This project demonstrates the feasibility of a novel imager with a thickness measured in microns rather than inches. Traditional imaging systems, i.e. cameras, cannot provide both the necessary resolution and innocuous form factor required in many data acquisition applications. Designing an imaging system with an extremely thin form factor (less than 1 mm) immediately presents several technical challenges. For instance, the thickness of the optical lens must be reduced drastically from currently available lenses. Additionally, the image circle is reduced by a factor equal to the reduction in focal length. This translates to fewer detector pixels across the image. To reduce the optical total track requires the use of specialized micro-optics and the required resolution necessitates the use of a new imaging modality. While a single thin imager will not produce the desired output, several thin imagers can be multiplexed and their low resolution (LR) outputs used together in post-processing to produce a high resolution (HR) image. The utility of an Iterative Back Projection (IBP) algorithm has been successfully demonstrated for performing the required post-processing. Advanced fabrication of a thin lens was also demonstrated and experimental results using this lens as well as commercially available lenses are presented.
Sol-gel thermites, formulated from nanoporous oxides and dispersed fuel particles, may provide materials useful for small-scale, intense thermal sources, but understanding the factors affecting performance is critical prior to use. Work was conducted on understanding the synthesis conditions, thermal treatments, and additives that lead to different performance characteristics in iron oxide sol-gel thermites. Additionally, the safety properties of sol-gel thermites were investigated, especially those related to air sensitivity. Sol-gel thermites were synthesized using a variety of different techniques and there appear to be many viable routes to relatively equivalent thermites. These thermites were subjected to several different thermal treatments under argon in a differential scanning calorimeter, and it was shown that a 65 C hold for up to 200 minutes was effective for the removal of residual solvent, thus preventing boiling during the final thermal activation step. Vacuum-drying prior to this heating was shown to be even more effective at removing residual solvent. The addition of aluminum and molybdenum trioxide (MoO{sub 3}) reduced the total heat release per unit mass upon exposure to air, probably due to a decrease in the amount of reduced iron oxide species in the thermite. For the thermal activation step of heat treatment, three different temperatures were investigated. Thermal activation at 200 C resulted in increased ignition sensitivity over thermal activation at 232 C, and thermal activation at 300 C resulted in non-ignitable material. Non-sol-gel iron oxide did not exhibit any of the air-sensitivity observed in sol-gel iron oxide. In the DSC experiments, no bulk ignition of sol-gel thermites was observed upon exposure to air after thermal activation in argon; however ignition did occur when the material was heated in air after thermal treatment. In larger-scale experiments, up to a few hundred milligrams, no ignition was observed upon exposure to air after thermal activation in vacuum; however ignition by resistively-heated tungsten wire was possible. Thin films of thermite were fabricated using a dispersed mixture of aluminum and iron oxide particles, but ignition and propagation of these films was difficult. The only ignition and propagation observed was in a preheated sample.
This work utilized advanced engineering in several fields to find solutions to the challenges presented by the integration of MEMS/NEMS with optoelectronics to realize a compact sensor system, comprised of a microfabricated sensor, VCSEL, and photodiode. By utilizing microfabrication techniques in the realization of the MEMS/NEMS component, the VCSEL and the photodiode, the system would be small in size and require less power than a macro-sized component. The work focused on two technologies, accelerometers and microphones, leveraged from other LDRD programs. The first technology was the nano-g accelerometer using a nanophotonic motion detection system (67023). This accelerometer had measured sensitivity of approximately 10 nano-g. The Integrated NEMS and optoelectronics LDRD supported the nano-g accelerometer LDRD by providing advanced designs for the accelerometers, packaging, and a detection scheme to encapsulate the accelerometer, furthering the testing capabilities beyond bench-top tests. A fully packaged and tested die was never realized, but significant packaging issues were addressed and many resolved. The second technology supported by this work was the ultrasensitive directional microphone arrays for military operations in urban terrain and future combat systems (93518). This application utilized a diffraction-based sensing technique with different optical component placement and a different detection scheme from the nano-g accelerometer. The Integrated NEMS LDRD supported the microphone array LDRD by providing custom designs, VCSELs, and measurement techniques to accelerometers that were fabricated from the same operational principles as the microphones, but contain proof masses for acceleration transduction. These devices were packaged at the end of the work.
