Nanodevices and Microsystems

Bishnu Khanal, Sandia R&D manager, leans down to work on an ion trapping system Luke Yates and Jack Flicker look at a tiny gallium nitride wafter

Precisely controlling materials, devices and information is critical to enabling science, technology, and industry. At Sandia, we are enabling new and increasingly powerful capabilities for critical national systems through our research increasing understanding of physical phenomena across the quantum- to microscale continuum, creating novel nano- and microscale devices, achieving new methods of integration, and realizing novel microsystems-based complex systems.  

Why Our Work Matters 

Sandia’s research in these areas is helping to create radiation-hardened microsystems technologies, novel remote and in-situ sensors, advanced radio frequency (RF) devices and RF microsystems, and power electronics and energy conversion innovations for use across numerous enduring and emerging national security missions. 

Our Unique Value 

Sandia has extensive scientific and engineering expertise in areas such as material growth and process development for silicon and compounds, device and product design, advanced packaging technologies for 3-D integration, and reliability and failure analysis expertise. 

Sandia leverages the Microsystems Engineering Sciences and Applications (MESA) Complex, a 400,000-square-foot facility designed to integrate the scientific disciplines needed to produce functional, robust, and integrated microsystems. 

The MESA Fabrication Facilities provide high-mix, low-volume production of custom integrated microsystem products and support for research; technology advancement and maturation; and small-lot, fast-turn prototyping. 

Recent Highlights

Try this thought experiment: imagine a small measurable quantity of something—perhaps a grain of sand or...

Many polymer liquids flow easily when stretched gently but become viscous and solid-like when stretched rapidly....

Data-heavy workflows such as AI require in to increase system efficiency. Work on this memory computing,...

Underfilling is a widely used manufacturing process that helps stabilize and reinforce solder joints in electronic...

Novel material and device concepts previously took years for iteration. Discoveries in this LDRD project will...

Nanodevices and Microsystems Related Research Facilities

CINT is a DOE/Office of Science NSRC user facility devoted to scientific principles that govern nanoscale materials.

Modern building with decorative art feature

MANTL comprises four buildings with office and lab space and Sandia’s Plating Research Laboratory. MANTL research focuses on mechanical and electrical engineering, chemistry, radiography plating, and more.

MANTL facility

MESA integrates scientific disciplines to produce functional, robust, integrated microsystems. Today researchers pursue advanced concepts that integrate not only electronics at the micro scale, but embody sensors, photonics, and MEMS...

Researcher proudly displaying microsystem

Related Intellectual Property

Featured Licensing Opportunities

Microelectronics & MEMS • A new method of additive manufacturing that leverages fluidics and electrochemistry to rapidly produce high-quality parts with engineering materials. Existing methods of metal 3D printing are ineffective in creating micro-resolution...

Electro 3D: Electrochemical 3D Printing

Microelectronics & MEMS • A computing hardware approach that aspires to emulate the brain. Ruthenium-based Prussian blue analogue for artificial synapses have transformational potential in neuroprosthetics, brain disease diagnostics, and ubiquitous edge computing. In...

Microelectronics & MEMS • An oxygen vacancy Electrochemical Random Access Memory (ECRAM) for neuromorphic computing. Artificial neural networks have become increasingly relevant and desired in today’s market; however, they are extremely energy intensive. Neuromorphic...

Microelectronics & MEMS • A two-step additive manufacturing approach for forming highly conductive, high-resolution electrical traces and components with properties suited for flexible and hybrid electronics Electrical traces and conductive components are essential features...

Highly Conductive, High Resolution Printed Electrical Traces and Components

Microelectronics & MEMS • A micronozzle adapter capable of printing line widths and thicknesses 10x finer than existing 3D plasma jet printers Heightened interest in next-generation printable and flexible electronics is accelerating research and...

Plasma Micronozzle Adapter

Microelectronics & MEMS • Reduces the area and energy consumption of neural network accelerators using nonvolatile memory components (NVM) Analog matrix vector multiplication (MVM) using nonvolatile memories is limited by the accuracy of the...

Analog Matrix Vector Multiplication

Microelectronics & MEMS • Dual-mode oscillator architectures for use with SC cut resonators Sandia researchers have developed two architectures that allow dual oscillators to operate simultaneous modes from a single resonator with a high...

High Performance Dual-Mode Oscillator Circuits

Microelectronics & MEMS • Scaling of magnetic passive components such as inductors and transformers has not kept pace with advances in high power semiconductor devices employing wide/ultra-wide band gap SiC, GaN, and AlN in...

Microelectronics & MEMS • To support next generation computing, communication, and sensing needs, Sandia researchers have successfully developed a silicon photonics platform that leverages the semiconductor and nanotechnology capabilities of Sandia’s Microsystems and Engineering...

Silicon Photonics

Microelectronics & MEMS • Ultra-wide bandgap power electronics to miniaturize and vastly improve the performance and efficiency of power systems for electrical grids, vehicles, power supplies, and motors Power electronics used for routing, control,...

Ultra-Wide Bandgap Power Electronics

Microelectronics & MEMS • Sandia’s mini-PDID makes it possible to diagnose illnesses by identifying volatile organic compounds (VOCs) associated with certain diseases and infections on a patient’s breath or in the headspace of biological...

Miniaturized Chemical Detectors for Point-of-Care Diagnosis

Microelectronics & MEMS • Laser combs are increasingly used to provide precision measurements. Typical frequency comb systems use non-linear elements, distinct from the laser gain media, to create a set of emission lines with...

Monolithically Integrated Absolute Frequency Comb Laser System

Microelectronics & MEMS • Sandia National Laboratories has developed a latching switch for optical fibers. One or more fibers are moved by an actuator between two positions, off and on. In the off position,...

