Publications

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external ring gear through a ratcheting scheme. The actuator can be operated with a single square wave, has minimal rubbing surfaces, maximizes comb finger density, and can be used for open-loop position control. The prototypes function as intended with a minimum demonstrated operating voltage of 18V. The equations of motion are developed for the torsional electrostatic comb drive. The resonant frequency, voltage vs. displacement and force delivery characteristics are predicted and compared with the fabricated device's performance.

This report summarizes materials issues associated with advanced micromachines development at Sandia. The intent of this report is to provide a perspective on the scope of the issues and suggest future technical directions, with a focus on computational materials science. Materials issues in surface micromachining (SMM), Lithographic-Galvanoformung-Abformung (LIGA: lithography, electrodeposition, and molding), and meso-machining technologies were identified. Each individual issue was assessed in four categories: degree of basic understanding; amount of existing experimental data capability of existing models; and, based on the perspective of component developers, the importance of the issue to be resolved. Three broad requirements for micromachines emerged from this process. They are: (1) tribological behavior, including stiction, friction, wear, and the use of surface treatments to control these, (2) mechanical behavior at microscale, including elasticity, plasticity, and the effect of microstructural features on mechanical strength, and (3) degradation of tribological and mechanical properties in normal (including aging), abnormal and hostile environments. Resolving all the identified critical issues requires a significant cooperative and complementary effort between computational and experimental programs. The breadth of this work is greater than any single program is likely to support. This report should serve as a guide to plan micromachines development at Sandia.

The burgeoning new technology of Micro-Electro-Mechanical Systems (MEMS) shows great promise in the weapons arena. We can now conceive of micro-gyros, micro-surety systems, and micro-navigators that are extremely small and inexpensive. Do we want to use this new technology in critical applications such as nuclear weapons? This question drove us to understand the reliability and failure mechanisms of silicon surface-micromachined MEMS. Development of a testing infrastructure was a crucial step to perform reliability experiments on MEMS devices and will be reported here. In addition, reliability test structures have been designed and characterized. Many experiments were performed to investigate failure modes and specifically those in different environments (humidity, temperature, shock, vibration, and storage). A predictive reliability model for wear of rubbing surfaces in microengines was developed. The root causes of failure for operating and non-operating MEMS are discussed. The major failure mechanism for operating MEMS was wear of the polysilicon rubbing surfaces. Reliability design rules for future MEMS devices are established.

The design, fabrication and characterization of a low-voltage rotary stepper motor are presented in this work. Using a five-level polysilicon MEMS technology, steps were taken to increase the capacitance over previous stepper motor designs to generate high torque at low voltages. A low-friction hub was developed to minimize frictional loads due to rubbing surfaces, producing an estimated resistive torque of about 6 pN-m. This design also allowed investigations into the potential benefit of using hard materials such as silicon nitride for lining of both the stationary and rotating hub components. The result is an electrostatic stepper motor capable of operation at less than six volts.

In order for the rapidly emerging field of MicroElectroMechanical Systems (MEMS) to meet its extraordinary expectations regarding commercial impact, issues pertaining to how they fail must be understood. We identify failure modes common to a broad range of MEMS actuators, including adhesion (stiction) and friction-induced failures caused by improper operational methods, mechanical instabilities, and electrical instabilities. Demonstrated methods to mitigate these failure modes include implementing optimized designs, model-based operational methods, and chemical surface treatments.

Gear systems rotating on hubs have been operated to failure using Sandia's microengine as the actuation device. Conventional failure modes such as fatigue induced fracture did not occur, indicating that the devices are mechanically extremely robust. The generic route to failure observed for all rotating devices involves sticking of structures that are in sliding contact. This sticking evidently results from microscopic changes in the sliding surfaces during operation. The rate at which these changes occur is accelerated by excessive applied forces, which originate from non-optimized designs or inappropriate drive voltages. Precursors to failure are observed, enabling further understanding of the microscopic changes that occur in the sliding surfaces that ultimately lead to failure.

The practical implementation of the surface micromachined microengine [1,2] to perform useful microactuation tasks requires a thorough understanding of the dynamics of the engine. This understanding is necessary in order to create appropriate drive signals, and to experimentally measure fundamental quantities associated with the engine system. We have developed and applied a dynamical model of the microengine and used it to accomplish three objectives: (1) drive inertial loads in a controlled fashion, i.e. specify and achieve a desired time dependent angular position of the output gear,( 2) minimize stress and frictional forces during operation, and (3) as a function of time, experimentally determine forces associated with the output gear, such as the load torque being applied to the output gear due to friction.