Bibliography

General Reviews

Micro Electro Mechanical System Design , J. J. Allen, CRC Press, ISBN 0-8247-5824-2, 2005.

Chapter 3, Microsystem Fabrication Technologies, J. J. Allen, Micro Electro Mechanical Systems and Microstructures in Aerospace Applications , R. Osiander, A. Darrin, J. Champion, editors, CRC Press, ISBN 0-8247-2637-5, 2005.

Meeting the MEMS ‘Design-to-Analysis’ Challenge: the SUMMiT V™ Design Tool Environment, Victor R. Yarberry, Presented at the ASME International Mechanical Engineering Congress, November 17-22, 2002, New Orleans, LA.

Side-by-side comparison of passive MEMS strain test structures under residual compression, N. D. Masters, M. P. de Boer, B. D. Jensen, M. S. Baker, and D. Koester, in Mechanical properties of structural thin films, STP 1413, S. B. Brown and C. L. Muhlstein, Editors. 2001, ASTM: West Conshohocken, PA. pp. 168-200.

Integrated platform for testing MEMS mechanical properties at the wafer scale by the IMaP methodology, M. P. de Boer, N. F. Smith, N. D. Masters, M. B. Sinclair, and E. J. Pryputniewicz, in Mechanical properties of structural thin films, STP 1413, S. B. Brown and.C.L. Muhlstein, Editors. 2001, ASTM: West Conshohocken, PA. p. 85-95.

Microsystems challenges for engineering education, Allen, J. J., ASME IMECE Proceedings 2001; vol.2, p.707-710, Nov 11-16 2001.

Materials Science of Microelectromechanical Systems (Mems) Devices III, H. Kahn, M. de Boer, M. Judy, and S. M. Spearing, eds., Mater. Res. Soc. Proc. Vol. 657. 2001, Materials Research Society: Warrendale, PA.

A 2D Visualization Tool for SUMMiT V™ Designs, Presented at the Fourth International Conference on Modeling and Simulation of Microsystems, March 19-21, 2001, Hilton Head Island, CS, pp 606-609.
Copyright © 2001 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

The Visionary’s Dilemma, Steve Walsh, David R. Myers, Carol W. Sumpter, and Jerome Jakubczak II, SEMICON Southwest 2001. SEMI Technology Symposium (STS) MEMS/MST Technology: The Second Micro-Manufacturing Revolution. October 15, 2001. Austin TX. The paper was printed on pp.89-94.

NSF 2000 Workshop on Manufacturing of Micro-Electro-Mechanical Systems, A. Tseng, W. C. Tang, Y. C. Lee, and J. J. Allen, Journal of Materials Processing and Manufacturing Science, Vol. 8, No. 4, pp. 292-360,April 2000.

IC-compatible polysilicon surface micromachining, J. J. Sniegowski and M. P. de Boer, Annu. Rev. Mater. Sci., 30 297 (2000).

Implications of Intelligent, Integrated Microsystems for Product Design and Development, David R. Myers, Paul J. McWhorter, C. Converse, and L. A. Makal, Proceedings of IEMC-2000, [IEEE Engineering Management Society International Engineering Management Conference, 2000 “Leading Technology Change: Management Issues and Challenges”] IEEE Catalog Number 00CH37139, ISBN 0-7803-6443-0, IEEE Press, Piscataway NJ, 2000. pp.325-330. Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Implications of Intelligent, Integrated Microsystems for Product Design and Development, David R. Myers, Paul J. McWhorter, C. Converse, and L. A. Makal, Proceedings of IEMC-2000, [IEEE Engineering Management Society International Engineering Management Conference, 2000 “Leading Technology Change: Management Issues and Challenges”] presented Monday, August 14, 2000 at 9:45am in session 16, Disruptive Technologies: MEMS. Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Materials Science of Microelectromechanical Systems (Mems) Devices II, M. P. de Boer, A. H. Heuer, S. J. Jacobs, and E. Peeters, eds., Mater. Res. Soc. Proc. Vol. 605. 2000, Materials Research Society: Warrendale, PA. 314 pages.

