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VCSELs for interferometric readout of MEMS sensors

Proceedings of SPIE - The International Society for Optical Engineering

Serkland, Darwin K.; Geib, K.M.; Peake, Gregory M.; Keeler, Gordon A.; Shaw, Michael S.; Baker, Michael S.; Okandan, Murat

We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.

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VCSELs for interferometric readout of MEMS sensors

Proceedings of SPIE - The International Society for Optical Engineering

Serkland, Darwin K.; Geib, K.M.; Peake, Gregory M.; Keeler, Gordon A.; Shaw, Michael S.; Baker, Michael S.; Okandan, Murat

We report on the development of single-frequency VCSELs (vertical-cavity surface-emitting lasers) for sensing the position of a moving MEMS (micro-electro-mechanical system) object with resolution much less than 1nm. Position measurement is the basis of many different types of MEMS sensors, including accelerometers, gyroscopes, and pressure sensors. Typically, by switching from a traditional capacitive electronic readout to an interferometric optical readout, the resolution can be improved by an order of magnitude with a corresponding improvement in MEMS sensor performance. Because the VCSEL wavelength determines the scale of the position measurement, laser wavelength (frequency) stability is desirable. This paper discusses the impact of VCSEL amplitude and frequency noise on the position measurement.

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Development of MEMS photoacoustic spectroscopy

Eichenfield, Matthew S.; Givler, R.C.; Pfeifer, Kent B.; Reinke, Charles M.; Robinson, Alex L.; Resnick, Paul J.; Griffin, Benjamin G.; Langlois, Eric L.; Nielson, Gregory N.; Okandan, Murat O.; Shaw, Michael S.

After years in the field, many materials suffer degradation, off-gassing, and chemical changes causing build-up of measurable chemical atmospheres. Stand-alone embedded chemical sensors are typically limited in specificity, require electrical lines, and/or calibration drift makes data reliability questionable. Along with size, these "Achilles' heels" have prevented incorporation of gas sensing into sealed, hazardous locations which would highly benefit from in-situ analysis. We report on development of an all-optical, mid-IR, fiber-optic based MEMS Photoacoustic Spectroscopy solution to address these limitations. Concurrent modeling and computational simulation are used to guide hardware design and implementation.

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Real-time studies of battery electrochemical reactions inside a transmission electron microscope

Sullivan, J.P.; Huang, Jian Y.; Leung, Kevin L.; Shaw, Michael S.; Fan, Hongyou F.; Liu, Xiaohua L.; Liu, Yang; Hudak, Nicholas H.

We report the development of new experimental capabilities and ab initio modeling for real-time studies of Li-ion battery electrochemical reactions. We developed three capabilities for in-situ transmission electron microscopy (TEM) studies: a capability that uses a nanomanipulator inside the TEM to assemble electrochemical cells with ionic liquid or solid state electrolytes, a capability that uses on-chip assembly of battery components on to TEM-compatible multi-electrode arrays, and a capability that uses a TEM-compatible sealed electrochemical cell that we developed for performing in-situ TEM using volatile battery electrolytes. These capabilities were used to understand lithiation mechanisms in nanoscale battery materials, including SnO{sub 2}, Si, Ge, Al, ZnO, and MnO{sub 2}. The modeling approaches used ab initio molecular dynamics to understand early stages of ethylene carbonate reduction on lithiated-graphite and lithium surfaces and constrained density functional theory to understand ethylene carbonate reduction on passivated electrode surfaces.

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Room temperature detector array technology for the terahertz to far-infrared

Shaner, Eric A.; Wright, Jeremy B.; Kadlec, Emil A.; Shaw, Michael S.; Lentine, Anthony L.; Rakich, Peter T.; Camacho, Ryan C.

Thermal detection has made extensive progress in the last 40 years, however, the speed and detectivity can still be improved. The advancement of silicon photonic microring resonators has made them intriguing for detection devices due to their small size and high quality factors. Implementing silicon photonic microring or microdisk resonators as a means of a thermal detector gives rise to higher speed and detectivity, as well as lower noise compared to conventional devices with electrical readouts. This LDRD effort explored the design and measurements of silicon photonic microdisk resonators used for thermal detection. The characteristic values, consisting of the thermal time constant ({tau} {approx} 2 ms) and noise equivalent power were measured and found to surpass the performance of the best microbolometers. Furthermore the detectivity was found to be D{sub {lambda}} = 2.47 x 10{sup 8} cm {center_dot} {radical}Hz/W at 10.6 {mu}m which is comparable to commercial detectors. Subsequent design modifications should increase the detectivity by another order of magnitude. Thermal detection in the terahertz (THz) remains underdeveloped, opening a door for new innovative technologies such as metamaterial enhanced detectors. This project also explored the use of metamaterials in conjunction with a cantilever design for detection in the THz region and demonstrated the use of metamaterials as custom thin film absorbers for thermal detection. While much work remains to integrate these technologies into a unified platform, the early stages of research show promising futures for use in thermal detection.

