolithic all-epitaxial resonant-cavity architecture for long-wave infrared photodetectors with substrate-side illumination. An nBn detector with an ultra-thin (t ≈ 350 nm) absorber layer is integrated into a leaky resonant cavity, formed using semi-transparent highly doped (n + +) epitaxial layers, and aligned to the anti-node of the cavity's standing wave. The devices are characterized electrically and optically and demonstrate an external quantum efficiency of ∼25% at T = 180 K in an architecture compatible with focal plane array configurations.

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Substrate-Independent Technique of III-V Heterogeneous Integration of Focal Plane Arrays and Lasers

2023 Conference on Lasers and Electro Optics CLEO 2023

Wood, Michael G.; Bahr, Matthew N.; Gutierrez, Jordan E.; Anderson, Evan M.; Finnegan, Patrick S.; Weatherred, Scott E.; Martinez, William M.; Foulk, James W.; Reyna, Robert; Arterburn, Shawn C.; Friedmann, Thomas A.; Hawkins, Samuel D.; Patel, Victor J.; Hendrickson, Alex T.; Klem, John F.; Long, Christopher M.; Olesberg, Jonathon T.; Shank, Joshua; Chumney, Daniel R.; Looker, Quinn M.

We report on a two-step technique for post-bond III-V substrate removal involving precision mechanical milling and selective chemical etching. We show results on GaAs, GaSb, InP, and InAs substrates and from mm-scale chips to wafers.

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Substrate-Independent Technique of III-V Heterogeneous Integration of Focal Plane Arrays and Lasers

CLEO: Science and Innovations, CLEO:S and I 2023

Wood, Michael G.; Bahr, Matthew N.; Serkland, Darwin K.; Gutierrez, Jordan E.; Anderson, Evan M.; Finnegan, Patrick S.; Weatherred, Scott E.; Martinez, William M.; Foulk, James W.; Reyna, Robert; Arterburn, Shawn C.; Friedmann, Thomas A.; Hawkins, Samuel D.; Patel, Victor J.; Hendrickson, Alex T.; Klem, John F.; Long, Christopher M.; Olesberg, Jonathon T.; Shank, Joshua; Chumney, Daniel R.; Looker, Quinn M.

We report on a two-step technique for post-bond III-V substrate removal involving precision mechanical milling and selective chemical etching. We show results on GaAs, GaSb, InP, and InAs substrates and from mm-scale chips to wafers.

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Long wavelength interband cascade lasers

Applied Physics Letters

Massengale, J.A.; Shen, Yixuan; Yang, Rui Q.; Hawkins, Samuel D.; Klem, John F.

InAs-based interband cascade lasers (ICLs) can be more easily adapted toward long wavelength operation than their GaSb counterparts. Devices made from two recent ICL wafers with an advanced waveguide structure are reported, which demonstrate improved device performance in terms of reduced threshold current densities for ICLs near 11 μm or extended operating wavelength beyond 13 μm. The ICLs near 11 μm yielded a significantly reduced continuous wave (cw) lasing threshold of 23 A/cm2 at 80 K with substantially increased cw output power, compared with previously reported ICLs at similar wavelengths. ICLs made from the second wafer incorporated an innovative quantum well active region, comprised of InAsP layers, and lased in the pulsed-mode up to 120 K at 13.2 μm, which is the longest wavelength achieved for III-V interband lasers.

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An All-Dielectric Polaritonic Metasurface with a Giant Nonlinear Optical Response

Nano Letters

Sarma, Raktim S.; Xu, Jiaming; De Ceglia, Domenico; Carletti, Luca; Campione, Salvatore; Klem, John F.; Sinclair, Michael B.; Belkin, Mikhail A.; Brener, Igal

Enhancing the efficiency of second-harmonic generation using all-dielectric metasurfaces to date has mostly focused on electromagnetic engineering of optical modes in the meta-atom. Further advances in nonlinear conversion efficiencies can be gained by engineering the material nonlinearities at the nanoscale, however this cannot be achieved using conventional materials. Semiconductor heterostructures that support resonant nonlinearities using quantum engineered intersubband transitions can provide this new degree of freedom. By simultaneously optimizing the heterostructures and meta-atoms, we experimentally realize an all-dielectric polaritonic metasurface with a maximum second-harmonic generation power conversion factor of 0.5 mW/W2 and power conversion efficiencies of 0.015% at nominal pump intensities of 11 kW/cm2. These conversion efficiencies are higher than the record values reported to date in all-dielectric nonlinear metasurfaces but with 3 orders of magnitude lower pump power. Our results therefore open a new direction for designing efficient nonlinear all-dielectric metasurfaces for new classical and quantum light sources.

