A dry etching process to transfer the pattern of a photonic integrated circuit design for high-speed laser communications is described. The laser stack under consideration is a 3.2-µm-thick InGaAs/InAlAs/InAlGaAs epitaxial structure grown by molecular beam epitaxy. The etching was performed using Cl2-based inductively-coupled-plasma and reactive-ion-etching (ICP-RIE) reactors. Four different recipes are presented in two similar ICP-RIE reactors, with special attention paid to the etched features formed with various hard mask compositions, in-situ passivations, and process temperatures. The results indicate that it is possible to produce high-aspect-ratio features with sub-micron separation on this multilayer structure. Additionally, the results of the etching highlight the tradeoffs involved with the corresponding recipes.
Toroidal dielectric metasurface with a Q-factor of 728 in 1500 nm wavelength are reported. The resonance couples strongly to the environment, as demonstrated with a refractometric sensing experiment.
Our goal was to develop an integrated platform for electrical control of SiV defects in diamond. The understanding and techniques we discover for electrical control have direct relevance for scalable color center based devices. More fundamentally, they can serve as a basis for developing diamond light sources and exploring color center transitions previously understood as inaccessible. While we did not meet all these goals we did develop a unique set of capabilities that allowed Sandia to distinct itself both internally and through continuing external collaborations.
Thermophotovoltaics (TPV) is the process by which photons radiated from a thermal emitter are converted into electrical power via a photovoltaic cell. Selective thermal emitters that can survive at temperatures at or above ∼1000°C have the potential to greatly improve the efficiency of TPV energy conversion by restricting the emission of photons with energies below the photovoltaic (PV) cell bandgap energy. In this work, we demonstrated TPV energy conversion using a high-temperature selective emitter, dielectric filter, and 0.6 eV In0.68 Ga0.32 As photovoltaic cell. We fabricated a passivated platinum and alumina frequency-selective surface by conventional stepper lithography. To our knowledge, this is the first demonstration of TPV energy conversion using a metamaterial emitter. The emitter was heated to >1000°C, and converted electrical power was measured. After accounting for geometry, we demonstrated a thermal-to-electrical power conversion efficiency of 24.1 0.9% at 1055°C. We separately modeled our system consisting of a selective emitter, dielectric filter, and PV cell and found agreement with our measured efficiency and power to within 1%. Our results indicate that high-efficiency TPV generators are possible and are candidates for remote power generation, combined heat and power, and heat-scavenging applications.
We demonstrate the active tuning of all-dielectric metasurfaces exhibiting high-quality factor (high-Q) resonances. The active control is provided by embedding the asymmetric silicon meta-atoms with liquid crystals, which allows the relative index of refraction to be controlled through heating. It is found that high quality factor resonances (Q = 270 ± 30) can be tuned over more than three resonance widths. Our results demonstrate the feasibility of using all-dielectric metasurfaces to construct tunable narrow-band filters.
Alloyed and compound contacts between metal and semiconductor transistor channels enable self-aligned gate processes which play a significant role in transistor scaling. At nanoscale dimensions and for nanowire channels, prior experiments focused on reactions along the channel length, but the early stage of reaction in their cross sections remains unknown. Here, we report on the dynamics of the solid-state reaction between metal (Ni) and semiconductor (In0.53Ga0.47As), along the cross-section of nanowires that are 15 nm in width. Unlike planar structures where crystalline nickelide readily forms at conventional, low alloying temperatures, nanowires exhibit a solid-state amorphization step that can undergo a crystal regrowth step at elevated temperatures. In this study, we capture the layer-by-layer reaction mechanism and growth rate anisotropy using in situ transmission electron microscopy (TEM). Our kinetic model depicts this new, in-plane contact formation which could pave the way for engineered nanoscale transistors.
Self-heating induced failure of graphene devices synthesized from both chemical vapor deposition (CVD) and epitaxial means is compared using a combination of infrared thermography and Raman imaging. Despite a larger thermal resistance, CVD devices dissipate >3x the amount of power before failure than their epitaxial counterparts. The discrepancy arises due to morphological irregularities implicit to the graphene synthesis method that induce localized heating. Morphology, rather than thermal resistance, therefore dictates power handling limits in graphene devices.
An integrated hybrid photovoltaic-thermoelectric system has been developed using multiple layers of organic photosensitizers on inorganic semiconductors in order to efficiently convert UV-visible and IR energy into electricity. The hot anode of n-type ZnO nanowires was fabricated using a thermal process on pre-seeded layer and results to be crystalline with a transmittance up to 92 % and a bandgap of 3.32 eV. The visible-UV light-active organic layer was deposited between the anode and cathode at room temperature using a layer-by-layer deposition onto ITO and ZnO and Bi2Te3 nanowires from aqueous solution. The organic layer, a cooperative binary ionic (CBI) solid is composed of oppositely charged porphyrin metal (Zn(II) and Sn(IV)(OH–)2) derivatives that are separately water soluble, but when combined form a virtually insoluble solid. The electron donor/acceptor properties (energy levels, band gaps) of the solid can be controlled by the choice of metals and the nature of the peripheral substituent groups of the porphyrin ring. The highly thermoelectric structure, which acts as a cold cathode, is composed of p-type Bi2Te3 nanowires with a thermoelectric efficiency (ZT) between ~0.7 to 1, values that are twice that expected for bulk Bi2Te3. Lastly, efficiency of the integrated device, was found to be 35 at 0.2 suns illumination and thermoelectric properties are enhanced by the charge transfer between the CBI and the Bi2Te3 is presented in terms of photo- and thermogenerated current and advantages of the low cost fabrication process is discussed.