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Thermal Microphotonic Focal Plane Array (TM-FPA)

Shaw, Michael S.; Lentine, Anthony L.; Nielson, Gregory N.; Wright, Jeremy B.; Peters, D.W.; Zortman, William A.; McCormick, Frederick B.

The advent of high quality factor (Q) microphotonic-resonators has led to the demonstration of high-fidelity optical sensors of many physical phenomena (e.g. mechanical, chemical, and biological sensing) often with far better sensitivity than traditional techniques. Microphotonic-resonators also offer potential advantages as uncooled thermal detectors including significantly better noise performance, smaller pixel size, and faster response times than current thermal detectors. In particular, microphotonic thermal detectors do not suffer from Johnson noise in the sensor, offer far greater responsivity, and greater thermal isolation as they do not require metallic leads to the sensing element. Such advantages make the prospect of a microphotonic thermal imager highly attractive. Here, we introduce the microphotonic thermal detection technique, present the theoretical basis for the approach, discuss our progress on the development of this technology and consider future directions for thermal microphotonic imaging. Already we have demonstrated viability of device fabrication with the successful demonstration of a 20{micro}m pixel, and a scalable readout technique. Further, to date, we have achieved internal noise performance (NEP{sub Internal} < 1pW/{radical}Hz) in a 20{micro}m pixel thereby exceeding the noise performance of the best microbolometers while simultaneously demonstrating a thermal time constant ({tau} = 2ms) that is five times faster. In all, this results in an internal detectivity of D*{sub internal} = 2 x 10{sup 9}cm {center_dot} {radical}Hz/W, while roughly a factor of four better than the best uncooled commercial microbolometers, future demonstrations should enable another order of magnitude in sensitivity. While much work remains to achieve the level of maturity required for a deployable technology, already, microphotonic thermal detection has demonstrated considerable potential.

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Microphotonic thermal detectors and imagers

Proceedings of SPIE - The International Society for Optical Engineering

Shaw, Michael S.; Rakich, Peter T.; Lentine, Anthony L.; Nielson, Gregory N.; Wright, Jeremy B.; Zortman, William A.; McCormick, Frederick B.

We present the theory of operation along with detailed device designs and initial experimental results of a new class of uncooled thermal detectors. The detectors, termed microphotonic thermal detectors, are based on the thermo-optic effect in high quality factor (Q) micrometer-scale optical resonators. Microphotonic thermal detectors do not suffer from Johnson noise, do not require metallic connections to the sensing element, do not suffer from charge trapping effects, and have responsivities orders of magnitude larger than microbolometer-based thermal detectors. For these reasons, microphotonic thermal detectors have the potential to reach thermal phonon noise limited performance. © 2009 SPIE.

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Ultra-lightweight telescope with MEMS adaptive optic for distortion correction

Spahn, Olga B.; Shaw, Michael S.; Dagel, Daryl D.; Mani, Seethambal S.; Sweatt, W.C.; Turner, Fawn R.; Grine, Alejandro J.; Adams, David P.; Resnick, Paul J.; Cowan, William D.

Recent world events have underscored the need for a satellite based persistent global surveillance capability. To be useful, the satellite must be able to continuously monitor objects the size of a person anywhere on the globe and do so at a low cost. One way to satisfy these requirements involves a constellation of satellites in low earth orbit capable of resolving a spot on the order of 20 cm. To reduce cost of deployment, such a system must be dramatically lighter than a traditional satellite surveillance system with a high spatial resolution. The key to meeting this requirement is a lightweight optics system with a deformable primary and secondary mirrors and an adaptive optic subsystem correction of wavefront distortion. This proposal is concerned with development of MEMS micromirrors for correction of aberrations in the primary mirror and improvement of image quality, thus reducing the optical requirements on the deployable mirrors. To meet this challenge, MEMS micromirrors must meet stringent criteria on their performance in terms of flatness, roughness and resolution of position. Using Sandia's SUMMIT foundry which provides the world's most sophisticated surface MEMS technology as well as novel designs optimized by finite element analysis will meet severe requirements on mirror travel range and accuracy.

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18 Results
18 Results