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Analysis of multilayer devices for superconducting electronics by high-resolution scanning transmission electron microscopy and energy dispersive spectroscopy

IEEE Transactions on Applied Superconductivity

Missert, Nancy A.; Kotula, Paul G.; Rye, Michael J.; Rehm, Laura; Sluka, Volker; Kent, Andrew D.; Yohannes, Daniel; Kirichenko, Alex F.; Vernik, Igor V.; Mukhanov, Oleg A.; Bolkhovsky, Vladimir; Wynn, Alex; Johnson, Leonard; Gouker, Mark

A focused ion beam was used to obtain cross-sectional specimens from both magnetic multilayer and Nb/Al-AlOx/Nb Josephson junction devices for characterization by scanning transmission electron microscopy (STEM) and energy dispersive X-ray spectroscopy (EDX). Automated multivariate statistical analysis of the EDX spectral images produced chemically unique component images of individual layers within the multilayer structures. STEM imaging elucidated distinct variations in film morphology, interface quality, and/or etch artifacts that could be correlated to magnetic and/or electrical properties measured on the same devices.

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Advanced Characterization: 3D chemistry and structure at sub-nm resolution

Kotula, Paul G.; Rye, Michael J.

This work has started the process of extending nanometer-scale comprehensive microanalysis to the 3rd dimension by combining full x-ray spectral imaging with previously developed computed tomography techniques whereby we acquire a series of spectral images for a large number of projections of the same specimen in the transmission electron microscope and then analyze the composite computed tomographic spectral image data prior to application of existing tomographic reconstruction software. We have demonstrated a needle-shaped specimen geometry (shape/size and preparation method) by focused ion beam preparation and acquisition and analysis of a complete tomographic spectral image on a test material consisting of fine-grained Ni with sub-10 nm alumina particles.

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Results 1–25 of 41
Results 1–25 of 41