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Radiation damage and mitigation by minority carrier injection in GaSb/InAs and InAsSb/AlAsSb heterojunction barrier infrared detectors

Proceedings of SPIE - The International Society for Optical Engineering

Fredricksen, C.J.; Peale, R.E.; Dhakal, N.; Barrett, C.L.; Boykin II, O.; Maukonen, D.; Davis, L.; Ferarri, B.; Chernyak, L.; Zeidan, O.A.; Hawkins, Samuel D.; Klem, John F.; Krishna, Sanjay; Kazemi, Alireza; Schuler-Sandy, Ted

Effects of gamma and proton irradiation, and of forward bias minority carrier injection, on minority carrier diffusion and photoresponse were investigated for long-wave (LW) and mid-wave (MW) infrared detectors with engineered majoritycarrier barriers. The LWIR detector was a type-II GaSb/InAs strained-layer superlattice pBiBn structure. The MWIR detector was a InAsSb/AlAsSb nBp structure without superlattices. Room temperature gamma irradiations degraded the minority carrier diffusion length of the LWIR structure, and minority carrier injections caused dramatic improvements, though there was little effect from either treatment on photoresponse. For the MWIR detector, effects of room temperature gamma irradiation and injection on minority carrier diffusion and photoresponse were negligible. Subsequently, both types of detectors were subjected to gamma irradiation at 77 K. In-situ photoresponse was unchanged for the LWIR detectors, while that for the MWIR ones decreased 19% after cumulative dose of ~500 krad(Si). Minority carrier injection had no effect on photoresponse for either. The LWIR detector was then subjected to 4 Mrad(Si) of 30 MeV proton irradiation at 77 K, and showed a 35% decrease in photoresponse, but again no effect from forward bias injection. These results suggest that photoresponse of the LWIR detectors is not limited by minority carrier diffusion.

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Full-resolution two-color infrared detector

2021 IEEE Research and Applications of Photonics in Defense Conference, RAPID 2021

Anderson, Evan M.; Campbell, Deanna M.; Briscoe, Jayson; Coon, Wesley; Alford, Charles; Wood, Michael G.; Klem, John F.; Gamache, Phillip; Gunter, Mathew; Olesberg, Jonathon T.; Hawkins, Samuel D.; Rohwer, Lauren E.S.; Stephenson, Chad A.; Peters, David; Goldflam, Michael

We discuss thinned InAsSb resonant infrared detectors that are designed to enable high quantum efficiency by using interleaved nanoantennas to read out two wavelengths from each pixel simultaneously.

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Recombination rate analysis in long minority carrier lifetime mid-wave infrared InGaAs/InAsSb superlattices

Journal of Applied Physics

Carrasco, Rigo A.; Morath, Christian P.; Grant, Perry C.; Ariyawansa, Gamini; Reyner, C.J.; Stephenson, Chad A.; Kadlec, Clark N.; Hawkins, Samuel D.; Klem, John F.; Steenbergen, Elizabeth H.; Schaefer, Stephen T.; Johnson, Shane R.; Zollner, S.; Webster, Preston T.

Gallium is incorporated into the strain-balanced In(Ga)As/InAsSb superlattice system to achieve the same mid-wave infrared cutoff tunability as conventional Ga-free InAs/InAsSb type-II superlattices, but with an additional degree of design freedom to enable optimization of absorption and transport properties. Time-resolved photoluminescence measurements of InGaAs/InAsSb superlattice characterization- and doped device structures are reported from 77 to 300 K and compared to InAs/InAsSb. The low-injection photoluminescence decay yields the minority carrier lifetime, which is analyzed with a recombination rate model, enabling the determination of the temperature-dependent Shockley-Read-Hall, radiative, and Auger recombination lifetimes and extraction of defect energy levels and capture cross section defect concentration products. The Shockley-Read-Hall-limited lifetime of undoped InGaAs/InAsSb is marginally reduced from 2.3 to 1.4 μs due to the inclusion of Ga; however, given that Ga improves the vertical hole mobility by a factor of >10×, a diffusion-limited InGaAs/InAsSb superlattice nBn could expect a lower bound of 2.5× improvement in diffusion length with significant impact on photodetector quantum efficiency and radiation hardness. At temperatures below 120 K, the doped device structures are Shockley-Read-Hall limited at 0.5 μs, which shows promise for detector applications.