The impact of solution agglomeration on the deposition of self-assembled monolayers, B. C. Bunker, R. W. Carpick, R. Assink, M. L. Thomas, M. G. Hankins, J. A. Voigt, D. L. Sipola, M. P. de Boer, and G. L. Gulley, Langmuir, 16 7742 (2000).

Surface Micromachine Microfluidics: Design, Fabrication, Packaging, and Characterization, Paul Galambos, William P. Eaton, Randy Shul, Christi Gober Willison, Jeffry J. Sniegowski, Samuel L. Miller, Daniel Gutierrez, presented at the ASME Winter Annual Meeting, Nashville, Tennessee, November 1999.

Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS), Thomas W. Krygowski, Jeffry J. Sniegowski, M. Steven Rodgers, Stephen Montague, James J. Allen, Jerome F. Jakubczak, Samuel L. Miller, presented at Sensors Expo 1999, Cleveland, Ohio, September 14, 1999.

MEMS Design Rule Checking: A Batch Approach for Remote Operation, Presented at the SPIE 5th Annual International Symposium on Smart Electronics and MEMS, March 1-5, 1998, SanDiego, CA, Vol. 3328, pp. 32-39. Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Selecting a Process Paradigm for an Emergent Disruptive Technology: Evidence for the Emerging Microsystems Technology Base, James H. Smith, Steven T. Walsh, For presentation at the IEEE, International Engineering Management Conference, Oct. 13, 1998. Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Improved Polysilicon Surface-micromachined Micromirror Devices using Chemical-mechanical Polishing, Dale L. Hetherington, Jeffry J. Sniegowski, Presented at the International Symposium on Optical Science, Engineering, and Instrumentation, SPIE’s 43rd Annual Meeting, San Diego, CA, July 22, 1998. Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Intelligent Microsystems: Strategy for the Future, J. H. Smith, J. J. Sniegowski, P. J. McWhorter, A. D. Romig Jr., Semiconductor International, April 1998, pp. 93-98.

Analyst Perspective: The Coming Revolution in ICs: Intelligent, Integrated Microsystems, A. D. Romig, Jr., J. H. Smith, SEMI Executive Summary Report, Third Quarter 1997, pp. 45-47.

Multi-level Polysilicon Surface-micromachining Technology: Applications and Issues, J. J. Sniegowski, (Invited Paper) ASME 1996 International Mechanical Engineering Congress and Exposition, Proc. of the ASME Aerospace Division, November 17-22, 1996, Atlanta, GA, AD-Vol. 52, pp. 751-759.

Moving the World with Surface Micromachining, J. J. Sniegowski, Solid State Technology, Feb. 1996, pp. 83-90.

Surface Micromachined Sensors and Actuators, J. J. Sniegowski, Micro-integrated Smart Material and Structures Conference (MISMSC), Society for Experimental Mechanics, Williamsburg, VA, Oct. 11-12, 1995, pp. 100-110.

Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices, R. Nasby, J. Sniegowski, J. Smith, S. Montague, C. Barron, W. Eaton, P. McWhorter, D. Hetherington, C. Apblett, and J. Fleming, Proc. Solid-State Sensor and Actuator Workshop, pp. 48-53, Jun. 1996.

Micromachined Sensor and Actuator Research at Sandia’s Microelectronics Development Laboratory, J. Smith, Invited Presentation, Proc. Sensors Expo Anaheim ’96, pp. 119-123, April, 1996.

Microelectromechanical Systems Research and Development at Sandia, J. Smith, Invited Presentation, GOMAC 1996 Digest, pp. 153-156, Mar. 1996. Received GOMAC Outstanding Conference Paper Award.

Material and Processing Issues for the Monolithic Integration of Microelectronics with Surface-Micromachined Polysilicon Sensors and Actuators. J. Smith, S. Montague, and J. Sniegowski, SPIE Micromachining and Microfabrication `95, vol. 2639, pp. 64-73, Oct. 1995. Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Integrated Technology; Inertial Sensors

Modeling and Alleviating Instability in a MEMS Vertical Comb Drive using a Progressive Linkage, J. R. Bronson, G. J. Wiens, J. J. Allen, DETC2005-84217, ASME 2005 International Design Engineering Technical Conferences, September 24-28, 2005, Long Beach, CA.

