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Optimization of gold germanium (Au0.17Ge0.83) thin films for high sensitivity resistance thermometry

Journal of Applied Physics

Scott, Ethan A.; Smyth, Christopher M.; Singh, Manish K.; Lu, Tzu-Ming L.; Sharma, Peter A.; Pete, Douglas V.; Watt, John; Harris, Charles T.

Gold-germanium (Au xGe 1 - x) solid solutions have been demonstrated as highly sensitive thin film thermometers for cryogenic applications. However, little is known regarding the performance of the films for thicknesses less than 100 nm. In response, we report on the resistivity and temperature coefficient of resistance (TCR) for sputtered films with thicknesses ranging from 10 to 100 nm and annealed at temperatures from 22 to 200 °C. The analysis is focused upon composition x = 0.17, which demonstrates a strong temperature sensitivity over a broad range. The thinnest films are found to provide an enhancement in TCR, which approaches 20% K - 1 at 10 K. Furthermore, reduced anneal temperatures are required to crystallize the Ge matrix and achieve a maximum TCR for films of reduced thickness. These features favor the application of ultra-thin films as high-sensitivity, on-device thermometers in micro- and nanolectromechanical systems.

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High kinetic inductance NbTiN superconducting transmission line resonators in the very thin film limit

Applied Physics Letters

Bretz-Sullivan, Terence M.; Lewis, Rupert; Lima-Sharma, Ana L.; Lidsky, David A.; Smyth, Christopher M.; Harris, Charles T.; Venuti, Michael; Eley, Serena; Lu, Tzu-Ming L.

We examine the DC and radio frequency (RF) response of superconducting transmission line resonators comprised of very thin NbTiN films, < 12 nm in thickness, in the high-temperature limit, where the photon energy is less than the thermal energy. The resonant frequencies of these superconducting resonators show a significant nonlinear response as a function of RF input power, which can approach a frequency shift of Δ f = - 0.15 % in a - 20 dB span in the thinnest film. The strong nonlinear response allows these very thin film resonators to serve as high kinetic inductance parametric amplifiers.

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Thermal activation of low-density Ga implanted in Ge

Applied Physics Letters

Foster, Natalie D.; Miller, Andrew J.; Hutchins-Delgado, Troy A.; Smyth, Christopher M.; Wanke, Michael W.; Lu, Tzu-Ming L.; Luhman, Dwight R.

The nuclear spins of low-density implanted Ga atoms in Ge are interesting candidates for solid state-based qubits. To date, activation studies of implanted Ga in Ge have focused on high densities. Here, we extend activation studies into the low-density regime. We use spreading resistance profiling and secondary ion mass spectrometry to derive electrical activation of Ga ions implanted into Ge as a function of the rapid thermal anneal temperature and implant density. We show that for our implant conditions, the activation is best for anneal temperatures between 400 and 650 °C with a maximum activation of 69% at the highest fluence. Below 400 °C, remaining implant damage results in defects that act as superfluous carriers, and above 650 °C, surface roughening and loss of Ga ions are observed. The activation increased monotonically from 10% to 69% as the implant fluence increased from 6 × 10 10 to 6 × 10 12 cm-2. The results provide thermal anneal conditions to be used for initial studies of using low-density Ga atoms in Ge as nuclear spin qubits.

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7 Results
7 Results