Microelectronics & MEMS • A low profile, controlled force, minimal torque push plate for ball grid array multi-chip module (MCM) test sockets The ball grid array (BGA) is an enabling technology for multi-chip modules,...

Microelectronics & MEMS • Reliable determination of the presence and/or quantity of a particular analyte in the field can be greatly enhanced if the analytical instrument is equipped with a time-of-use calibration standard. While...

Microelectronics & MEMS • Current methods of producing titanium dioxide nanoparticles require costly surfactants and/or high temperature and pressure processing. Processing under these conditions results in nanoparticles with extremely wide particle size distributions and...

Low Cost TiO2 Nanoparticles

Microelectronics & MEMS • Summary Inexhaustible, miniature electrical power supplies offer the means to power battery-free microelectronic systems, or at a minimum provide a recharging capability to reduce battery size and extend their lifetimes....

Patents
Patents & Applications
Patent Title Patent Number Grant Date
Low Power Sensor for NOx Detection 11,573,217 02/07/2023
Low Power Sensor for NOx Detection 11,573,217 02/07/2023
PIEZOELECTRIC DEFORMABLE PHOTONIC DEVICES 11,569,431 01/31/2023
PIEZOELECTRIC DEFORMABLE PHOTONIC DEVICES 11,569,431 01/31/2023
MINIATURIZED VACUUM PACKAGE AND METHODS OF MAKING SAME 11,551,921 01/10/2023
ENHANCED MICROFABRICATION USING ELECTROCHEMICAL TECHNIQUES 11,549,903 01/10/2023
ENHANCED MICROFABRICATION USING ELECTROCHEMICAL TECHNIQUES 11,549,903 01/10/2023
MINIATURIZED VACUUM PACKAGE AND METHODS OF MAKING SAME 11,551,921 01/10/2023
COMPACT LASER SOURCE WITH FREQUENCY MODULATORS GENERATING MULTIPLE LINES 11,545,815 01/03/2023
COMPACT LASER SOURCE WITH FREQUENCY MODULATORS GENERATING MULTIPLE LINES 11,545,815 01/03/2023
ANALOG VECTOR-MATRIX MULTIPLICATION BY CAPACITIVE ELEMENTS WITH RESISTIVE STATE STORAGE 11,494,464 11/08/2022
ANALOG VECTOR-MATRIX MULTIPLICATION BY CAPACITIVE ELEMENTS WITH RESISTIVE STATE STORAGE 11,494,464 11/08/2022
METAL STACK TEMPLATES FOR SUPPRESSING SECONDARY GRAINS IN ScAlN 11,482,660 10/25/2022
METAL STACK TEMPLATES FOR SUPPRESSING SECONDARY GRAINS IN ScAlN 11,482,660 10/25/2022
THERMALLY SENSITIVE IONIC REDOX TRANSISTOR 11,450,802 09/20/2022
THERMALLY SENSITIVE IONIC REDOX TRANSISTOR 11,450,802 09/20/2022
PHOTOLITHOGRAPHY OF ATOMIC LAYER RESIST 11,424,135 08/23/2022
PHOTOLITHOGRAPHY OF ATOMIC LAYER RESIST 11,424,135 08/23/2022
PHASE-WRAPPING METHOD FOR BEAM STEERING IN OPTICAL PHASED ARRAYS 11,409,183 08/09/2022
PHASE-WRAPPING METHOD FOR BEAM STEERING IN OPTICAL PHASED ARRAYS 11,409,183 08/09/2022
HYBRID PIEZOELECTRIC MICRORESONATOR 11,387,802 07/12/2022
TUNNELING FULL-WAVE INFRARED RECTENNA 11,296,240 04/05/2022
TUNNELING FULL-WAVE INFRARED RECTENNA 11,296,240 04/05/2022
ACTIVE SHUNT CAPACITANCE CANCELLING OSCILLATOR FOR RESONATORS 11,171,604 11/09/2021
ACTIVE SHUNT CAPACITANCE CANCELLING OSCILLATOR FOR RESONATORS 11,171,604 11/09/2021
OPTICAL COUPLER FOR HETEROGENEOUS INTEGRATION 11,163,115 11/02/2021
OPTICAL COUPLER FOR HETEROGENEOUS INTEGRATION 11,163,115 11/02/2021
TRAPPED ION PLATFORM WITH OPTICAL INPUT AND OUTPUT 11,150,609 10/19/2021
TRAPPED ION PLATFORM WITH OPTICAL INPUT AND OUTPUT 11,150,609 10/19/2021
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing 11,125,700 09/21/2021
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing 11,125,700 09/21/2021
Microfabricated ion trap chip with in situ radio-frequency sensing 11,056,332 07/06/2021
Microfabricated ion trap chip with in situ radio-frequency sensing 11,056,332 07/06/2021
Optical devices enabled by vertical dielectric Mie resonators 11,017,186 05/25/2021
Microfabricated ion trap chip with an integrated microwave antenna 10,984,976 04/20/2021
Dual frequency transceiver device 10,984,300 04/20/2021
Dual frequency transceiver device 10,984,300 04/20/2021
Microfabricated ion trap chip with an integrated microwave antenna 10,984,976 04/20/2021
Focusing transformers/filters in isotropic/anisotropic piezoelectrics 10,979,018 04/13/2021
Method of fabricating photosensitive devices with reduced process-temperature budget 10,910,508 02/02/2021
Method of fabricating photosensitive devices with reduced process-temperature budget 10,910,508 02/02/2021
Heterogeneously integrated electro-optic modulator 10,788,689 09/29/2020
Heterogeneously integrated electro-optic modulator 10,788,689 09/29/2020
Heterogeneously integrated electro-optic modulator 10,788,689 09/29/2020
Hybrid semiconductor-piezoacoustic radiofrequency device 10,666,222 05/26/2020
High density optical waveguide using hybrid spiral pattern 10,663,662 05/26/2020
High density optical waveguide using hybrid spiral pattern 10,663,662 05/26/2020
ScAIN etch mask for highly selective etching 10,651,048 05/12/2020
ScAIN etch mask for highly selective etching 10,651,048 05/12/2020
Active mechanical-environmental-thermal MEMS device for nanoscale characterization 10,641,733 05/05/2020
Active mechanical-environmental-thermal MEMS device for nanoscale characterization 10,641,733 05/05/2020
Kinematic chip to chip bonding 10,620,377 04/14/2020
Kinematic chip to chip bonding 10,620,377 04/14/2020
Fabrication of multilayered carbon MEMS devices 10,570,010 02/25/2020
Fabrication of multilayered carbon MEMS devices 10,570,010 02/25/2020
Supply-noise-rejecting current source 10,566,936 02/18/2020
Supply-noise-rejecting current source 10,566,936 02/18/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby 10,553,697 02/04/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby 10,553,697 02/04/2020