Shaped Comb Fingers for Tailored Electro-Mechanical Restoring Force, B. Jensen, S. Mutlu, S. Miller, K. Kurabayashi, J. Allen, JMEMS, Vol. 12, No. 3, June 2003.

Out-of-plane, rotary micromirrors for reconfigurable photonic applications, Dagel, DJ; Spahn, OB; Allen, JJ; Kemme, SA; Grossetete, GD; Gass, FR, Proceedings of the SPIE, vol.4983, p.114-21, 2003.

MEMS Shutters for Spacecraft Thermal Control, R. Osiander, J. Champion, A. Darrin, D. Douglass, T. Swanson, J. Allen, E. Wyckoff, NanoTech 2002, Houston, Texas. 9-12 September 2002.

Analyst Perspective: The Coming Revolution in ICs: Intelligent, Integrated Microsystems, A. D. Romig, Jr., J. H. Smith, SEMI Executive Summary Report, Third Quarter 1997, pp. 45-47.

Intelligent Microsystems: Strategy for the Future, J. H. Smith, J. J. Sniegowski, P. J. McWhorter, A. D. Romig Jr., April 1998 Issue of Semiconductor International, pp. 93-98.

Surface-Micromachined 1MHz Oscillator with Low-Noise Pierce Configuration, T. A. Roessig, R. T. Howe, and A. P. Pisano; UC Berkeley, and J. H. Smith; Sandia National Laboratories, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 8-11, 1998.

Integrated Micro-Electro-Mechanical Sensor Development for Inertial Applications, J. J. Allen, R. D. Kinney, J. Sarsfield, M. R. Daily, J. R. Ellis, J. H. Smith, S. Montague, Sandia National Laboratories; R. T. Howe, B. E. Boser, R. Horowitz, and A. P. Pisano, Berkeley Sensor Actuator Center; and M. A. Lemkin, W. A. Clark, T. Juneau, Integrated Micro Instruments. Presented at the Position Location and Navigation Symposium (PLANS ’98), Rancho Mirage, CA, April 20-23, 1998.

Surface-Micromachined Resonant Accelerometer, T. A. Roessig, R. T. Howe, A. P. Pisano, and J. H. Smith, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 859-862.
Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

A 3-Axis Force Balanced Accelerometer Using a Single Proof-Mass, M. A. Lemkin, B. E. Boser, D. Auslander, and J. H. Smith, 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 1185-1188.
Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.I Accept.

Chemical Mechanical Polishing: Enhancing the Manufacturability of MEMS, J. J. Sniegowski, (Invited paper) SPIE Micromachining and Microfabrication Process Technology, Austin, TX, Oct. 14, 1996, Vol. 2879, pp. 104-115.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Surface Micromachined Sensors and Actuators, J. J. Sniegowski, Micro-integrated Smart Material and Structures Conference (MISMSC), Society for Experimental Mechanics, Williamsburg, VA, Oct. 11-12, 1995, pp. 100-110.

A Three-Axis Surface Micromachined Sigma-Delta Accelerometer, M. Lemkin, M. Ortiz, N. Wongkomet, B. Boser, and J. Smith, Proc. ISSCC, pp. 202-203, Feb. 1997.
Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.I Accept.

Characterization of the Embedded Micromechanical Device Approach to the Monolithic Integration of MEMS with CMOS, J. Smith, S. Montague, J. Sniegowski, R. Manginell, P. McWhorter, and R. Huber, SPIE vol. 2879, Oct. 1996.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices, R. Nasby, J. Sniegowski, J. Smith, S. Montague, C. Barron, W. Eaton, P. McWhorter, D. Hetherington, C. Apblett, and J. Fleming, Proc. Solid-State Sensor and Actuator Workshop, pp. 48-53, Jun. 1996.

Micromachined Sensor and Actuator Research at Sandia’s Microelectronics Development Laboratory, J. Smith, Invited Presentation, Proc. Sensors Expo Anaheim ’96, pp. 119-123, April, 1996.