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Strong Coupling in All-Dielectric Intersubband Polaritonic Metasurfaces

Nano Letters

Sarma, Raktim S.; Nookala, Nishant; Reilly, Kevin J.; Liu, Sheng; De Ceglia, Domenico; Carletti, Luca; Goldflam, Michael; Campione, Salvatore; Sapkota, Keshab R.; Green, Huck; Wang, George T.; Klem, John F.; Sinclair, Michael B.; Belkin, Mikhail A.; Brener, Igal

Mie-resonant dielectric metasurfaces are excellent candidates for both fundamental studies related to light-matter interactions and for numerous applications ranging from holography to sensing to nonlinear optics. To date, however, most applications using Mie metasurfaces utilize only weak light-matter interaction. Here, we go beyond the weak coupling regime and demonstrate for the first time strong polaritonic coupling between Mie photonic modes and intersubband (ISB) transitions in semiconductor heterostructures. Furthermore, along with demonstrating ISB polaritons with Rabi splitting as large as 10%, we also demonstrate the ability to tailor the strength of strong coupling by engineering either the semiconductor heterostructure or the photonic mode of the resonators. Unlike previous plasmonic-based works, our new all-dielectric metasurface approach to generate ISB polaritons is free from ohmic losses and has high optical damage thresholds, thereby making it ideal for creating novel and compact mid-infrared light sources based on nonlinear optics.

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Near-field probing of strong light-matter coupling in single IR antennae

Proceedings of SPIE - The International Society for Optical Engineering

Mitrofanov, Oleg; Wang, Chih-Feng; Habteyes, Terefe G.; Luk, Ting S.; Klem, John F.; Brener, Igal; Chen, Hou-Tong

Quantum well intersubband polaritons are traditionally studied in large scale ensembles, over many wavelengths in size.In this presentation, we demonstrate that it is possible to detect and investigate intersubband polaritons in a single sub-wavelength nanoantenna in the IR frequency range. We observe polariton formation using a scattering-type near-fieldmicroscope and nano-FTIR spectroscopy. In this work, we will discuss near-field spectroscopic signatures of plasmonic antennae withand without coupling to the intersubband transition in quantum wells located underneath the antenna. Evanescent fieldamplitude spectra recorded on the antenna surface show a mode anti-crossing behavior in the strong coupling case. Wealso observe a corresponding strong-coupling signature in the phase of the detected field. We anticipate that this near-fieldapproach will enable explorations of strong and ultrastrong light-matter coupling in the single nanoantenna regime,including investigations of the elusive effect of ISB polariton condensation.

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Nanoantenna-Enhanced Resonant Detectors for Improved Infrared Detector Performance

Goldflam, Michael; Anderson, Evan M.; Fortune, Torben; Klem, John F.; Hawkins, Samuel D.; Davids, Paul; Campione, Salvatore; Pung, Aaron J.; Webster, Preston; Weiner, Phillip; Finnegan, Patrick S.; Wendt, Joel; Wood, Michael G.; Haines, Chris; Coon, Wesley; Olesberg, Jonathon T.; Shaner, Eric A.; Kadlec, Clark N.; Foulk, James W.; Sinclair, Michael B.; Tauke-Pedretti, Anna; Kim, Jin K.; Peters, David

Abstract not provided.

Monolithically fabricated tunable long-wave infrared detectors based on dynamic graphene metasurfaces

Applied Physics Letters

Goldflam, Michael; Ruiz, Isaac; Howell, S.W.; Tauke-Pedretti, Anna; Anderson, Evan M.; Wendt, J.R.; Finnegan, Patrick S.; Hawkins, Samuel D.; Coon, Wesley; Fortune, Torben; Shaner, Eric A.; Kadlec, Clark N.; Olesberg, Jonathon T.; Klem, John F.; Webster, Preston; Sinclair, Michael B.; Kim, Jin K.; Peters, David; Foulk, James W.