Thallium bromide (TIBr) semiconductors and devices with extended life apparatus, methods, and system 10,516,068 12/24/2019
Thallium bromide (TIBr) semiconductors and devices with extended life apparatus, methods, and system 10,516,068 12/24/2019
Magnetoelastically actuated MEMS device and methods for its manufacture 10,510,945 12/17/2019
Magnetoelastically actuated MEMS device and methods for its manufacture 10,510,945 12/17/2019
Evanescently coupled piezoelectric acoustic devices 10,491,190 11/26/2019
Non-inverting multi-mode oscillator 10,483,912 11/19/2019
Low-power MEMS wakeup system 10,481,672 11/19/2019
Low-power MEMS wakeup system 10,481,672 11/19/2019
Non-inverting multi-mode oscillator 10,483,912 11/19/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool 10,446,369 10/15/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool 10,446,369 10/15/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors 10,392,243 08/27/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors 10,392,243 08/27/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby 10,388,753 08/20/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby 10,388,753 08/20/2019
TRANCEIVERS AND RECEIVERS FOR DISCRETE-VARIABLE QUANTUM KEY DISTRIBUTION 10,341,096 07/02/2019
TRANCEIVERS AND RECEIVERS FOR DISCRETE-VARIABLE QUANTUM KEY DISTRIBUTION 10,341,096 07/02/2019
Bus based timed input output module 10,289,573 05/14/2019
Bus based timed input output module 10,289,573 05/14/2019
Variable bandwidth filter 10,267,896 04/23/2019
Variable bandwidth filter 10,267,896 04/23/2019
Optical microresonator device with thermal isolation 10,247,676 04/02/2019
Optical microresonator device with thermal isolation 10,247,676 04/02/2019
Communication device and method of making the same 10,235,614 03/19/2019
Communication device and method of making the same 10,235,614 03/19/2019
Via configuration for wafer-to-wafer interconnection 10,224,312 03/05/2019
Via configuration for wafer-to-wafer interconnection 10,224,312 03/05/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture 10,214,415 02/26/2019
METHOD FOR SIMULTANEOUS MODIFICATION OF MULTIPLE SEMICONDUCTOR DEVICE FEATURES 10,217,704 02/26/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture 10,214,415 02/26/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture 10,214,415 02/26/2019
Gm-C filter and multi-phase clock circuit 10,181,840 01/15/2019
Gm-C filter and multi-phase clock circuit 10,181,840 01/15/2019
Passive radiative cooling of a body 10,173,792 01/08/2019
Passive radiative cooling of a body 10,173,792 01/08/2019
Defect screening method for electronic circuits and circuit components using power spectrum anaylysis 10,145,894 12/04/2018
Defect screening method for electronic circuits and circuit components using power spectrum anaylysis 10,145,894 12/04/2018
Trimming method for microresonators and microresonators made thereby 10,148,244 12/04/2018
Trimming method for microresonators and microresonators made thereby 10,148,244 12/04/2018
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals 10,141,495 11/27/2018
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals 10,141,495 11/27/2018
Vertically integrated optoelectronics package for MEMS devices 10,139,564 11/27/2018
Vertically integrated optoelectronics package for MEMS devices 10,139,564 11/27/2018
Scanning method for screening of electronic devices 10,094,874 10/09/2018
Graphene heat dissipating structure 10,096,536 10/09/2018
Graphene heat dissipating structure 10,096,536 10/09/2018
Scanning method for screening of electronic devices 10,094,874 10/09/2018
System on chip module configured for event-driven architecture 10,089,160 10/02/2018
Supply-noise-rejecting current source 10,090,826 10/02/2018
Supply-noise-rejecting current source 10,090,826 10/02/2018
System on chip module configured for event-driven architecture 10,089,160 10/02/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion 10,072,879 09/11/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion 10,072,879 09/11/2018
Systems and methods to maintain optimum stoichiometry for reactively sputtered films 10,074,522 09/11/2018
Optomechanical force sensors, cantilevers, and systems thereof 10,031,158 07/24/2018
Optomechanical force sensors, cantilevers, and systems thereof 10,031,158 07/24/2018
Guided wave opto-acoustic device 10,025,123 07/17/2018
Guided wave opto-acoustic device 10,025,123 07/17/2018
Methods for suppressing spurious modes in microresonators 10,009,002 06/26/2018
Flexible packaging for microelectronic devices 9,978,895 05/22/2018
Flexible packaging for microelectronic devices 9,978,895 05/22/2018
Packaging system with cleaning channel and method of making the same 9,972,553 05/15/2018
Packaging system with cleaning channel and method of making the same 9,972,553 05/15/2018
Attenuation of spurious responses in electromechanical filters 9,941,857 04/10/2018
Attenuation of spurious responses in electromechanical filters 9,941,857 04/10/2018
Superlattice photodetector having improved carrier mobility 9,929,293 03/27/2018
Superlattice photodetector having improved carrier mobility 9,929,293 03/27/2018
Diode and method of making the same 9,917,149 03/13/2018
Transceivers and receivers for quantum key distribution and methods pertaining thereto 9,906,311 02/27/2018
Transceivers and receivers for quantum key distribution and methods pertaining thereto 9,906,311 02/27/2018
