King, Michael P.; Ryder, Kaitlyn L.; Ryder, Landen D.; Sternberg, Andrew L.; Kozub, John A.; Zhang, En X.; Khachatrian, Ani; Buchner, Steven P.; Mcmorrow, Dale P.; Hales, Joel M.; Zhao, Yuanfu; Wang, Liang; Wang, Chuanmin; Weller, Robert A.; Schrimpf, Ronald D.; Weiss, Sharon M.; Reed, Robert A.; Black, Dolores A.
A sensitive volume is developed using pulsed laser-induced collected charge for two bias conditions in an epitaxial silicon diode. These sensitive volumes show good agreement with experimental two photon absorption laser-induced collected charge at a variety of focal positions and pulse energies. When compared to ion-induced collected charge, the laser-based sensitive volume over predicts the experimental collected charge at low bias and agrees at high bias. Here, a sensitive volume based on ion-induced collected charge adequately describes the ion experimental results at both biases. Differences in the amount of potential modulation explain the differences between the ion-and laser-based sensitive volumes at the lower bias. Truncation of potential modulation by the highly doped substrate at the higher bias results in similar sensitive volumes.
Ryder, Kaitlyn L.; Ryder, Landen D.; Sternberg, Andrew L.; Kozub, John A.; Zhang, Enxia; Khachatrian, Ani; Buchner, Steven P.; Mcmorrow, Dale P.; Hales, Joel M.; Zhao, Yuanfu; Wang, Liang; Wang, Chuanmin; Weller, Robert A.; Schrimpf, Ronald D.; Weiss, Sharon M.; Reed, Robert A.; Black, Dolores; King, Michael P.
In this paper, we present heavy ion and proton data on AlGaN highvoltage HEMTs showing Single Event Burnout, Total Ionizing Dose, and Displacement Damage responses. These are the first such data for materials of this type. Two different designs of the epitaxial structure were tested for Single Event Burnout (SEB). The default layout design showed burnout voltages that decreased rapidly with increasing LET, falling to about 25% of nominal breakdown voltage for ions with LET of about 34 MeV·cm2/mg for both structures. Samples of the device structure with lower AlN content were tested with varying gate-drain spacing and revealed an improved robustness to heavy ions, resulting in burnout voltages that did not decrease up to at least 33.9 MeV·cm2/mg. Failure analysis showed there was consistently a point, location random, where gate and drain had been shorted. Oscilloscope traces of terminal voltages and currents during burnout events lend support to the hypothesis that burnout events begin with a heavy ion strike in the vulnerable region between gate and drain. This subsequently initiates a cascade of events resulting in damage that is largely manifested elsewhere in the device. This hypothesis also suggests a path for greatly improving the susceptibility to SEB as development of this technology goes forward. Lastly, testing with 2.5 MeV protons showed only minor changes in device characteristics.
State of the art semiconductor processes have created high performance and low power consumption technologies. There is a drive to use these technologies for commercial space, defense, and infrastructure.