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Sources of error and methods to improve accuracy in interface state density analysis using quasi-static capacitance-voltage measurements in wide bandgap semiconductors

Journal of Applied Physics

Rummel, Brian; Cooper, J.A.; Morisette, D.T.; Yates, Luke Y.; Glaser, Caleb E.; Binder, Andrew B.; Ramadoss, K.; Kaplar, Robert K.

Characterizing interface trap states in commercial wide bandgap devices using frequency-based measurements requires unconventionally high probing frequencies to account for both fast and slow traps associated with wide bandgap materials. The C − ψ S technique has been suggested as a viable quasi-static method for determining the interface trap state densities in wide bandgap systems, but the results are shown to be susceptible to errors in the analysis procedure. This work explores the primary sources of errors present in the C − ψ S technique using an analytical model that describes the apparent response for wide bandgap MOS capacitor devices. Measurement noise is shown to greatly impact the linear fitting routine of the 1 / C S ∗ 2 vs ψ S plot to calibrate the additive constant in the surface potential/gate voltage relationship, and an inexact knowledge of the oxide capacitance is also shown to impede interface trap state analysis near the band edge. In addition, a slight nonlinearity that is typically present throughout the 1 / C S ∗ 2 vs ψ S plot hinders the accurate estimation of interface trap densities, which is demonstrated for a fabricated n-SiC MOS capacitor device. Methods are suggested to improve quasi-static analysis, including a novel method to determine an approximate integration constant without relying on a linear fitting routine.

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Gate protection for vertical gallium nitride trench MOSFETs: The buried field shield ☆

e-Prime - Advances in Electrical Engineering, Electronics and Energy

Binder, Andrew B.; Cooper, James A.; Steinfeldt, Jeffrey A.; Allerman, A.A.; Laros, James H.; Yates, Luke Y.; Kaplar, Robert K.

This paper describes a process for forming a buried field shield in GaN by an etch-and-regrowth process, which is intended to protect the gate dielectric from high fields in the blocking state. GaN trench MOSFETs made at Sandia serve as the baseline to show the limitations in making a trench gated device without a method to protect the gate dielectric. Device data coupled with simulations show device failure at 30% of theoretical breakdown for devices made without a field shield. Implementation of a field shield reduces the simulated electric field in the dielectric to below 4 MV/cm at breakdown, which eliminates the requirement to derate the device in order to protect the dielectric. For realistic lithography tolerances, however, a shield-to-channel distance of 0.4 μm limits the field in the gate dielectric to 5 MV/cm and requires a small margin of device derating to safeguard a long-term reliability and lifetime of the dielectric.

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System Integration Analysis for Modular Solid-State Substations

Mueller, Jacob M.; Kaplar, Robert K.; Flicker, Jack D.; Garcia Rodriguez, Luciano A.; Binder, Andrew B.; Ropp, Michael E.; Gill, Lee G.; Palacios, Felipe N.; Rashkin, Lee; Dow, Andrew R.; Elliott, Ryan T.

Structural modularity is critical to solid-state transformer (SST) and solid-state power substation (SSPS) concepts, but operational aspects related to this modularity are not yet fully understood. Previous studies and demonstrations of modular power conversion systems assume identical module compositions, but dependence on module uniformity undercuts the value of the modular framework. In this project, a hierarchical control approach was developed for modular SSTs which achieves system-level objectives while ensuring equitable power sharing between nonuniform building block modules. This enables module replacements and upgrades which leverage circuit and device technology advancements to improve system-level performance. The functionality of the control approach is demonstrated in detailed time-domain simulations. Results of this project provide context and strategic direction for future LDRD projects focusing on technologies supporting the SST crosscut outcome of the resilient energy systems mission campaign.

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VTO 2022 Annual Progress Report: Vertical GaN Device Development

Binder, Andrew B.

This project is part of a multi-lab consortium that leverages U.S. research expertise and facilities at national labs and universities to significantly advance electric drive power density and reliability, while simultaneously reducing cost. The final objective of the consortium is to develop a 100 kW traction drive system that achieves 33 kW/L, has an operational life of 300,000 miles, and a cost of less than $\$$6/kW. One element of the system is a 100 kW inverter with a power density of 100 kW/L and a cost of $\$$2.7/kW. New materials such as wide bandgap semiconductors, soft magnetic materials, and ceramic dielectrics, integrated using multi-objective co optimization design techniques, will be utilized to achieve these program goals. This project focuses on a subset of the power electronics work within the consortium, specifically the design, fabrication, and evaluation of vertical GaN power devices suitable for automotive applications.

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Demonstration of >6.0-kV Breakdown Voltage in Large Area Vertical GaN p-n Diodes With Step-Etched Junction Termination Extensions

IEEE Transactions on Electron Devices

Yates, Luke Y.; Gunning, Brendan P.; Crawford, Mary H.; Steinfeldt, Jeffrey A.; Smith, Michael; Abate, Vincent M.; Dickerson, Jeramy R.; Armstrong, Andrew A.; Binder, Andrew B.; Allerman, A.A.; Kaplar, Robert K.