There are commercial and military applications in which a material needs to serve as a barrier that must subsequently be removed. In many cases it is desirable that once the barrier has served its function that it then be reduced to small pieces. For example, in pipelines and in downhole drilling applications, valves are needed to function as barriers that can sustain high pressures. Later the valves must be removed and essentially disappear or be rendered to such a small size that they do not interfere with the functioning of other equipment. Military applications include covers on missile silos or launch vehicles. Other applications might require that a component be used once as an actuator or for passive energy storage, and then be irreversibly removed, again so as not to interfere with the function or motion of other parts of the device. Brittle materials, especially those that are very strong, or are pre-stressed, are ideal candidates for these applications. Stressed glass can be produced in different sizes and shapes and the level of strength and pre-stress, both of which control the fragmentation, can be manipulated by varying the processing. Stressed glass can be engineered to fracture predictably at a specific stress level. Controlling the central tension allows the fragment size to be specified. The energy that is stored in the residual stress profile that results from ion exchange or thermal tempering processes can be harnessed to drive fragmentation of the component once it has been deliberately fractured. Energy can also be stored in the glass by mechanical loading. Energy from both of these sources can be released either to perform useful work or to initiate another reaction. Once the stressed glass has been used as a barrier or actuator it can never be ''used'' again because it fragments into many small unrecognizable pieces during the actuation. Under some circumstances it will interfere with the motion or functioning of other parts of a device. Our approach was to use stressed glass to develop capabilities for making components that can be used as barriers, as actuating devices that passively store energy, or as a mechanical weaklink that is destroyed by some critical shock or crush load. The objective of this project was to develop one or more prototype devices using stressed glass technology and demonstrate their potential for applications of interest. This work is intended to provide critical information and technologies for Sandia's NP&A and MT&A customers, and is relevant to commercial applications for these same materials. Most of the studies in this project were conducted using the Corning 0317 sodium aluminosilicate glass composition.
This report describes a passive, optical component called resonant subwavelength gratings (RSGs), which can be employed as one element in an RSG array. An RSG functions as an extremely narrow wavelength and angular band reflector, or mode selector. Theoretical studies predict that the infinite, laterally-extended RSG can reflect 100% of the resonant light while transmitting the balance of the other wavelengths. Experimental realization of these remarkable predictions has been impacted primarily by fabrication challenges. Even so, we will present large area (1.0mm) RSG reflectivity as high as 100.2%, normalized to deposited gold. Broad use of the RSG will only truly occur in an accessible micro-optical system. This program at Sandia is a normal incidence array configuration of RSGs where each array element resonates with a distinct wavelength to act as a dense array of wavelength- and mode-selective reflectors. Because of the array configuration, RSGs can be matched to an array of pixels, detectors, or chemical/biological cells for integrated optical sensing. Micro-optical system considerations impact the ideal, large area RSG performance by requiring finite extent devices and robust materials for the appropriate wavelength. Theoretical predictions and experimental measurements are presented that demonstrate the component response as a function of decreasing RSG aperture dimension and off-normal input angular incidence.
This project combined nanocomposite materials with microfabricated optical device structures for the development of microsensor arrays. For the nanocomposite materials we have designed, developed, and characterized self-assembling, organic/inorganic hybrid optical sensor materials that offer highly selective, sensitive, and reversible sensing capability with unique hierarchical nanoarchitecture. Lipid bilayers and micellar polydiacetylene provided selective optical response towards metal ions (Pb(II), Hg(II)), a lectin protein (Concanavalin A), temperature, and organic solvent vapor. These materials formed as composites in silica sol-gels to impart physical protection of the self-assembled structures, provide a means for thin film surface coatings, and allow facile transport of analytes. The microoptical devices were designed and prepared with two- and four-level diffraction gratings coupled with conformal gold coatings on fused silica. The structure created a number of light reflections that illuminated multiple spots along the silica surface. These points of illumination would act as the excitation light for the fluorescence response of the sensor materials. Finally, we demonstrate an integrated device using the two-level diffraction grating coupled with the polydiacetylene/silica material.
The authors describe the microfabrication of a multi-level diffractive optical element (DOE) onto a micro-electromechanical system (MEMS) as a key element in an integrated compact optical-MEMS laser scanner. The DOE is a four-level off-axis microlens fabricated onto a movable polysilicon shuttle. The microlens is patterned by electron beam lithography and etched by reactive ion beam etching. The DOE was fabricated on two generations of MEMS components. The first generation design uses a shuttle suspended on springs and displaced by a linear rack. The second generation design uses a shuttle guided by roller bearings and driven by a single reciprocating gear. Both the linear rack and the reciprocating gear are driven by a microengine assembly. The compact design is based on mounting the MEMS module and a vertical cavity surface emitting laser (VCSEL) onto a fused silica substrate that contains the rest of the optical system. The estimated scan range of the system is {+-}4{degree} with a spot size of 0.5 mm.