Gallium beam lithography for superconductive structure formation 9,882,113 01/30/2018
Gallium beam lithography for superconductive structure formation 9,882,113 01/30/2018
Method and system for gas flow mitigation of molecular contamination of optics 9,874,512 01/23/2018
Second harmonic generation in resonant optical structures 9,865,987 01/09/2018
Second harmonic generation in resonant optical structures 9,865,987 01/09/2018
Ion-barrier for memristors/ReRAM and methods thereof 9,831,427 11/28/2017
Electroabsorption optical modulator 9,823,497 11/21/2017
Method of making thermally-isolated silicon-based integrated circuits 9,824,932 11/21/2017
Electroabsorption optical modulator 9,823,497 11/21/2017
Method of making thermally-isolated silicon-based integrated circuits 9,824,932 11/21/2017
Processing device with self-scrubbing logic 9,792,184 10/17/2017
System on chip module configured for event-driven architecture 9,792,250 10/17/2017
System on chip module configured for event-driven architecture 9,792,250 10/17/2017
Processing device with self-scrubbing logic 9,792,184 10/17/2017
Integrated unaligned resonant modulator tuning 9,780,870 10/03/2017
Integrated unaligned resonant modulator tuning 9,780,870 10/03/2017
Adiabatic/diabatic polarization beam splitter 9,759,862 09/12/2017
Apparatus for assembly of microelectronic devices 9,763,370 09/12/2017
Apparatus for assembly of microelectronic devices 9,763,370 09/12/2017
Adiabatic/diabatic polarization beam splitter 9,759,862 09/12/2017
Adiabatic/diabatic polarization beam splitter 9,759,862 09/12/2017
Fast process flow, on-wafer interconnection and singulation for MEPV 9,748,415 08/29/2017
Fast process flow, on-wafer interconnection and singulation for MEPV 9,748,415 08/29/2017
Avalanche diode having reduced dark current and method for its manufacture 9,748,429 08/29/2017
Avalanche diode having reduced dark current and method for its manufacture 9,748,429 08/29/2017
Integrated optical transceiver with electronically controlled optical beamsteering 9,740,079 08/22/2017
Integrated optical transceiver with electronically controlled optical beamsteering 9,740,079 08/22/2017
Graphene heat dissipating structure 9,721,867 08/01/2017
Graphene heat dissipating structure 9,721,867 08/01/2017
On-chip photonic-phononic emitter-receiver apparatus 9,696,492 07/04/2017
On-chip photonic-phononic emitter-receiver apparatus 9,696,492 07/04/2017
Fast frequency divider circuit using combinational logic 9,667,231 05/30/2017
Wafer scale oblique angle plasma etching 9,659,797 05/23/2017
Wafer scale oblique angle plasma etching 9,659,797 05/23/2017
Method of making a silicon nanowire device 9,660,026 05/23/2017
Method of making a silicon nanowire device 9,660,026 05/23/2017
Thermally-isolated silicon-based integrated circuits and related methods 9,646,874 05/09/2017
Thermally-isolated silicon-based integrated circuits and related methods 9,646,874 05/09/2017
Single crystal micromechanical resonator 9,641,154 05/02/2017
Single crystal micromechanical resonator 9,641,154 05/02/2017
Device-packaging method and apparatus for optoelectronic circuits 9,632,261 04/25/2017
Device-packaging method and apparatus for optoelectronic circuits 9,632,261 04/25/2017
Reconfigurable optical-to-optical frequency conversion method and apparatus 9,625,785 04/18/2017
Reconfigurable optical-to-optical frequency conversion method and apparatus 9,625,785 04/18/2017
Method to fabricate micro and nano diamond devices 9,620,596 04/11/2017
Resonant optical device with a microheater 9,612,458 04/04/2017
Resonant optical device with a microheater 9,612,458 04/04/2017
Visible light laser voltage probing on thinned substrates 9,599,667 03/21/2017
Visible light laser voltage probing on thinned substrates 9,599,667 03/21/2017
Plasmon-assisted optical vias for photonic ASICS 9,599,781 03/21/2017
Plasmon-assisted optical vias for photonic ASICS 9,599,781 03/21/2017
Tuneable photonic device including an array of metamaterial resonators 9,594,266 03/14/2017
Tuneable photonic device including an array of metamaterial resonators 9,594,266 03/14/2017
Fast process flow, on-wafer interconnection and singulation for MEPV 9,559,219 01/31/2017
Fast process flow, on-wafer interconnection and singulation for MEPV 9,559,219 01/31/2017
Photoelectrochemically driven self-assembly method 9,548,411 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature 9,546,420 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature 9,546,420 01/17/2017
Photoelectrochemically driven self-assembly method 9,548,411 01/17/2017
Silicon nanowire device and method for its manufacture 9,536,947 01/03/2017
Silicon nanowire device and method for its manufacture 9,536,947 01/03/2017
Single crystal micromechanical resonator and fabrication methods thereof 9,525,398 12/20/2016
Single crystal micromechanical resonator and fabrication methods thereof 9,525,398 12/20/2016
Transparent contacts for stacked compound photovoltaic cells 9,508,881 11/29/2016
Transparent contacts for stacked compound photovoltaic cells 9,508,881 11/29/2016
High-speed optical phase-shifting apparatus 9,488,854 11/08/2016
High-speed optical phase-shifting apparatus 9,488,854 11/08/2016
Methods for dry etching semiconductor devices 9,484,216 11/01/2016
Methods for dry etching semiconductor devices 9,484,216 11/01/2016
Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof 9,477,040 10/25/2016
Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof 9,477,040 10/25/2016