Vertical gallium nitride (GaN) p-n diodes have garnered significant interest for use in power electronics where high-voltage blocking and high-power efficiency are of concern. In this article, we detail the growth and fabrication methods used to develop a large area (1 mm2) vertical GaN p-n diode capable of a 6.0-kV breakdown. We also demonstrate a large area diode with a forward pulsed current of 3.5 A, an 8.3-mΩ·cm2 differential specific ON-resistance, and a 5.3-kV reverse breakdown. In addition, we report on a smaller area diode (0.063 mm2) that is capable of 6.4-kV breakdown with a differential specific ON-resistance of 10.2 m·Ω·cm2, when accounting for current spreading through the drift region at a 45° angle. Finally, the demonstration of avalanche breakdown is shown for a 0.063-mm2 diode with a room temperature breakdown of 5.6 kV. These results were achieved via epitaxial growth of a 50-μm drift region with a very low carrier concentration of < 1×1015 cm-3 and a carefully designed four-zone junction termination extension.

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A discussion on various experimental methods of impact ionization coefficient measurement in GaN

AIP Advances

Ji, Dong; Zeng, Ke; Bian, Zhengliang; Shankar, Bhawani; Gunning, Brendan P.; Binder, Andrew B.; Dickerson, Jeramy R.; Aktas, Ozgur; Anderson, Travis J.; Kaplar, Robert K.; Chowdhury, Srabanti

Impact ionization coefficients play a critical role in semiconductors. In addition to silicon, silicon carbide and gallium nitride are important semiconductors that are being seen more as mainstream semiconductor technologies. As a reflection of the maturity of these semiconductors, predictive modeling has become essential to device and circuit designers, and impact ionization coefficients play a key role here. Recently, several studies have measured impact ionization coefficients. We dedicated the first part of our study to comparing three experimental methods to estimate impact ionization coefficients in GaN, which are all based on photomultiplication but feature characteristic differences. The first method inserts an InGaN hole-injection layer, the accuracy of which is challenged by the dominance of ionization in InGaN, leading to possible overestimation of the coefficients. The second method utilizes the Franz-Keldysh effect for hole injection but not for electrons, where the mixed injection of induced carriers would require a margin of error. The third method uses complementary p-n and n-p structures that have been at the basis of this estimation in Si and SiC and leans on the assumption of a constant electric field, and any deviation would require a margin of error. In the second part of our study, we evaluated the models using recent experimental data from diodes demonstrating avalanche breakdown.

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Analysis of the dependence of critical electric field on semiconductor bandgap

Journal of Materials Research

Slobodyan, Oleksiy; Flicker, Jack D.; Dickerson, Jeramy R.; Shoemaker, Jonah; Binder, Andrew B.; Smith, Trevor S.; Goodnick, Stephen; Kaplar, Robert K.; Hollis, Mark

Understanding of semiconductor breakdown under high electric fields is an important aspect of materials’ properties, particularly for the design of power devices. For decades, a power-law has been used to describe the dependence of material-specific critical electrical field (Ecrit) at which the material breaks down and bandgap (Eg). The relationship is often used to gauge tradeoffs of emerging materials whose properties haven’t yet been determined. Unfortunately, the reported dependencies of Ecrit on Eg cover a surprisingly wide range in the literature. Moreover, Ecrit is a function of material doping. Further, discrepancies arise in Ecrit values owing to differences between punch-through and non-punch-through device structures. We report a new normalization procedure that enables comparison of critical electric field values across materials, doping, and different device types. An extensive examination of numerous references reveals that the dependence Ecrit ∝ Eg1.83 best fits the most reliable and newest data for both direct and indirect semiconductors. Graphical abstract: [Figure not available: see fulltext.].

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Progress in Fabrication and Characterization of Vertical GaN Power Devices (invited)

Kaplar, Robert K.; Binder, Andrew B.; Crawford, Mary H.; Allerman, A.A.; Gunning, Brendan P.; Flicker, Jack D.; Yates, Luke Y.; Armstrong, Andrew A.; Dickerson, Jeramy R.; Glaser, Caleb E.; Steinfeldt, Jeffrey A.; Abate, Vincent M.; Smith, Michael; Pickrell, Gregory P.; Sharps, Paul; Anderson, T.; Gallagher, J.; Jacobs, A.G.; Koehler, A.; Tadjer, M.; Hobart, K.; Hite, J.; Ebrish, M.; Porter, M.; Zeng, K.; Chowdhury, S.; Ji, D.; Aktas, O.; Cooper, James A.

Abstract not provided.

Results 1–25 of 71
Results 1–25 of 71