This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate combining microelectromechanical systems (MEMS) with optoelectronic components as a means of realizing compact optomechanical subsystems. Some examples of possible applications are laser beam scanning, switching and routing and active focusing, spectral filtering or shattering of optical sources. The two technologies use dissimilar materials with significant compatibility problems for a common process line. This project emphasized a hybrid approach to integrating optoelectronics and MEMS. Significant progress was made in developing processing capabilities for adding optical function to MEMS components, such as metal mirror coatings and through-vias in the substrate. These processes were used to demonstrate two integration examples, a MEMS discriminator driven by laser illuminated photovoltaic cells and a MEMS shutter or chopper. Another major difficulty with direct integration is providing the optical path for the MEMS components to interact with the light. The authors explored using folded optical paths in a transparent substrate to provide the interconnection route between the components of the system. The components can be surface-mounted by flip-chip bonding to the substrate. Micro-optics can be fabricated into the substrate to reflect and refocus the light so that it can propagate from one device to another and them be directed out of the substrate into free space. The MEMS components do not require the development of transparent optics and can be completely compatible with the current 5-level polysilicon process. They report progress on a MEMS-based laser scanner using these concepts.
We have designed and assembled two generations of integrated micro-optical systems that deliver pump light and detect broadband laser-induced fluorescence in micro-fluidic chemical separation systems employing electrochromatography. The goal is to maintain the sensitivity attainable with larger, tabletop machines while decreasing package size and increasing throughput (by decreasing the required chemical volume). One type of micro-optical system uses vertical-cavity surface-emitting lasers (VCSELs) as the excitation source. Light from the VCSELs is relayed with four-level surface relief diffractive optical elements (DOEs) and delivered to the chemical volume through substrate-mode propagation. Indirect fluorescence from dye-quenched chemical species is collected and collimated with a high numerical aperture DOE. A filter blocks the excitation wavelength, and the resulting signal is detected as the chemical separation proceeds. Variations of this original design include changing the combination of reflective and transmissive DOEs and optimizing the high numerical aperture DOE with a rotationally symmetric iterative discrete on-axis algorithm. We will discuss the results of these implemented optimizations.
We are developing a method of constructing compact, three-dimensional photonics systems consisting of optical elements, e.g., lenses and mirrors, photo-detectors, and light sources, e.g., VCSELS or circular-grating lasers. These optical components, both active and passive, are mounted on a lithographically prepared silicon substrate. We refer to the substrate as a micro-optical table (MOT) in analogy with the macroscopic version routinely used in optics laboratories. The MOT is a zero-alignment, microscopic optical-system concept. The position of each optical element relative to other optical elements on the MOT is determined in the layout of the MOT photomask. Each optical element fits into a slot etched in the silicon MOT. The slots are etched using a high-aspect-ratio silicon etching (HARSE) process. Additional positioning features in each slot's cross-section and complementary features on each optical element permit accurate placement of that element's aperture relative to the MOT substrate. In this paper we present the results of the first fabrication and micro-assembly experiments of a silicon-wafer based MOT. Based on these experiments, estimates of position accuracy are reported. We also report on progress in fabrication of lens elements in a hybrid sol-gel material (HSGM). Diffractive optical elements have been patterned in a 13-micron thick HSGM layer on a 150-micron thick soda-lime glass substrate. The measured ms surface roughness was 20 nm. Finally, we describe modeling of MOT systems using non-sequential ray tracing (NSRT).
The authors describe the design and microfabrication of an extremely compact optical system as a key element in an integrated capillary-channel electrochromatograph with laser induced fluorescence detection. The optical design uses substrate-mode propagation within the fused silica substrate. The optical system includes a vertical cavity surface-emitting laser (VCSEL) array, two high performance microlenses and a commercial photodetector. The microlenses are multilevel diffractive optics patterned by electron beam lithography and etched by reactive ion etching in fused silica. Two generations of optical subsystems are described. The first generation design is integrated directly onto the capillary channel-containing substrate with a 6 mm separation between the VCSEL and photodetector. The second generation design separates the optical system onto its own module and the source to detector length is further compressed to 3.5 mm. The systems are designed for indirect fluorescence detection using infrared dyes. The first generation design has been tested with a 750 nm VCSEL exciting a 10{sup -4} M solution of CY-7 dye. The observed signal-to-noise ratio of better than 100:1 demonstrates that the background signal from scattered pump light is low despite the compact size of the optical system and meets the system sensitivity requirements.
