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SEMI Modeling and Simulation Roadmap

MST News

Hermina, Wahid L.

With the exponential growth in the power of computing hardware and software, modeling and simulation is becoming a key enabler for the rapid design of reliable Microsystems. One vision of the future microsystem design process would include the following primary software capabilities: (1) The development of 3D part design, through standard CAD packages, with automatic design rule checks that guarantee the manufacturability and performance of the microsystem. (2) Automatic mesh generation, for 3D parts as manufactured, that permits computational simulation of the process steps, and the performance and reliability analysis for the final microsystem. (3) Computer generated 2D layouts for process steps that utilize detailed process models to generate the layout and process parameter recipe required to achieve the desired 3D part. (4) Science-based computational tools that can simulate the process physics, and the coupled thermal, fluid, structural, solid mechanics, electromagnetic and material response governing the performance and reliability of the microsystem. (5) Visualization software that permits the rapid visualization of 3D parts including cross-sectional maps, performance and reliability analysis results, and process simulation results. In addition to these desired software capabilities, a desired computing infrastructure would include massively parallel computers that enable rapid high-fidelity analysis, coupled with networked compute servers that permit computing at a distance. We now discuss the individual computational components that are required to achieve this vision. There are three primary areas of focus: design capabilities, science-based capabilities and computing infrastructure. Within each of these areas, there are several key capability requirements.

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Steady-state properties of lock-on current filaments in GaAs

IEEE Transactions on Plasma Science

Hjalmarson, Harold P.

Collective impact ionization has been used to explain lock-on in semi-insulating GaAs under high-voltage bias. We have used this theory to study some of the steady-state properties of lock-on current filaments. In steady state, the heat gained from the field is exactly compensated by the cooling due to phonon scattering. In the simplest approximation, the carrier distribution approaches a quasi-equilibrium Maxwell-Boltzmann distribution. In this report, we examine the validity of this approximation. We find that this approximation leads to a filament carrier density that is much lower than the high density needed to achieve a quasi-equilibrium distribution. Further work on this subject is in progress.

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Characterization of Sidewall and Planar Surfaces of Electroformed LIGA Parts

Prasad, Somuri V.; Hall, Aaron; Dugger, Michael T.

The nature of surfaces and the way they interact with each other during sliding contact can have a direct bearing on the performance of a microelectromechanical (MEMS) device. Therefore, a study was undertaken to characterize the surfaces of LIGA fabricated Ni and Cu components. Sidewall and planar surfaces were examined by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Surface roughness was quantified using the AFM. Post-processing (e.g. lapping, removal of polymer film) can profoundly influence the morphology of LIGA components. Edge rounding and smearing of ductile materials during lapping can result in undesirable sidewall morphologies. By judicious selection of AFM scan sizes, the native roughness ({approximately}10 nm RMS) can be distinguished from that arising due to post processing, e.g. scratches, debris, polymer films. While certain processing effects on morphology such as those due to lapping or release etch can be controlled, the true side wall morphology appears to be governed by the morphology of the polymer mold or by the electroforming process itself, and may be much less amenable to modification.

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RIBE Flux vs. Position Monitor

Hamilton, Thomas W.

Recent work at SNL has demonstrated unique capabilities to experimentally measure a variety of ion and neutral particle parameters inside surface features being etched, including ion energy, angular distributions, ion and neutral species measurements. This report details the construction of one recent laboratory tool designed to measure ion beam uniformity over the wafer surface in a reactive ion beam etch system, (RIBE). This information is critical to the development of accurate plasma processing computer models and simulation methods, and is essential for reducing the cost of introducing new processing technologies.

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Approximate Public Key Authentication with Information Hiding

Thomas, Edward V.; Draelos, Timothy J.

This paper describes a solution for the problem of authenticating the shapes of statistically variant gamma spectra while simultaneously concealing the shapes and magnitudes of the sensitive spectra. The shape of a spectrum is given by the relative magnitudes and positions of the individual spectral elements. Class-specific linear orthonormal transformations of the measured spectra are used to produce output that meet both the authentication and concealment requirements. For purposes of concealment, the n-dimensional gamma spectra are transformed into n-dimensional output spectra that are effectively indistinguishable from Gaussian white noise (independent of the class). In addition, the proposed transformations are such that statistical authentication metrics computed on the transformed spectra are identical to those computed on the original spectra.

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Equation of State Measurements of Materials Using a Three-Stage Gun to Impact Velocities of 11km/s

Reinhart, William D.; Chhabildas, L.C.; Carroll, Daniel E.

Understanding high pressure behavior of homogeneous as well as heterogeneous materials is necessary in order to address the physical processes associated with hypervelocity impact events related to space science applications including orbital debris impact and impact lethality. At very high impact velocities, material properties will be subjugated to phase-changes, such as melting and vaporization. These phase states cannot be obtained through conventional gun technology. These processes need to be represented accurately in hydrodynamic codes to allow credible computational analysis of impact events resulting from hypervelocity impact. In this paper, techniques that are being developed and implemented to obtain the needed shock loading parameters (Hugoniot states) for material characterization studies, namely shock velocity and particle velocity, will be described at impact velocities up to 11 km/s. What is new in this report is that these techniques are being implemented for use at engagement velocities never before attained utilizing two-stage light-gas gun technology.

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Development of a One-Equation Transition/Turbulence Model

AIAA Journal

Roy, Christopher J.; Blottner, Frederick G.

