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Cubic erbium trihydride thin films

Thin Solid Films

Adams, D.P.; Rodriguez, Marko A.; Romero, Juan A.; Kotula, Paul G.; Banks, J.C.

High-purity, erbium hydride thin films have been deposited onto α-Al 2O 3 and oxidized Si by reactive sputtering methods. Rutherford backscattering spectrometry and elastic recoil detection show that films deposited at temperatures of 35, 150 and 275°C have a composition of 3H:1Er. Erbium trihydride films consist of a face-centered cubic erbium sub-lattice with a lattice parameter in the range of 5.11-5.20 Å. The formation of cubic ErH 3 is intriguing, because previous studies demonstrate a single trihydride phase with a hexagonal metal sub-lattice. The formation of a stable, cubic trihydride phase is attributed to a large, in-plane stress resulting from ion beam sputter deposition. © 2012 Elsevier B.V. All rights reserved.

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Helium release and microstructural changes in Er(D,T)2-x3Hex films)

Snow, Clark S.; Brewer, Luke N.; Rodriguez, M.A.; Kotula, Paul G.; Banks, J.C.; Mangan, Michael M.

Er(D,T){sub 2-x} {sup 3}He{sub x}, erbium di-tritide, films of thicknesses 500 nm, 400 nm, 300 nm, 200 nm, and 100 nm were grown and analyzed by Transmission Electron Microscopy, X-Ray Diffraction, and Ion Beam Analysis to determine variations in film microstructure as a function of film thickness and age, due to the time-dependent build-up of {sup 3}He in the film from the radioactive decay of tritium. Several interesting features were observed: One, the amount of helium released as a function of film thickness is relatively constant. This suggests that the helium is being released only from the near surface region and that the helium is not diffusing to the surface from the bulk of the film. Two, lenticular helium bubbles are observed as a result of the radioactive decay of tritium into {sup 3}He. These bubbles grow along the [111] crystallographic direction. Three, a helium bubble free zone, or 'denuded zone' is observed near the surface. The size of this region is independent of film thickness. Four, an analysis of secondary diffraction spots in the Transmission Electron Microscopy study indicate that small erbium oxide precipitates, 5-10 nm in size, exist throughout the film. Further, all of the films had large erbium oxide inclusions, in many cases these inclusions span the depth of the film.

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LDRD final report on Si nanocrystal as device prototype for spintronics applications

Pan, Wei P.; Carroll, Malcolm; Brewer, Luke N.; Verley, Jason V.; Banks, J.C.; Barton, Daniel L.

The silicon microelectronics industry is the technological driver of modern society. The whole industry is built upon one major invention--the solid-state transistor. It has become clear that the conventional transistor technology is approaching its limitations. Recent years have seen the advent of magnetoelectronics and spintronics with combined magnetism and solid state electronics via spin-dependent transport process. In these novel devices, both charge and spin degree freedoms can be manipulated by external means. This leads to novel electronic functionalities that will greatly enhance the speed of information processing and memory storage density. The challenge lying ahead is to understand the new device physics, and control magnetic phenomena at nanometer length scales and in reduced dimensions. To meet this goal, we proposed the silicon nanocrystal system, because: (1) It is compatible with existing silicon fabrication technologies; (2) It has shown strong quantum confinement effects, which can modify the electric and optical properties through directly modifying the band structure; and (3) the spin-orbital coupling in silicon is very small, and for isotopic pure {sup 28}Si, the nuclear spin is zero. These will help to reduce the spin-decoherence channels. In the past fiscal year, we have studied the growth mechanism of silicon-nanocrystals embedded in silicon dioxide, their photoluminescence properties, and the Si-nanocrystal's magnetic properties in the presence of Mn-ion doping. Our results may demonstrate the first evidence of possible ferromagnetic orders in Mn-ion implanted silicon nanocrystals, which can lead to ultra-fast information process and ultra-dense magnetic memory applications.

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Round robin analyses of hydrogen isotope thin films standards

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Banks, J.C.; Browning, J.F.; Wampler, W.R.; Doyle, Barney L.; LaDuca, C.A.; Tesmer, J.R.; Wetteland, C.J.; Wang, Y.Q.

