Publications

De Boer, Maarten P.

Abstract not provided.

De Boer, Maarten P.

Abstract not provided.

De Boer, Maarten P.

Abstract not provided.

Experimental Mechanics

Corwin, Alex D.; De Boer, Maarten P.

We propose and evaluate a linearized method to measure dynamic friction between micromachined surfaces. This linearized method reduces the number of data points needed to obtain dynamic friction data, minimizing the effect of wear on sliding surfaces during the measurement. We find that the coefficient of dynamic friction is lower than the coefficient of static friction, while the adhesive pressure is indistinguishable for the two measurements. Furthermore, after an initial detailed measurement is made on a device type, the number of trial runs required to take the data on subsequent devices can be reduced from 200 to approximately 20. © Society for Experimental Mechanics 2008.

Proposed for publication in the Journal of Microelectronics and Micromechanics.

Czaplewski, David A.; Patrizi, G.A.; Kraus, Garth K.; Wendt, J.R.; Nordquist, Christopher N.; Wolfley, Steven L.; De Boer, Maarten P.

We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off' state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.

Frictional aging of a monolayer-coated micromachined actuator

De Boer, Maarten P.

Abstract not provided.

Frictional de-aging in micromachined surfaces

Corwin, Alex D.; De Boer, Maarten P.

Abstract not provided.

Howell, Stephen W.; De Boer, Maarten P.; Stewart, Harold D.

Abstract not provided.

Acta Materiala

De Boer, Maarten P.

Abstract not provided.

Acta Materiala

De Boer, Maarten P.; Corwin, Alex D.; Kotula, Paul G.

Abstract not provided.

Applied Physics Letters

DelRio, Frank W.; Dunn, Martin L.; Phinney, Leslie M.; Bourdon, Christopher B.; De Boer, Maarten P.

Capillary condensation of water can have a significant effect on rough surface adhesion. To explore this phenomenon between micromachined surfaces, the authors perform microcantilever experiments as a function of surface roughness and relative humidity (RH). Below a threshold RH, the adhesion is mainly due to van der Waals forces across extensive noncontacting areas. Above the threshold RH, the adhesion jumps due to capillary condensation and increases towards the upper limit of Γ = 144 mJ/m2. A detailed model based on the measured surface topography qualitatively agrees with the experimental data only when the topographic correlations between the upper and lower surfaces are considered. © 2007 American Institute of Physics.

De Boer, Maarten P.; Corwin, Alex D.

Abstract not provided.

Corwin, Alex D.; De Boer, Maarten P.

Abstract not provided.

Grillet, Anne M.; Brooks, Carlton F.; De Boer, Maarten P.; Bourdon, Christopher B.; Gorby, Allen D.

The goal of this project was to design, build and test novel diagnostics to probe the effect of hydrodynamic forces on coalescence dynamics. Our investigation focused on how a drop coalesces onto a flat surface which is analogous to two drops coalescing, but more amenable to precise experimental measurements. We designed and built a flow cell to create an axisymmetric compression flow which brings a drop onto a flat surface. A computer-controlled system manipulates the flow to steer the drop and maintain a symmetric flow. Particle image velocimetry was performed to confirm that the control system was delivering a well conditioned flow. To examine the dynamics of the coalescence, we implemented an interferometry capability to measure the drainage of the thin film between the drop and the surface during the coalescence process. A semi-automated analysis routine was developed which converts the dynamic interferogram series into drop shape evolution data.

Growth of silicon carbide nanoparticles using tetraethylorthosilicate for microelectromechanical sy

De Boer, Maarten P.

Abstract not provided.

Corwin, Alex D.; De Boer, Maarten P.

Abstract not provided.

De Boer, Maarten P.; Corwin, Alex D.

This report details results from our last year of work (FY2005) on friction in MEMS as funded by the Campaign 6 program for the Microscale Friction project. We have applied different monolayers to a sensitive MEMS friction tester called the nanotractor. The nanotractor is also a useful actuator that can travel {+-}100 {micro}m in 40 nm steps, and is being considered for several MEMS applications. With this tester, we can find static and dynamic coefficients of friction. We can also quantify deviations from Amontons' and Coulomb's friction laws. Because of the huge surface-to-volume ratio at the microscale, surface properties such as adhesion and friction can dominate device performance, and therefore such deviations are important to quantify and understand. We find that static and dynamic friction depend on the monolayer lubricant applied. The friction data can be modeled with a non-zero adhesion force, which represents a deviation from Amontons' Law. Further, we show preliminary data indicating that the adhesion force depends not only on the monolayer, but also on the normal load applied. Finally, we also observe slip deflections before the transition from static to dynamic friction, and find that they depend on the monolayer.