Embedded Micromechanical Devices for the Monolithic Integration of MEMS with CMOS, J. Smith, S. Montague, J. J. Sniegowski, J. R. Murray, and P. J. McWhorter, IEDM Tech. Digest, pp. 609-612, Dec. 1995.
Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Material and Processing Issues for the Monolithic Integration of Microelectronics with Surface-Micromachined Polysilicon Sensors and Actuators. J. Smith, S. Montague, and J. Sniegowski, SPIE Micromachining and Microfabrication `95, vol. 2639, pp. 64-73, Oct. 1995.
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Measurement, Characterization, Modeling/ Reliability

Growth of silicon carbide nanoparticles using tetraethylorthosilicate for microelectromechanical systems, DelRio, FW; Dunn, ML; de Boer, MP, 2007, Electrochemical and Solid-State Letters, Vol. 10, No. 1, p.H27-H30

Micromachined piconewton force sensor for biophysics investigations, Koch, SJ; Thayer, GE; Corwin, AD; de Boer, MP, 2006, Applied Physics Letters, Vol. 89, No. 17, p.173901-1-3

Robust Design and Model Validation of Nonlinear Compliant Micromechanisms, Wittwer, J.W., Baker, M.S., and Howell, L.L., 2006, Journal of Microelectromechanical Systems, Vol. 15, No. 1, pp. 33-41.

The effect of nanoparticles on rough surface adhesion, F. W. Delrio, M. L. Dunn, B. L. Boyce, A. D. Corwin and M. P. de Boer, J. Appl. Phys. 99, 104304 (2006).

In-situ wear studies of surface micromachined interfaces subject to controlled loading, E. E. Flater, A. D. Corwin, M. P. de Boer, and R. W. Carpick, Wear, 260 (6) 580 (2006). Abstract and PDF

Long Working-Distance Incoherent Light Interference Microscope, M. B. Sinclair, M. P. de Boer and A. D. Corwin, Applied Optics, 44 (36) 7714-7721 (2005) Abstract and PDF

Accelerating Aging Failures in MEMS Devices Danelle M. Tanner, Jeremy A. Walraven, Michael T. Dugger, Ted B. Parson, Sam A. Candeleria, Mark W. Jenkins, Alex D. Corwin, James A. Ohlhausen, and Elizabeth M. Huffman, Proceedings of the 43rd International Reliability Physics Symposium, 2005, pp 317-324.
Copyright © 2005 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Role of van der Waals forces in adhesion of micromachined surfaces, F. W. DelRio, M. P. de Boer, J. A. Knapp, E. D. Reedy, P. J. Clews and M. L. Dunn, Nature Materials 4 (8) 629-634 (2005). Abstract and PDF

Effect of adhesion on dynamic and static friction in surface micromachining, A. D. Corwin and M. P. de Boer, Applied Physics Letters, 84 (13) 2451 (2004).

An investigation of sidewall adhesion in MEMS, W. R. Ashurst, M. P. de Boer, C. Carraro, and R. Maboudian, Applied Surface Science, 212-213 735 (2003).

MEMS structures for on-chip testing of mechanical and surface properties of thin films, R. Ballarini, H. Kahn, A. H. Heuer, M. P. de Boer, and M. T. Dugger, in Interfacial and Nanoscale Failure, Comprehensive Structural Integrity Series, W.W. Gerberich and W. Yang, Editors. 2002, Elsevier: Oxford. (2003).