Hydrogen isotope thin film standards have been manufactured at Sandia National Laboratories for use by the materials characterization community. Several considerations were taken into account during the manufacture of the ErHD standards, with accuracy and stability being the most important. The standards were fabricated by e-beam deposition of Er onto a Mo substrate and the film stoichiometrically loaded with hydrogen and deuterium. To determine the loading accuracy of the standards two random samples were measured by thermal desorption mass spectrometry and atomic absorption spectrometry techniques with a stated combined accuracy of ∼1.6% (1σ). All the standards were then measured by high energy RBS/ERD and RBS/NRA with the accuracy of the techniques ∼5% (1σ). The standards were then distributed to the IBA materials characterization community for analysis. This paper will discuss the suitability of the standards for use by the IBA community and compare measurement results to highlight the accuracy of the techniques used. © 2004 Elsevier B.V. All rights reserved.

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Cross-sections for the elastic recoil of hydrogen isotopes for high energy helium ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Browning, J.F.; Banks, J.C.; Wampler, W.R.; Doyle, Barney L.

Cross-sections for the elastic recoil of hydrogen isotopes, including tritium, have been measured for 4He2+ ions in the energy range of 9.0-11.6 MeV. These cross-sections have been measured at a scattering angle of 30° in the laboratory frame. Cross-sections were measured by allowing a 4He2+ beam to fall incident on solid targets of ErH2, ErD2 and ErT2, each of 500 nm nominal thickness and known areal densities of H, D, T and Er. The uncertainty in each cross-section is estimated to be ±3.2%. Published by Elsevier B.V.

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Elastic recoil detection analysis of 3He

Knapp, J.A.; Wampler, William R.; Banks, J.C.; Doyle, Barney L.

We give the results of a study using Monte Carlo ion interaction codes to simulate and optimize elastic recoil detection analysis for {sup 3}He buildup in tritide films. Two different codes were used. The primary tool was MCERD, written especially for simulating ion beam analysis using optimizations and enhancements for greatly increasing the probabilities for the creation and the detection of recoil atoms. MPTRIM, an implementation of the TRIMRC code for a massively parallel computer, was also used for comparison and for determination of absolute yield. This study was undertaken because of a need for high-resolution depth profiling of 3He and near-surface light impurities (e.g. oxygen) in metal hydride films containing tritium.

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Hall-Petch hardening in pulsed laser deposited nickel and copper thin films

Materials Research Society Symposium - Proceedings

Knapp, J.A.; Follstaedt, D.M.; Banks, J.C.; Myers, S.M.

Very fine-grained Ni and Cu films were formed using pulsed laser deposition onto fused silica substrates. The grain sizes in the films were characterized by electron microscopy, and the mechanical properties were determined by ultra-low load indentation, with finite-element modeling used to evaluate the properties of the layers separately from those of the substrate. Some Ni films were also examined after annealing to 350 and 450 °C to enlarge the grain sizes. These preliminary results show that the observed hardnesses are consistent with a simple extension of the Hall-Petch relationship to grain sizes as small as 11 nm for Ni and 32 nm for Cu.

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Composition and structure of sputter deposited erbium hydride thin films

Adams, David P.; Romero, Juan A.; Rodriguez, M.A.; Floro, Jerrold A.; Banks, J.C.

Erbium hydride thin films are grown onto polished, a-axis {alpha} Al{sub 2}O{sub 3} (sapphire) substrates by reactive ion beam sputtering and analyzed to determine composition, phase and microstructure. Erbium is sputtered while maintaining a H{sub 2} partial pressure of 1.4 x 10{sup {minus}4} Torr. Growth is conducted at several substrate temperatures between 30 and 500 C. Rutherford backscattering spectrometry (RBS) and elastic recoil detection analyses after deposition show that the H/Er areal density ratio is approximately 3:1 for growth temperatures of 30, 150 and 275 C, while for growth above {approximately}430 C, the ratio of hydrogen to metal is closer to 2:1. However, x-ray diffraction shows that all films have a cubic metal sublattice structure corresponding to that of ErH{sub 2}. RBS and Auger electron that sputtered erbium hydride thin films are relatively free of impurities.

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Technique for production of calibrated metal hydride films

Langley, R.A.; Browning, J.F.; Balsley, Steven D.; Banks, J.C.; Doyle, Barney L.; Wampler, William R.; Beavis, L.C.

A technique has been developed for producing calibrated metal hydride films for use in the measurement of high-energy (5--15 MeV) particle reaction cross sections for hydrogen and helium isotopes on hydrogen isotopes. Absolute concentrations of various hydrogen isotopes in the film is expected to be determined to better than {+-}2% leading to the capacity of accurately measuring various reaction cross sections. Hydrogen isotope concentrations from near 100% to 5% can be made accurately and reproducibly. This is accomplished with the use of high accuracy pressure measurements coupled with high accuracy mass spectrometric measurements of each constituent partial pressure of the gas mixture during loading of the metal occluder films. Various techniques are used to verify the amount of metal present as well as the amount of hydrogen isotopes; high energy ion scattering analysis, PV measurements before, during and after loading, and thermal desorption/mass spectrometry measurements. The most appropriate metal to use for the occluder film appears to be titanium but other occluder metals are also being considered. Calibrated gas ratio samples, previously prepared, are used for the loading gas. Deviations from this calibrated gas ratio are measured using mass spectrometry during and after the loading process thereby determining the loading of the various hydrogen isotopes. These techniques are discussed and pertinent issues presented.