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Delrio, Frank W.; De Boer, Maarten P.; Phinney, Leslie M.; Bourdon, Christopher B.; Dunn, Martin L.

Interfacial adhesion is an important factor in determining the performance and reliability of microelectromechanical systems (MEMS). Van der Waals dispersion forces are the dominant adhesion mechanism in the low relative humidity (RH) regime. At small roughness values, adhesion is mainly due to van der Waals dispersion forces acting across extensive non-contacting areas and is related to 1/Dave2, where Dave is the average surface separation. These contributions must be considered due to the close proximity of the surfaces, which is a result of the planar deposition technology. At large roughness values, van der Waals forces at contacting asperities become the dominating contributor to the adhesion. Capillary condensation of water has a significant effect on rough surface adhesion in the moderate to high RH regime. Above a threshold RH, which is a function of the surface roughness, the adhesion jumps due to meniscus formation at the interface and increases rapidly towards the upper limit of Γ=2γcosθ=44 mJ/m2, where γis the liquid surface energy and θis the contact angle. Copyright © 2006 by ASME.

Sumali, Hartono S.; Corwin, Alex D.; Thayer, Gayle E.; De Boer, Maarten P.; Koch, Steven J.

This report summarizes a survey of several new methods for obtaining mechanical and rheological properties of single biological cells, in particular: (1) The use of laser Doppler vibrometry (LDV) to measure the natural vibrations of certain cells. (2) The development of a novel micro-electro-mechanical system (MEMS) for obtaining high-resolution force-displacement curves. (3) The use of the atomic force microscope (AFM) for cell imaging. (4) The adaptation of a novel squeezing-flow technique to micro-scale measurement. The LDV technique was used to investigate the recent finding reported by others that the membranes of certain biological cells vibrate naturally, and that the vibration can be detected clearly with recent instrumentation. The LDV has been reported to detect motions of certain biological cells indirectly through the motion of a probe. In this project, trials on Saccharomyces cerevisiae tested and rejected the hypothesis that the LDV could measure vibrations of the cell membranes directly. The MEMS investigated in the second technique is a polysilicon surface-micromachined force sensor that is able to measure forces to a few pN in both air and water. The simple device consists of compliant springs with force constants as low as 0.3 milliN/m and Moire patterns for nanometer-scale optical displacement measurement. Fields from an electromagnet created forces on magnetic micro beads glued to the force sensors. These forces were measured and agreed well with finite element prediction. It was demonstrated that the force sensor was fully functional when immersed in aqueous buffer. These results show the force sensors can be useful for calibrating magnetic forces on magnetic beads and also for direct measurement of biophysical forces on-chip. The use of atomic force microscopy (AFM) for profiling the geometry of red blood cells was the third technique investigated here. An important finding was that the method commonly used for attaching the cells to a substrate actually modified the mechanical properties of the cell membrane. Thus, the use of the method for measuring the mechanical properties of the cell may not be completely appropriate without significant modifications. The latest of the studies discussed in this report is intended to overcome the drawback of the AFM as a means of measuring mechanical and rheological properties. The squeezing-flow AFM technique utilizes two parallel plates, one stationary and the other attached to an AFM probe. Instead of using static force-displacement curves, the technique takes advantage of frequency response functions from force to velocity. The technique appears to be quite promising for obtaining dynamic properties. More research is required to develop this technique.

Applied Optics

Sinclair, Michael B.; De Boer, Maarten P.; Corwin, Alex D.

We describe the design and operation of a long-working-distance, incoherent light interference microscope that has been developed to address the growing demand for new microsystem characterization tools. The design of the new microscope is similar to that of a Linnik interference microscope and thus preserves the full working distance of the long-working-distance objectives utilized. However, in contrast to a traditional Linnik microscope, the new microscope does not rely on the use of matched objectives in the sample and the reference arms of the interferometer. An adjustable optical configuration has been devised that allows the total optical path length, wavefront curvature, and dispersion of the reference arm to be matched to the sample arm of the interferometer. The reference arm configuration can be adjusted to provide matching for 5×, 10×, and 20× long-working-distance objectives in the sample arm. In addition to retaining the full working distance of the sample arm objectives, the new design allows interference images to be acquired in situations in which intervening windows are necessary, such as occur with packaged microsystems, microfluidic devices, and cryogenic, vacuum, or environmental chamber studies of microsystem performance. The interference microscope is compatible with phase-shifting interferometry, vertical scanning interferometry, and stroboscopic measurement of dynamic processes. © 2005 Optical Society of America.