Here, the design, fabrication, and characterization of an actively tunable long-wave infrared detector, made possible through direct integration of a graphene-enabled metasurface with a conventional type-II superlattice infrared detector, are reported. This structure allows for post-fabrication tuning of the detector spectral response through voltage-induced modification of the carrier density within graphene and, therefore, its plasmonic response. These changes modify the transmittance through the metasurface, which is fabricated monolithically atop the detector, allowing for spectral control of light reaching the detector. Importantly, this structure provides a fabrication-controlled alignment of the metasurface filter to the detector pixel and is entirely solid-state. Using single pixel devices, relative changes in the spectral response exceeding 8% have been realized. These proof-of-concept devices present a path toward solid-state hyperspectral imaging with independent pixel-to-pixel spectral control through a voltage-actuated dynamic response.

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Determination of background doping type in type-II superlattice using capacitance-voltage measurements with double mesa structure

Proceedings of SPIE - The International Society for Optical Engineering

Fink, Douglas R.; Lee, Seunghyun; Kodati, Sri H.; Rogers, V.; Ronningen, Theodore J.; Winslow, Martin; Grein, Christoph H.; Jones, Andrew H.; Campbell, Joe C.; Klem, John F.; Krishna, Sanjay

Here, we present a method of determining the background doping type in semiconductors using capacitance-voltage measurements on overetched double mesa p-i-n or n-i-p structures. Unlike Hall measurements, this method is not limited by the conductivity of the substrate. By measuring the capacitance of devices with varying top and bottom mesa sizes, we were able to conclusively determine which mesa contained the p-n junction, revealing the polarity of the intrinsic layer. This method, when demonstrated on GaSb p-i-n and n-i-p structures, determined that the material is residually doped p-type, which is well established by other sources. The method was then applied on a 10 monolayer InAs/10 monolayer AlSb superlattice, for which the doping polarity was unknown, and indicated that this material is also p-type.

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Experimental Evidence of the Lorentz-Like Effective Medium Resonance in Semiconductor Hyperbolic Metamaterials Using Strong Coupling to Plasmonic Metasurfaces

IEEE Transactions on Antennas and Propagation

Campione, Salvatore; Klem, John F.; Liu, Sheng; Montano, Ines; Sinclair, Michael B.; Luk, Ting S.

The Lorentz-like effective medium resonance (LEMR) exhibited by the longitudinal effective permittivity of semiconductor hyperbolic metamaterials (SHMs) has been known for some time. However, direct observation of this resonance proved to be difficult. Herein, we experimentally demonstrate its existence by strongly coupling SHMs to plasmonic metasurfaces. We consider four strong coupling implementations of SHMs that exhibit different LEMR absorption profiles (both in frequency and in strength) to validate our approach.

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Determination of background doping polarity of unintentionally doped semiconductor layers

Applied Physics Letters

Fink, D.R.; Lee, S.; Kodati, S.H.; Rogers, V.; Ronningen, T.J.; Winslow, M.; Grein, C.H.; Jones, A.H.; Campbell, J.C.; Klem, John F.; Krishna, S.

We present a method of determining the background doping type in semiconductors using capacitance-voltage measurements on overetched double mesa p-i-n or n-i-p structures. Unlike Hall measurements, this method is not limited by the conductivity of the substrate. By measuring the capacitance of devices with varying top and bottom mesa sizes, we were able to conclusively determine which mesa contained the p-n junction, revealing the polarity of the intrinsic layer. This method, when demonstrated on GaSb p-i-n and n-i-p structures, concluded that the material is residually doped p-type, which is well established by other sources. The method was then applied to a 10 monolayer InAs/10 monolayer AlSb superlattice, for which the doping polarity was unknown, and indicated that this material is also p-type.

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Determination of background doping type in type-II superlattice using capacitance-voltage measurements with double mesa structure

Proceedings of SPIE - The International Society for Optical Engineering

Fink, D.R.; Lee, S.; Kodati, S.H.; Rogers, V.; Ronningen, T.J.; Winslow, M.; Grein, C.H.; Jones, A.H.; Campbell, J.C.; Klem, John F.; Krishna, S.

We present a method of determining the background doping type in semiconductors using capacitance-voltage measurements on overetched double mesa p-i-n or n-i-p structures. Unlike Hall measurements, this method is not limited by the conductivity of the substrate. By measuring the capacitance of devices with varying top and bottom mesa sizes, we were able to conclusively determine which mesa contained the p-n junction, revealing the polarity of the intrinsic layer. This method, when demonstrated on GaSb p-i-n and n-i-p structures, determined that the material is residually doped p-type, which is well established by other sources. The method was then applied on a 10 monolayer InAs/10 monolayer AlSb superlattice, for which the doping polarity was unknown, and indicated that this material is also p-type.