Vertical-cavity surface-emitting lasers (VCSELs) are uniquely suited to miniaturized free-space optical systems in which surface-mounting and hybrid assembly techniques can be used to combine different technologies together. Two examples are described of such microsystems that are being developed for sensing applications. The first example is a optical position sensing system for rotating parts. Progress on fabricating similar systems by flip-chip bonding techniques is then discussed. The second example is a chemical sensing/analysis system which uses a miniature fluorescence detection module that is based on surface-mounted VCSELs and diffractive optical elements. The detection module is integrated with a capillary electrochromatography separation system and uses substrate-mode light propagation to focus the VCSEL beam on the capillary channel.
Sandia National Laboratories has a substantial effort in development of microelectromechanical system (MEMS) technologies. This miniaturization capability can lead to low-cost, small, high-performance systems-on-a-chip, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics, sensors and actuators, and advanced packaging technologies. In this work they describe efforts in integrating MEMS and optoelectronic or photonic functions and the fabrication constraints on both system components. the MEMS technology used in this work are silicon surface-machined systems fabricated using the SUMMiT (Sandia Ultraplanar Multilevel MEMS Technology) process developed at Sandia. This process includes chemical-mechanical polishing as an intermediate planarization step to allow the use of 4 or 5 levels of polysilicon.
This report represents the completion of a three-year Laboratory-Directed Research and Development (LDRD) program to investigate sub-wavelength surface relief structures fabricated by direct-write e-beam technology as unique and very high-efficiency optical elements. A semiconductor layer with sub-wavelength sized etched openings or features can be considered as a layer with an effective index of refraction determined by the fraction of the surface filled with semiconductor relative to the fraction filled with air or other material. Such as a layer can be used to implement planar gradient-index lenses on a surface. Additionally, the nanometer-scale surface structures have diffractive properties that allow the direct manipulation of polarization and altering of the reflective properties of surfaces. With this technology a single direct-write mask and etch can be used to integrate a wide variety of optical functions into a device surface with high efficiencies; allowing for example, direct integration of polarizing optics into the surface with high efficiencies; allowing for example, direct integration of polarizing optics into the surfaces of devices, forming anti-reflection surfaces or fabricating high-efficiency, high-numerical aperture lenses, including integration inside vertical semiconductor laser cavities.
This report represents the completion of a two years Laboratory Directed Research and Development (LDRD) program to investigate miniaturized systems for chemical detection and analysis. The future of advanced chemical detection and analysis is in miniature devices that are able to characterize increasingly complex samples, a laboratory on a chip. In this concept, chemical operations used to analyze complicated samples in a chemical laboratory sample handling, species separation, chemical derivitization and detection are incorporated into a miniature device. By using electrokinetic flow, this approach does not require pumps or valves, as fluids in microfabricated channels can be driven by externally applied voltages. This is ideal for sample handling in miniature devices. This project was to develop truly miniature on-chip optical systems based on Vertical Cavity Surface Emitting Lasers (VCSELs) and diffractive optics. These can be built into a complete system that also has on-chip electrokinetic fluid handling and chemical separation in a microfabricated column. The primary goal was the design and fabrication of an on-chip separation column with fluorescence sources and detectors that, using electrokinetic flow, can be used as the basis of an automated chemical analysis system. Secondary goals involved investigation of a dispersed fluorescence module that can be used to extend the versatility of the basic system and on chip, intracavity laser absorption as a high sensitivity detection technique.
Vertical Cavity Surface-Emitting Lasers (VCSELs) are of increasing interest to the photonics community because of their surface-emitting structure, simple fabrication and packaging, wafer-level testability and potential for low cost. Scaling VCSELs to higher power outputs requires increasing the device area, which leads to transverse mode control difficulties if devices become larger than 10-15 microns. One approach to increasing the device size while maintaining a well controlled transverse mode profile is to form coupled or phase-locked, two-dimensional arrays of VCSELs that are individually single-transverse mode. The authors have fabricated and characterized both photopumped and electrically injected two-dimensional VCSEL arrays with apertures over 100 microns wide. Their work has led to an increased understanding of these devices and they have developed new types of devices, including hybrid semiconductor/dielectric mirror VCSEL arrays, VCSEL arrays with etched trench, self-aligned, gold grid contacts and arrays with integrated phase-shifters to correct the far-field pattern.
Photonic packaging concepts using anamorphic microlenses and second-order grating couplers were demonstrated by coupling a ridge waveguide to an out-of-plane single-mode fiber.