On-Chip Monitoring of MEMS Gear Motion Danelle M. Tanner, Scot E. Swanson, Jeremy A. Walraven, and Jeffrey L. Dohner, Proceedings of IRPS, 2003, pp. 484-490.
Copyright © 2003 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Resonant Frequency Method for monitoring MEMS fabrication Danelle M. Tanner, Albert C. Owen, and Fredd Rodriguez, SPIE’s 2003 Reliability, Testing, Characterization of MEMS/MOEMS II Proceedings, Vol.4980,, San Jose, pp. 220-228. Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Anodic Oxidation-Induced Delamination of the SUMMiTTM Poly 0 to Silicon Nitride Interface Richard A. Plass, Jeremy A. Walraven, Danelle M. Tanner, and Fredrick W. Sexton, SPIE’s 2003 Reliability, Testing, Characterization of MEMS/MOEMS II Proceedings, Vol.4980, San Jose, pp. 81-86.
Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Wear Mechanisms in a Reliability Methodology Danelle M. Tanner and Michael T. Dugger, SPIE’s 2003 Reliability, Testing, Characterization of MEMS/MOEMS II Proceedings, Vol.4980, San Jose, pp. 22-40.
Copyright © 2003 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Mechanics of microcantilever beams subject to combined electrostatic and adhesive forces, J. A. Knapp and M. P. de Boer, Journal of Microelectromechanical Systems, 11 (6) 754 (2002).

Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beams, M. S. Baker, M. P. de Boer, N. F. Smith, L. K. Warne, and M. B. Sinclair, Journal of Microelectromechanical Systems, 11 (6) 743 (2002).

Pin-Joint Design Effect on the Reliability of a Polysilicon Microengine, Danelle M. Tanner, Jeremy A. Walraven, Seethambal S. Mani, and Scot E. Swanson, Proceedings of IRPS, 2002, pp. 122-129.
Copyright © 2002 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Non-Destructive Resonant Frequency Measurement on MEMS Actuators, N. F. Smith, D. M. Tanner, S. E. Swanson, S. L. Miller, Proceedings of IRPS, 2001, pp. 99-105.
Copyright © 2001, Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Integrated platform for testing MEMS mechanical properties at the wafer scale by the IMaP™ methodology, in Mechanical properties of structural thin films, Special Technical Publication (STP) No. 1413; accepted, edited by S. B. Brown and C. L. Muhlstein (ASTM, West Conshohocken, PA, 2002).

Interferometry of actuated microcantilevers to determine material properties and test structure non-idealities in MEMS, B. D. Jensen, M. P. de Boer, N. D. Masters, F. Bitsie and D. A. LaVan, J. Microelectromech. Syst. Vol. 10, No. 3, pp. 336-346 (2001).
Copyright © 2001 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Tribology of MEMS, MRS Bull. 26 (4), 302 (2001). M. P. de Boer and T. M. Mayer,
Copyright © 2001, The Materials Research Society. All rights of copyright are retained by the author and other copyright holders. This information may be copied for personal use but cannot be otherwise distributed or reposted to another electronic server for general retrieval without permission of the copyright holder. I Accept.

Effect of nanotexturing on interfacial adhesion in MEMS, M. P. de Boer, J. A. Knapp and P. J. Clews, International Conference on Fracture, Honolulu, HI, accepted (2001).

Reliability of a MEMS Torsional Ratcheting Actuator, Danelle M. Tanner, Jeremy A. Walraven, Stephen M. Barnes, Norman F. Smith, Fernando Bitsie, and Scot E. Swanson, Proceedings of IRPS, 2001, pp. 81-90.
Copyright © 2001 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

A 3D Geometry Modeler for the SUMMiT VTM; MEMS Designer, C.R. Jorgensen and V.R. Yarberry, presented at the Fourth International Conference on Modeling and Simulation of Microsystems (MSM 2001), Hilton Head, South Carolina, March 19 – 21, 2001.
Copyright © 2001 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

Measurement of Residual Stress in MEMS to Sub Megapascal Accuracy, M.S. Baker, M.P. de Boer, N.F. Smith, M.B. Sinclair, to be presented at the Society for Experimental Mechanics Annual Conference and Exposition, Portland, OR, June 4-6, 2001.

The influence of coating structure on micromachine stiction, J. G. Kushmerick, M. G Hankins, M. P. de Boer, P. J. Clews, R. W. Carpick, and B. C. Bunker, Tribol. Lett., 10 (1-2) 103 (2001). Abstract and PDF

MEMS Reliability: Infrastructure, Test Structures, Experiments, and Failure Modes, D. M. Tanner, N. F. Smith, L. W. Irwin, W. P. Eaton, K. S. Helgesen, J. J. Clement, W. M. Miller, J. A. Walraven, K. A. Peterson, P. Tangyunyong, M. T. Dugger, S. L. Miller, Sandia Report, SAND2000-0091, Unlimited Release, Printed January 2000.