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The Growth of InGaAsN for High Efficiency Solar Cells by Metalorganic Chemical Vapor Deposition

Allerman, A.A.; Kurtz, S.R.; Jones, E.D.; Gee, J.M.; Banks, J.C.

InGaAsN alloys are a promising material for increasing the efficiency of multi-junction solar cells now used for satellite power systems. However, the growth of these dilute N containing alloys has been challenging with further improvements in material quality needed before the solar cell higher efficiencies are realized. Nitrogen/V ratios exceeding 0.981 resulted in lower N incorporation and poor surface morphologies. The growth rate was found to depend on not only the total group III transport for a fixed N/V ratio but also on the N/V ratio. Carbon tetrachloride and dimethylzinc were effective for p-type doping. Disilane was not an effective n-type dopant while SiCl4 did result in n-type material but only a narrow range of electron concentrations (2-5e17cm{sup -3}) were achieved.

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Quantitative Analysis with Heavy Ion E-TOF ERD

Banks, J.C.

Heavy ion TOF ERD combined with energy detection (E-TOF-ERD) is a powerful analytical technique taking advantage of the following facts: the scattering cross section is usually very high ({approximately}10{sup {minus}21} cm{sup 2}/sr) compared to regular He RBS ({approximately}10{sup {minus}25} cm{sup 2}/sr), contrary to what happens with the energy resolution in ordinary surface solid barrier detectors, time resolution is almost independent of the atomic mass of the detected element, and the detection in coincidence of time and energy signals allows for the mass separation of overlapping signals with the same energy (or time of flight). Measurements on several oxides have been performed with the E-TOF-ERD set up at Sandia National Laboratories using an incident beam of 10-15 MeV Au. The information on the composition of the sample is obtained from the time domain spectrum, which is converted to energy domain, and then, using existing software codes, the analysis is performed. During the quantification of the results, they have found problems related to the interaction of the beam with the sample and to the tabulated values of the stopping powers for heavy ions.

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Electronic Sputtering of Solids by Slow, Highly Charged Ions: Fundamentals and Applications

Banks, J.C.

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

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Composition and Bonding in Amorphous Carbon Films Grown by Ion Beam Assisted Deposition: Influence of the Assistance Voltage

Diamond and Related Materials

Banks, J.C.

Amorphous carbon films have been grown by evaporation of graphite with concurrent Ar+ ions bombardment assistance. The ion energy has been varied between 0-800 V while keeping a constant ion to carbon atom arrival ratio. Film composition and density were determined by ion scattering techniques (RBS and ERDA), indicating a negligible hydrogen content and a density dependence with the assistance voltage. The bonding structure of the films has been studied by Raman and X-ray Absorption Near-Edge (XANES) spectroscopy. Different qualitative effects have been found depending on the ion energy range. For ion energies below 300 eV, there is a densification of the carbon layer due to the increase in the sp3 content. For ion energies above 300 eV sputtering phenomena dominate over densification, and thinner films are found with increasing assistance voltage until no film is grown over 600 V. The films with the highest SP3 content are grown with intermediate energies between 200-300 V.

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Using heavy ion backscattering spectrometry (HIBS) to solve integrated circuit manufacturing problems

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Banks, J.C.

Heavy Ion Backscattering Spectrometry (HIBS) is a new IBA tool for measuring extremely low levels of surface contamination on very pure substrates, such as Si wafers used in the manufacture of integrated circuits. HIBS derives its high sensitivity through the use of moderately low energy (∼100 keV) heavy ions (e.g. C12) to boost the RBS cross-section to levels approaching 1000 b, and by using specially designed time-of-flight (TOF) detectors which have been optimized to provide a large scattering solid angle with minimal kinematic broadening. A HIBS User Facility has been created which provides US industry, national laboratories, and universities with a place for conducting ultra-trace level surface contamination studies. A review of the HIBS technique is given and examples of using the facility to calibrate Total-Reflection X-ray Fluorescence Spectroscopy (TXRF) instruments and develop wafer cleaning processes are discussed. © 1998 Elsevier Science B.V.

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23 Results
23 Results