De Boer, Maarten P.

Abstract not provided.

Sasaki, Darryl Y.; Koch, Steven J.; Thayer, Gayle E.; Corwin, Alex D.; De Boer, Maarten P.; Bunker, B.C.; Bachand, George B.; Rivera, Susan B.; Gaudioso, Jennifer M.; Trent, Amanda M.; Spoerke, Erik D.

The formation and functions of living materials and organisms are fundamentally different from those of synthetic materials and devices. Synthetic materials tend to have static structures, and are not capable of adapting to the functional needs of changing environments. In contrast, living systems utilize energy to create, heal, reconfigure, and dismantle materials in a dynamic, non-equilibrium fashion. The overall goal of the project was to organize and reconfigure functional assemblies of nanoparticles using strategies that mimic those found in living systems. Active assembly of nanostructures was studied using active biomolecules to drive the organization and assembly of nanocomposite materials. In this system, kinesin motor proteins and microtubules were used to direct the transport and interactions of nanoparticles at synthetic interfaces. In addition, the kinesin/microtubule transport system was used to actively assemble nanocomposite materials capable of storing significant elastic energy. Novel biophysical measurement tools were also developed for measuring the collective force generated by kinesin motor proteins, which will provide insight on the mechanical constraints of active assembly processes. Responsive reconfiguration of nanostructures was studied in terms of using active biomolecules to mediate the optical properties of quantum dot (QD) arrays through modulation of inter-particle spacing and associated energy transfer interaction. Design rules for kinesin-based transport of a wide range of nanoscale cargo (e.g., nanocrystal quantum dots, micron-sized polymer spheres) were developed. Three-dimensional microtubule organizing centers were assembled in which the polar orientation of the microtubules was controlled by a multi-staged assembly process. Overall, a number of enabling technologies were developed over the course of this project, and will drive the exploitation of energy-driven processes to regulate the assembly, disassembly, and dynamic reorganization of nanomaterials.

Hearne, Sean J.; De Boer, Maarten P.; Foiles, Stephen M.; Kotula, Paul G.; Dyck, Christopher D.; Follstaedt, D.M.; Buchheit, Thomas E.

The ability to integrate metal and semiconductor micro-systems to perform highly complex functions, such as RF-MEMS, will depend on developing freestanding metal structures that offer improved conductivity, reflectivity, and mechanical properties. Three issues have prevented the proliferation of these systems: (1) warpage of active components due to through-thickness stress gradients, (2) limited component lifetimes due to fatigue, and (3) low yield strength. To address these issues, we focus on developing and implementing techniques to enable the direct study of the stress and microstructural evolution during electrodeposition and mechanical loading. The study of stress during electrodeposition of metal thin films is being accomplished by integrating a multi-beam optical stress sensor into an electrodeposition chamber. By coupling the in-situ stress information with ex-situ microstructural analysis, a scientific understanding of the sources of stress during electrodeposition will be obtained. These results are providing a foundation upon which to develop a stress-gradient-free thin film directly applicable to the production of freestanding metal structures. The issues of fatigue and yield strength are being addressed by developing novel surface micromachined tensile and bend testers, by interferometry, and by TEM analysis. The MEMS tensile tester has a ''Bosch'' etched hole to allow for direct viewing of the microstructure in a TEM before, during, and after loading. This approach allows for the quantitative measurements of stress-strain relations while imaging dislocation motion, and determination of fracture nucleation in samples with well-known fatigue/strain histories. This technique facilitates the determination of the limits for classical deformation mechanisms and helps to formulate a new understanding of the mechanical response as the grain sizes are refined to a nanometer scale. Together, these studies will result in a science-based infrastructure to enhance the production of integrated metal--semiconductor systems and will directly impact RF MEMS and LIGA technologies at Sandia.

De Boer, Maarten P.

Abstract not provided.

DelRio, Frank W.; De Boer, Maarten P.; Boyce, Brad B.

Abstract not provided.