Power meter ratio method of stabilizing a resonant modulator 9,467,233 10/11/2016
Power meter ratio method of stabilizing a resonant modulator 9,467,233 10/11/2016
Zero-power receiver 9,460,321 10/04/2016
Silicon force sensor and method of using the same 9,459,161 10/04/2016
Zero-power receiver 9,460,321 10/04/2016
Silicon force sensor and method of using the same 9,459,161 10/04/2016
Fabrication method for small-scale structures with non-planar features 9,448,336 09/20/2016
Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems 9,447,895 09/20/2016
Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems 9,447,895 09/20/2016
Fabrication method for small-scale structures with non-planar features 9,448,336 09/20/2016
Integrated field emission array for ion desorption 9,425,019 08/23/2016
Multilevel resistive information storage and retrieval 9,412,446 08/09/2016
Two-dimensional APDs and SPADs and related methods 9,391,225 07/12/2016
Two-dimensional APDs and SPADs and related methods 9,391,225 07/12/2016
Methods and apparatus for use with extreme ultraviolet light having contamination protection 9,389,180 07/12/2016
Silicon force sensor 9,383,270 07/05/2016
Thermo-optically tuned photonic resonators with concurrent electrical connection and thermal isolation 9,366,822 06/14/2016
Thermo-optically tuned photonic resonators with concurrent electrical connection and thermal isolation 9,366,822 06/14/2016
Microresonator electrode design 9,337,800 05/10/2016
Methods for resistive switching of memristors 9,336,870 05/10/2016
Method and apparatus of highly linear optical modulation 9,329,413 05/03/2016
Method and apparatus of highly linear optical modulation 9,329,413 05/03/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation 9,311,444 04/12/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation 9,311,444 04/12/2016
Programmable electroacoustic filter apparatus and method for its manufacture 9,276,557 03/01/2016
Processing device with self-scrubbing logic 9,274,895 03/01/2016
Processing device with self-scrubbing logic 9,274,895 03/01/2016
Programmable electroacoustic filter apparatus and method for its manufacture 9,276,557 03/01/2016
Guided wave opto-acoustic device 9,268,092 02/23/2016
Methods and apparatus of entangled photon generation using four-wave mixing 9,268,195 02/23/2016
Apparatuses and methods for tuning center frequencies 9,270,281 02/23/2016
Methods and apparatus of entangled photon generation using four-wave mixing 9,268,195 02/23/2016
Apparatuses and methods for tuning center frequencies 9,270,281 02/23/2016
Guided wave opto-acoustic device 9,268,092 02/23/2016
Methods of producing strain in a semiconductor waveguide and related devices 9,261,647 02/16/2016
Methods of producing strain in a semiconductor waveguide and related devices 9,261,647 02/16/2016
Particle control near reticle and optics using showerhead 9,244,368 01/26/2016
Athermalization of resonant optical devices via thermo-mechanical feedback 9,239,431 01/19/2016
Athermalization of resonant optical devices via thermo-mechanical feedback 9,239,431 01/19/2016
Thermally tuneable optical modulator adapted for differential signaling 9,235,065 01/12/2016
Thermally tuneable optical modulator adapted for differential signaling 9,235,065 01/12/2016
Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same 9,202,657 12/01/2015
Tuning method for microresonators and microresonators made thereby 9,203,134 12/01/2015
Tuning method for microresonators and microresonators made thereby 9,203,134 12/01/2015
Fabrication of small-scale structures with non-planar features 9,190,736 11/17/2015
Power spectrum analysis for defect screening in integrated circuit devices 9,188,622 11/17/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof 9,190,392 11/17/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof 9,190,392 11/17/2015
Fabrication of small-scale structures with non-planar features 9,190,736 11/17/2015
Power spectrum analysis for defect screening in integrated circuit devices 9,188,622 11/17/2015
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation 9,156,068 10/13/2015
Low-voltage differentially-signaled modulators 9,128,308 09/08/2015
Systems and methods for controlling an operating wavelength 9,127,983 09/08/2015
Low-voltage differentially-signaled modulators 9,128,308 09/08/2015
Systems and methods for controlling an operating wavelength 9,127,983 09/08/2015
Method and apparatus of wide-angle optical beamsteering from a nanoantenna phased array 9,104,086 08/11/2015
Method and apparatus of wide-angle optical beamsteering from a nanoantenna phased array 9,104,086 08/11/2015
Methods and devices for maintaining a resonant wavelength of a photonic microresonator 9,081,135 07/14/2015
Methods and devices for optimizing the operation of a semiconductor optical modulator 9,083,460 07/14/2015
Methods and devices for maintaining a resonant wavelength of a photonic microresonator 9,081,135 07/14/2015
Silicon photonic heater-modulator 9,081,215 07/14/2015
Silicon photonic heater-modulator 9,081,215 07/14/2015
Methods and devices for optimizing the operation of a semiconductor optical modulator 9,083,460 07/14/2015
Passive thermo-optic feedback for robust athermal photonic systems 9,063,354 06/23/2015
Passive thermo-optic feedback for robust athermal photonic systems 9,063,354 06/23/2015
Electro-refractive photonic device 9,052,535 06/09/2015