Adhesion Hysteresis of Silane Coated Microcantilevers, M. P. de Boer, J. A. Knapp, T. A. Michalske, U. Srinivasan, R. Maboudian, Acta mater. 48, (18-19) 4531 (2000). Abstract and PDF

The Impact of Solution Agglomeration on the Deposition of Self-Assembled Monolayers, B.C. Bunker, R.W. Carpick, R.A. Assink, M.L. Thomas, M.G. Hankins, J.A. Voigt, D. Sipola, M.P. de Boer, G.L. Gulley, Langmuir 2000, 16, 7742-7751.

MEMS Reliability in a Vibration Environment, D. M. Tanner, J.A. Walraven, K.S. Helgesen, L. W. Irwin, D.L. Gregory, J.R. Stake, N. F. Smith, Proceedings of IRPS, 2000, pp. 129-138.
Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

MEMS Reliability in Shock Environments, D. M. Tanner, J.A. Walraven, K.S. Helgesen, L. W. Irwin, F. Brown, N. F. Smith, N. Masters, Proceedings of IRPS, 2000, pp. 139-145.
Copyright © 2000 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Development of characterization tools for reliability testing of MicroElectroMechanical system actuators, N. F. Smith, W.P. Eaton, D.M. Tanner, J.J. Allen, Paper presented at MEMS Reliability for Critical and Space Applications, SPIE Proceedings, Santa Clara, CA, September 21-22, 1999, Vol. 3880, pp. 156-164.
Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Interferometric measurement for improved understanding of boundary effects in micromachined beams, B. D. Jensen, F. Bitsie, M. P. de Boer, Paper to appear at Micromachining and Microfabrication Conference, SPIE Vol. 3875, Santa Clara, CA, Sept. 20-22, 1999.
Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

A small area in-situ MEMS test structure to measure fracture strength by electrostatic probing, M. P. de Boer, B. D. Jensen, F. Bitsie, Paper in SPIE Proceedings, v. 3875, Materials and Device Characterization in Micromachining, Santa Clara, CA Sept. 1999.
Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Supercritical Carbon Dioxide Extraction of Solvent from Micromachined Structures, E.M. Russick, C.L.J. Adkins, C.W. Dyck, ACS Symposium Series; 1997; v.670, p.255-269.
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Accurate Method For Determining Adhesion of Cantilever Beams , M. P. de Boer and T.A. Michalske, Published in the Journal of Applied Physics, July 15, 1999, Volume 86, pp. 817-827. Abstract and PDF

The Role of Interfacial Properties on MEMS Performance and Reliability, M. P. de Boer, J.A. Knapp, T.M. Mayer and T.A. Michalske, Invited paper for SPIE/EOS Conference on Microsystems Metrology and Inspection, Munich, June 15, 1999.
Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

IMaP™: Interferometry for Material Properties Measurement in MEMS, Brian D. Jensen, Maarten P. de Boer, and Sam L. Miller, Presented at Modeling and Simulation of Microsystems 1999, San Juan, Puerto Rico, April 19-21, 1999, pp. 206-209.
Copyright © 1999 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

The Effect of Humidity on the Reliability of a Surface Micromachined Microengine, D. M. Tanner, J. A. Walraven, L. W. Irwin, M. T. Dugger, N. F. Smith, W. M. Miller, and S. L. Miller, Proc. Of IEEE International Reliability Physics Symposium, 1999, pp. 189-197.
Copyright © 1999 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Adhesion, Adhesion Hysteresis and Friction in MEMS Under Controlled Humidity Ambients, M.P. de Boer, J.A. Knapp, J.M. Redmond, T.A. Michalske, R. Maboudian, Presented at the ASME IMECE conference in Anaheim, CA, Symposium on Microscale Mechanics of Materials and Structures, Nov. 1998.

