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Effects of moisture on radiation-induced degradation in CMOS SOI transistors

Proceedings of the European Conference on Radiation and its Effects on Components and Systems, RADECS

Shaneyfelt, Marty R.; Schwank, James R.; Dodd, Paul E.; Hill, Thomas A.; Swanson, Scot E.

The effects of moisture on radiation-induced charge buildup in the oxides of a 0.35 m SOI technology are explored. Data show no observable effects of moisture-related aging on radiation hardness. These results are in contrast to those of previous work performed on bulk MOS technologies fabricated in the 1980s. The cause of these differences do not appear to be due to differences in final chip passivation layers. Instead, other processing variables (including the use of different implant materials and thicker overlayers) may account for these differences. In any case, the SOI technology results indicate that not all advanced technologies exposed to moisture are necessarily susceptible to significant long-term radiation-induced aging effects. © 2009 IEEE.

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Application of the modified voltage-dividing potentiometer to overlay metrology in a CMOS/bulk process

Hill, Thomas A.

The measurement of layer-to-layer feature overlay will, in the foreseeable future, continue to be a critical metrological requirement for the semiconductor industry. Meeting the image placement metrology demands of accuracy, precision, and measurement speed favors the use of electrical test structures. In this paper, a two-dimensional, modified voltage-dividing potentiometer is applied to a short-loop VLSI process to measure image placement. The contributions of feature placement on the reticle and overlay on the wafer to the overall measurement are analyzed and separated. Additional sources of uncertainty are identified, and methods developed to monitor and reduce them are described.

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10 Results
10 Results