Electro-refractive photonic device 9,052,535 06/09/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction 9,029,239 05/12/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction 9,029,239 05/12/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules 9,013,046 04/21/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules 9,013,046 04/21/2015
Membrane projection lithography 8,981,337 03/17/2015
Membrane projection lithography 8,981,337 03/17/2015
High-speed photonic modulator designs 8,947,764 02/03/2015
Processes for multi-layer devices utilizing layer transfer 8,946,052 02/03/2015
High-speed photonic modulator designs 8,947,764 02/03/2015
Processes for multi-layer devices utilizing layer transfer 8,946,052 02/03/2015
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate 8,906,803 12/09/2014
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate 8,906,803 12/09/2014
Structured wafer for device processing 8,895,364 11/25/2014
Structured wafer for device processing 8,895,364 11/25/2014
Memristor using a transition metal nitride insulator 8,872,246 10/28/2014
Method and apparatus for optical phase error correction 8,822,959 09/02/2014
Method and apparatus for optical phase error correction 8,822,959 09/02/2014
Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode 8,814,622 08/26/2014
Micromachined force-balance feedback accelerometer with optical displacement detection 8,783,106 07/22/2014
Plasmon absorption modulator systems and methods 8,780,431 07/15/2014
Plasmon absorption modulator systems and methods 8,780,431 07/15/2014
Full tape thickness feature conductors for EMI structures 8,747,591 06/10/2014
Infrared nanoantenna apparatus and method for the manufacture thereof 8,750,653 06/10/2014
Infrared nanoantenna apparatus and method for the manufacture thereof 8,750,653 06/10/2014
Full tape thickness feature conductors for EMI structures 8,747,591 06/10/2014
Optically transduced MEMS gyro device 8,726,730 05/20/2014
Structured wafer for device processing 8,729,673 05/20/2014
Parallel optical sampler 8,730,562 05/20/2014
Structured wafer for device processing 8,729,673 05/20/2014
Optically transduced MEMS gyro device 8,726,730 05/20/2014
Optical domain analog to digital conversion methods and apparatus 8,725,004 05/13/2014
Microscale autonomous sensor and communications module 8,680,810 03/25/2014
Microscale autonomous sensor and communications module 8,680,810 03/25/2014
Ovenized microelectromechanical system (MEMS) resonator 8,669,823 03/11/2014
Die singulation method 8,623,744 01/07/2014
Ultralow loss cavities and waveguides scattering loss cancellation 8,625,939 01/07/2014
Die singulation method 8,623,744 01/07/2014
Ultralow loss cavities and waveguides scattering loss cancellation 8,625,939 01/07/2014
System for active control of integrated resonant optical device wavelength 8,615,173 12/24/2013
System for active control of integrated resonant optical device wavelength 8,615,173 12/24/2013
Micro electro mechanical system optical switching 8,611,706 12/17/2013
Silicon photonics thermal phase shifter with reduced temperature range 8,610,994 12/17/2013
Silicon photonics thermal phase shifter with reduced temperature range 8,610,994 12/17/2013
MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads 8,597,985 12/03/2013
Nano-optomechanical transducer 8,600,200 12/03/2013
MEMS packaging with etching and thinning of lid wafer to form lids and expose device wafer bond pads 8,597,985 12/03/2013
Nano-optomechanical transducer 8,600,200 12/03/2013
Optical XOR gate 8,582,931 11/12/2013
Optical XOR gate 8,582,931 11/12/2013
Wafer-level packaging with compression-controlled seal ring bonding 8,575,748 11/05/2013
Wafer-level packaging with compression-controlled seal ring bonding 8,575,748 11/05/2013
Integrated field emission array for ion desorption 8,536,564 09/17/2013
Lateral Acoustic Wave Resonator Comprising a Suspended Membrane of Low Damping Resonator Material 8,525,619 09/03/2013
Microelectromechanical filter formed from parallel-connected lattice networks of contour-mode resonators 8,497,747 07/30/2013
Method to determine the position-dependant metal correction factor for dose-rate equivalent laser testing of semiconductor devices 8,481,345 07/09/2013
Method to determine the position-dependant metal correction factor for dose-rate equivalent laser testing of semiconductor devices 8,481,345 07/09/2013
Die singulation method 8,461,023 06/11/2013
Die singulation method 8,461,023 06/11/2013
Microfabricated particle focusing device 8,425,749 04/23/2013
Method for fabricating a microelectromechanical resonator 8,367,305 02/05/2013
Optical set-reset latch 8,363,990 01/29/2013
Antifuse with a single silicon-rich silicon nitride insulating layer 8,357,994 01/22/2013
Lithographically defined microporous carbon structures 8,349,547 01/08/2013
Die singulation method and package formed thereby 8,236,611 08/07/2012
Die singulation method and package formed thereby 8,236,611 08/07/2012
Microelectromechanical (MEM) thermal actuator 8,232,858 07/31/2012
Microelectromechanical (MEM) thermal actuator 8,232,858 07/31/2012
Microelectromechanical Inertial Sensor 8,205,497 06/26/2012
Microelectromechanical Inertial Sensor 8,205,497 06/26/2012
Integrated optic vector-matrix multiplier 8,027,587 09/27/2011
Integrated optic vector-matrix multiplier 8,027,587 09/27/2011
Optical NOR gate 8,014,639 09/06/2011
Optical NOR gate 8,014,639 09/06/2011
Tunable surface plasmon devices 8,009,356 08/30/2011
Tunable surface plasmon devices 8,009,356 08/30/2011
Micromachined cutting blade formed from {211}-oriented silicon 7,992,309 08/09/2011
Optical NAND gate 7,995,877 08/09/2011