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Extended SWIR InGaAs/GaAsSb type-II superlattice photodetector on InP

Proceedings of SPIE - The International Society for Optical Engineering

Stephenson, Chad A.; Klem, John F.; Olesberg, Jonathon T.; Kadlec, Clark N.; Coon, Wesley; Weiner, Phillip H.

An InGaAs/GaAsSb Type-II superlattice is explored as an absorber material for extended short-wave infrared detection. A 10.5 nm period was grown with an InGaAs/GaAsSb thickness ratio of 2 with a target In composition of 46% and target Sb composition of 62%. Cutoff wavelengths near 2.8 μm were achieved with responsivity beyond 3 μm. Demonstrated dark current densities were as low as 1.4 mA/cm2 at 295K and 13 μA/cm2 at 235K at -1V bias. A significant barrier to hole extraction was identified in the detector design that severely limited the external quantum efficiency (EQE) of the detectors. A redesign of the detector that removes that barrier could make InGaAs/GaAsSb very competitive with current commercial HgCdTe and extended InGaAs technology.

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Microwave Doppler Charge Velocimetry for Narrow and Wide Bandgap Semiconductors

Shaner, Eric A.; Klem, John F.; Stephenson, Chad A.; Kadlec, Clark N.; Goldflam, Michael; Wasserman, Daniel

Characterization of vertical transport in semiconductor heterostructures is extremely difficult and often impractical. Measurements that are relatively straight forward in lateral transport using Hall methods, such as quantifying carrier density or mobility, have no analog in conventional vertical devices. Doppler charge velocimetry may provide an alternative approach to obtaining transport information. We hypothesize that we can drive vertical currents in structures like heterojunction bipolar transistors or nBn detectors, illuminate them with microwaves, and directly measure the carrier velocities through Doppler shifts imparted on the reflected microwave signal. Some challenges involve providing optical injection and working in the vertical geometry required to extract the desired information. While progress was made to this end, experiments have not yet proved successful. Implications for infrared material characterization are summarized at the end of this document.

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Observation of Intersubband Polaritons in a Single Nanoantenna Using Nano-FTIR Spectroscopy

Nano Letters

Brener, Igal; Wang, Chih F.; Habteyes, Terefe G.; Luk, Ting S.; Klem, John F.; Chen, Hou T.; Mitrofanov, Oleg

Strong coupling of an intersubband (ISB) electron transition in quantum wells to a subwavelength plasmonic nanoantenna can give rise to intriguing quantum phenomena, such as ISB polariton condensation, and enable practical devices including low threshold lasers. However, experimental observation of ISB polaritons in an isolated subwavelength system has not yet been reported. Here, we use scanning probe near-field microscopy and Fourier-transform infrared (FTIR) spectroscopy to detect formation of ISB polariton states in a single nanoantenna. We excite the nanoantenna by a broadband IR pulse and spectrally analyze evanescent fields on the nanoantenna surface. We observe the distinctive splitting of the nanoantenna resonance peak into two polariton modes and two ?-phase steps corresponding to each of the modes. We map ISB polariton dispersion using a set of nanoantennae of different sizes. This nano-FTIR spectroscopy approach opens doors for investigations of ISB polariton physics in the single subwavelength nanoantenna regime.

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Semiconductor Hyperbolic Metamaterials at the Quantum Limit

Scientific Reports

Montano, Ines; Campione, Salvatore; Klem, John F.; Foulk, James W.; Wolf, Omri; Sinclair, Michael B.; Luk, Ting S.

We study semiconductor hyperbolic metamaterials (SHMs) at the quantum limit experimentally using spectroscopic ellipsometry as well as theoretically using a new microscopic theory. The theory is a combination of microscopic density matrix approach for the material response and Green’s function approach for the propagating electric field. Our approach predicts absorptivity of the full multilayer system and for the first time allows the prediction of in-plane and out-of-plane dielectric functions for every individual layer constructing the SHM as well as effective dielectric functions that can be used to describe a homogenized SHM.

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Results 1–50 of 188
Results 1–50 of 188