This paper reports on the development of a unified one-equation model for the prediction of transitional and turbulent flows. An eddy viscosity - transport equation for non-turbulent fluctuation growth based on that proposed by Warren and Hassan (Journal of Aircraft, Vol. 35, No. 5) is combined with the Spalart-Allmaras one-equation model for turbulent fluctuation growth. Blending of the two equations is accomplished through a multidimensional intermittence function based on the work of Dhawan and Narasimha (Journal of Fluid Mechanics, Vol. 3, No. 4). The model predicts both the onset and extent of transition. Low-speed test cases include transitional flow over a flat plate, a single element airfoil, and a multi-element airfoil in landing configuration. High-speed test cases include transitional Mach 3.5 flow over a 5{degree} cone and Mach 6 flow over a flared-cone configuration. Results are compared with experimental data, and the spatial accuracy of selected predictions is analyzed.

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High J{sub c} YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} Films via Rapid, Low pO{sub 2} Pyrolysis

Journal of Materials Research

Dawley, Jeffrey T.; Clem, Paul; Siegal, Michael P.; Overmyer, Donald L.

In this investigation, YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} (YBCO) films were fabricated via a metal acetate, trifluoroacetic acid based sol-gel route, and spin-coat deposited on (100) LaAlO{sub 3} with a focus on maximizing J{sub c}, while minimizing processing time. We demonstrate that the use of a low pO{sub 2} atmosphere during the pyrolysis stage can lead to at least a tetiold reduction in pyrolysis time, compared to a 1 atm. O{sub 2} ambient. High-quality YBCO films on LaAlO{sub 3}, with J{sub c} values up to 3 MA/cm{sup 2} at 77 K, can be routinely crystallized from these rapidly pyrolyzed films.

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The Accelerated Site Technology Deployment Program/Segmented Gate System Project

Patteson, Raymond

The Department of Energy (DOE) is working to accelerate the acceptance and application of innovative technologies that improve the way the nation manages its environmental remediation problems. The DOE Office of Science and Technology established the Accelerated Site Technology Deployment Program (ASTD) to help accelerate the acceptance and implementation of new and innovative soil and ground water remediation technologies. Coordinated by the Department of Energy's Idaho Office, the ASTD Program reduces many of the classic barriers to the deployment of new technologies by involving government, industry, and regulatory agencies in the assessment, implementation, and validation of innovative technologies. Funding is provided through the ASTD Program to assist participating site managers in implementing innovative technologies. The program provides technical assistance to the participating DOE sites by coordinating DOE, industry, and regulatory participation in each project; providing finds for optimizing full-scale operating parameters; coordinating technology performance monitoring; and by developing cost and performance reports on the technology applications.

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High molecular orientation in mono- and trilayer polydiacetylene films imaged by atomic force microscopy

Journal of Colloid and Interface Science

Sasaki, Darryl Y.; Burns, Alan R.

Atomically flat monolayer and trilayer films of polydiacetylenes have been prepared on mica and silicon using a horizontal deposition technique from a pure water subphase. Langmuir films of 10,12-pentacosadiynoic acid (I) and N-(2-ethanol)-10,12-pentacosadiynamide (II) were compressed to 20 mN/m and subsequently polymerized by UV irradiation at the air-water interface. Blue and red forms of the films were prepared by varying exposure times and incident power. Polymerization to the blue-phase films produced slight contractions of 2 and 5% for the films of II and I, respectively. Longer UV exposures yielded red-phase films with dramatic film contraction of 15 and 32% for II and I, respectively. The horizontal deposition technique provided transfer ratios of unity with minimal film stress or structure modification. Atomic force microscopy images revealed nearly complete coverage of the substrate with atomically flat films. Crystalline domains of up to 100 micrometers of highly oriented polydiacetylene molecules were observed. The results reported herein provide insight into the roles of molecular packing and chain orientations in converting the monomeric film to the polymerized blue and red phases. (C) 2000 Academic Press.

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Techniques for Equation-of-State Measurements on a Three-Stage Light-Gas Gun

Reinhart, William D.; Chhabildas, L.C.

Understanding high pressure behavior materials is necessary in order to address the physical processes associated with hypervelocity impact events related to space science applications including orbital debris impact and impact lethality. Until recently the highest-pressure states in materials have been achieved from impact loading techniques from two-stage light gas guns with velocity limitations of approximately 81cm/s. In this paper, techniques that are being developed and implemented to obtain the needed shock loading parameters (Hugoniot states) for material characterization studies, namely shock velocity and particle velocity, will be described at impact velocities up to 11 kds. The determination of equation-of-state (EOS) and thermodynamic states of materials in the regimes of extreme high pressures is now attainable utilizing the three-stage launcher. What is new in this report is that these techniques are being implemented for use at engagement velocities never before attained utilizing two-stage light-gas gun technology. The design and test methodologies used to determine Hugoniot states are described in this paper.

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Methods for Multisweep Automation

Shepherd, Jason F.; Mitchell, Scott A.; Knupp, Patrick K.; White, David R.

Sweeping has become the workhorse algorithm for creating conforming hexahedral meshes of complex models. This paper describes progress on the automatic, robust generation of MultiSwept meshes in CUBIT. MultiSweeping extends the class of volumes that may be swept to include those with multiple source and multiple target surfaces. While not yet perfect, CUBIT's MultiSweeping has recently become more reliable, and been extended to assemblies of volumes. Sweep Forging automates the process of making a volume (multi) sweepable: Sweep Verification takes the given source and target surfaces, and automatically classifies curve and vertex types so that sweep layers are well formed and progress from sources to targets.

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Results 90701–90750 of 99,299
Results 90701–90750 of 99,299