Micromachined cutting blade formed from {211}-oriented silicon 7,992,309 08/09/2011
Optical NAND gate 7,995,877 08/09/2011
Wavelength-tunable optical ring resonators 7,983,517 07/19/2011
Microelectromechanical pump utilizing porous silicon 7,980,828 07/19/2011
Wavelength-tunable optical ring resonators 7,983,517 07/19/2011
Optical waveguide device with an adiabatically-varying width 7,941,014 05/10/2011
Optical waveguide device with an adiabatically-varying width 7,941,014 05/10/2011
Microfabricated ion frequency standard 7,859,350 12/28/2010
Microfabricated ion frequency standard 7,859,350 12/28/2010
Microfabricated bulk wave acoustic bandgap device 7,836,566 11/23/2010
Microfabricated bulk wave acoustic bandgap device 7,836,566 11/23/2010
Dual-range linearized transimpedance amplifier system 7,825,735 11/02/2010
Dual-range linearized transimpedance amplifier system 7,825,735 11/02/2010
Fabrication of thermal microphotonic sensors and sensor arrays 7,820,970 10/26/2010
Optical data latch 7,787,719 08/31/2010
Method for the Protection of Extreme Ultraviolet Lithography Optics 7,740,916 06/22/2010
Method for the Protection of Extreme Ultraviolet Lithography Optics 7,740,916 06/22/2010
Microfabricated bulk wave acoustic bandgap device 7,733,198 06/08/2010
Microfabricated bulk wave acoustic bandgap device 7,733,198 06/08/2010
Method for forming precision clockplate with pivot pins 7,728,248 06/01/2010
Method for forming precision clockplate with pivot pins 7,728,248 06/01/2010
Nanoeletromechanical switch and logic circuits formed therefrom 7,719,318 05/18/2010
Microelectromechanical tunable inductor 7,710,232 05/04/2010
Modular manifold for integrated fluidics and electronics 7,685,864 03/30/2010
Modular manifold for integrated fluidics and electronics 7,685,864 03/30/2010
Thermal microphotonic sensor and sensor array 7,667,200 02/23/2010
Thermal microphotonic sensor and sensor array 7,667,200 02/23/2010
Microelectromechanical resonator and method for fabrication 7,652,547 01/26/2010
Eddy-current-damped microelectromechanical switch 7,633,362 12/15/2009
Wavelength-tunable optical ring resonators 7,616,850 11/10/2009
Wavelength-tunable optical ring resonators 7,616,850 11/10/2009
Microelectromechanical resonator and method for fabrication 7,616,077 11/10/2009
Apparatus and method for electroforming high aspect ratio micro-parts 7,608,174 10/27/2009
Vitreous carbon mask substrate for X-ray lithography 7,608,367 10/27/2009
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films 7,597,819 10/06/2009
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films 7,597,819 10/06/2009
Microelectromechanical flow control apparatus 7,540,469 06/02/2009
Microelectromechanical flow control apparatus 7,540,469 06/02/2009
Inertial sensing microelectromechanical (MEM) safe-arm device 7,530,312 05/12/2009
Inertial sensing microelectromechanical (MEM) safe-arm device 7,530,312 05/12/2009
Adhesive particle shielding 7,473,301 01/06/2009
Adhesive particle shielding 7,473,301 01/06/2009
Method for providing a compliant cantilevered micromold 7,465,419 12/16/2008
Method and apparatus for creating a topography at a surface 7,449,699 11/11/2008
Methods for the precise locating and forming of arrays of curved features into a workpiece 7,434,299 10/14/2008
Methods for the precise locating and forming of arrays of curved features into a workpiece 7,434,299 10/14/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear 7,426,873 09/23/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear 7,426,873 09/23/2008
Apparatus for raising or tilting a micromechanical structure 7,421,924 09/09/2008
Apparatus for raising or tilting a micromechanical structure 7,421,924 09/09/2008
Differential transimpedance amplifier circuit for correlated differential amplification 7,403,065 07/22/2008
Differential transimpedance amplifier circuit for correlated differential amplification 7,403,065 07/22/2008
Microfabricated diffusion source 7,399,449 07/15/2008
Microfabricated diffusion source 7,399,449 07/15/2008
Pyroelectric demodulating detector 7,397,301 07/08/2008
Pyroelectric demodulating detector 7,397,301 07/08/2008
Microelectromechanical safing and arming apparatus 7,383,774 06/10/2008
Contour mode resonators with acoustic reflectors 7,385,334 06/10/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices 7,375,332 05/20/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices 7,375,332 05/20/2008
Geophysics-based method of locating a stationary earth object 7,376,507 05/20/2008
Optical displacement sensor 7,355,720 04/08/2008
Optical displacement sensor 7,355,720 04/08/2008
Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom 7,339,454 03/04/2008
Integration of a waveguide self-electrooptic effect device and a vertically coupled interconnect waveguide 7,336,855 02/26/2008
Heterogeneously integrated microsystem-on-a-chip 7,335,972 02/26/2008
Heterogeneously integrated microsystem-on-a-chip 7,335,972 02/26/2008
Micromachined electrode array 7,308,317 12/11/2007
Radiation-hardened transistor and integrated circuit 7,298,010 11/20/2007
Eddy-current-damped microelectromechanical switch 7,289,009 10/30/2007
MEMS fluidic actuator 7,246,524 07/24/2007
MEMS fluidic actuator 7,246,524 07/24/2007
Condenser Optic with Sacrificial Reflective Surface 7,239,443 07/03/2007
Condenser Optic with Sacrificial Reflective Surface 7,239,443 07/03/2007
Method for forming permanent magnets with different polarities for use in microelectromechanical devices 7,207,102 04/24/2007
Method for forming permanent magnets with different polarities for use in microelectromechanical devices 7,207,102 04/24/2007
Triple inverter pierce oscillator circuit suitable for CMOS 7,183,868 02/27/2007
Triple inverter pierce oscillator circuit suitable for CMOS 7,183,868 02/27/2007
Apparatus comprising a tunable nanomechanical near-field grating and method for controlling far-field emission 7,173,764 02/06/2007
Silicon micro-mold 7,124,994 10/24/2006
Method to control artifacts of microstructural fabrication 7,105,098 09/12/2006
Method to control artifacts of microstructural fabrication 7,105,098 09/12/2006
Compliant cantilevered micromold 7,090,189 08/15/2006
Condenser optic with sacrificial reflective surface 7,081,992 07/25/2006
Condenser optic with sacrificial reflective surface 7,081,992 07/25/2006
Inertial measurement unit using rotatable MEMS sensors 7,066,004 06/27/2006
Inertial measurement unit using rotatable MEMS sensors 7,066,004 06/27/2006
Microelectromechanical safing and arming apparatus 7,051,656 05/30/2006
Anti-stiction coating for microelectromechanical devices 7,045,170 05/16/2006
Gray scale x-ray mask 7,008,737 03/07/2006
Self-seeding ring optical parametric oscillator 6,980,354 12/27/2005
Flip-chip light emitting diode with resonant optical microcavity 6,969,874 11/29/2005
Three-dimensional microelectromechanical tilting platform operated by gear-driven racks 6,960,849 11/01/2005
Sacrificial plastic mold with electroplatable base 6,929,733 08/16/2005
Erected mirror optical switch 6,903,861 06/07/2005
Erected mirror optical switch 6,903,861 06/07/2005
Tailored ink for piston driven electrostatic liquid drop modulator 6,881,250 04/19/2005
Method for the fabrication of three-dimensional microstructures by deep X-ray lithography 6,875,544 04/05/2005
Microoptical system and fabrication method therefor 6,867,435 03/15/2005
Photoimageable composition 6,858,378 02/22/2005
Method and apparatus for detecting the presence and thickness of carbon and oxide layers on EUV reflective surfaces 6,847,463 01/25/2005
Silicon micro-mold and method for fabrication 6,841,339 01/11/2005
Polymeric mold for providing a micro-scale part 6,841,306 01/11/2005
X-ray mask and method for making 6,810,104 10/26/2004
Microelectronic device package with an integral window mounted in a recessed lip 6,809,413 10/26/2004
Apparatus and method for controlling plating uniformity 6,802,950 10/12/2004
X-ray mask and method for providing same 6,798,862 09/28/2004
Image-rotating, 4-mirror, ring optical parametric oscillator 6,775,054 08/10/2004
Apparatus for in situ cleaning of carbon contaminated surfaces 6,772,776 08/10/2004
NPN double heterostructure bipolar transistor with InGaAsN base region 6,765,242 07/20/2004
Microelectromechanical apparatus for elevating and tilting a platform 6,759,787 07/06/2004
Method for providing an arbitrary three-dimensional microstructure in silicon using an anisotropic deep etch 6,749,997 06/15/2004
In-vacuum exposure shutter 6,744,493 06/01/2004
Reconditioning of semiconductor substrates to remove photoresist during semiconductor device fabrication 6,682,607 01/27/2004
Method for applying a photoresist layer to a substrate having a preexisting topology 6,680,263 01/20/2004
Castable plastic mold with electroplatable base 6,679,471 01/20/2004
Planar-constructed spatial micro-stage 6,675,671 01/13/2004
Bi-level microelectronic device package with an integral window 6,674,159 01/06/2004
Broadband visible light source based on AllnGaN light emitting diodes 6,665,329 12/16/2003
Single level microelectronic device package with an integral window 6,661,084 12/09/2003
Photoimageable composition 6,645,696 11/11/2003
Optical parametric osicllators with improved beam quality 6,647,033 11/11/2003
Mask-to-wafer alignment system 6,642,995 11/04/2003
Monitoring system including an electronic sensor platform and an interrogation transceiver 6,624,760 09/23/2003
Cantilever epitaxial process 6,599,362 07/29/2003
Multiple wavelength photolithography for preparing multilayer microstructures 6,582,890 06/24/2003
Damascene fabrication of nonplanar microcoils 6,578,254 06/17/2003
Radiation source with shaped emission 6,563,907 05/13/2003
Microelectromechanical apparatus for elevating and tilting a platform 6,545,385 04/08/2003
Monolithic integration of a MOSFET with a MEMS device 6,531,331 03/11/2003
Gold-based electrical interconnections for microelectronic devices 6,500,760 12/31/2002
Electrode configuration for extreme-UV electrical discharge source 6,498,832 12/24/2002
Removable pellicle for lithographic mask protection and handling 6492067 12/10/2002
X-ray mask and method for providing same 6,477,225 11/05/2002
Surface micromachined structure fabrication methods for a fluid ejection device 6472332 10/29/2002
Electronic drive systems and methods 6419335 07/16/2002
Micromachined fluid ejector systems and methods having improved response characteristics 6416169 07/09/2002
Fluid ejection systems and methods with secondary dielectric fluid 6406130 06/18/2002
Fluid ejection systems and methods with secondary dielectric fluid 6,406,130 06/18/2002
Micromachined fluid ejector systems and methods 6367915 04/09/2002
Method for fabricating an ultra-low expansion mask blank having a crystalline silicon layer 6368942 04/09/2002
Magnetic drive systems and methods for a micromachined fluid ejector 6350015 02/26/2002
Surface acoustic wave resonators with integrated internal coupler reflectors 4,237,433 12/02/1980
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