A Hinged-pad Test Structure for Sliding Friction Measurement in Micromachining, Maarten P. de Boer, Jim M. Redmond and Terry A. Michalske, Published in the SPIE Proceedings, Materials and Device Characterization in Micromachining, Santa Clara, CA, Vol. 3512, Sept. 1998, pp. 241-250.
Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients, M. P. de Boer, P. J. Clews, B. K. Smith and T. A. Michalske, Presented at the Materials Research Society Proceedings, San Francisco, CA, Symposium on Microelectromechanical Structures for Materials Research, April 15-16, 1998, Vol. 518, pp. 131-136.
Copyright © 1998, The Materials Research Society. All rights of copyright are retained by the author and other copyright holders. This information may be copied for personal use but cannot be otherwise distributed or reposted to another electronic server for general retrieval without permission of the copyright holder. I Accept.

Measuring and Modeling Electrostatic Adhesion in Micromachines, M. P. de Boer, M. R. Tabbara, M. T. Dugger, P. J. Clews and T. A. Michalske, Presented at the Transducers 1997 Meeting, Chicago, IL, June 16-19, 1997.
Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

A Performance Analysis System for MEMS using Automated Imaging Methods, Glenn F. LaVigne and Sam L. Miller, Presented at the 1998 Proceedings, IEEE International Test Conference, Washington DC, Oct. 18-23, 1998, pp. 442-447.
Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Characterization Techniques for Surface-Micromachined Devices, William P. Eaton, Norman F. Smith, Lloyd Irwin, and Danelle M. Tanner, Presented at the Micromachined Devices and Components IV, SPIE Proceedings, Santa Clara, CA, September 21-22, 1998, Vol. 3514, pp. 171-178.
Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Failure Analysis of Surface-Micromachined Microengines, Kenneth A. Peterson, Paiboon Tangyunyong, and Alejandro A. Pimentel, (Invited presentation and paper), Presented at the Materials and Device Characterization in Micromachining Symposium, Santa Clara, CA, September 21-22, 1998, Vol. 3512, pp. 190-200.

Linkage Design Effect on the Reliability of Surface Micromachined Microengines Driving a Load, Danelle M. Tanner, Kenneth A. Peterson, Lloyd W. Irwin, Paiboon Tangyunyong, William M. Miller, William P. Eaton, Norman F. Smith, and M. Steven Rodgers, Presented at the Micromachining and Microfabrication Symposium, September, 21-22, 1998, Santa Clara, CA, Proceedings of SPIE, Vol. 3512, pp. 215-226.
Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

MEMS Reliability: The Challenge and the Promise, William M. Miller, Danelle M. Tanner, Samuel L. Miller, Kenneth A. Peterson, (Invited presentation and paper) 4th Annual “The Reliability Challenge,” Dublin, Ireland, May 19, 1998, pp. 4.1-4.7.

Configuration Space Representation for Micro-Mechanism Function, J J. Allen, E. Sacks, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Failure Modes in Surface Micromachined MicroElectroMechanical Actuators, S. L. Miller, M. S. Rodgers, G. LaVigne, J. J. Sniegowski, P. Clews, D. M. Tanner, and K. A. Peterson, Presented at the 1998 IEEE International Reliability Physics Symposium Proceedings, IRPS 1998, March 31-April 2, 1998, pp. 17-25.
Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept

Applying Macro Design Tools to the Design of MEMS Accelerometers, Brady R. Davies, M. Steven Rodgers, and Stephen Montague, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, 1998, pp. 46-55.
Copyright © 1998 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Designing and Operating Electrostatically Driven Microengines, M. Steven Rogers, Jeffry J. Sniegowski, Samuel Miller, Glenn F. LaVigne, Proceedings of the 44th International Instrumentation Symposium, Reno, NV, May 3-7, 1998, pp. 56-65.
Copyright © 1998 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

The Effect of Frequency on the Lifetime of a Surface Micromachined Microengine Driving a Load, Danelle M. Tanner, William M. Miller, William P. Eaton, Lloyd W. Irwin, Ken A. Peterson, Michael T. Dugger, Donna C. Senft, Norman F. Smith, Paiboon Tangyunyong, and Samuel L. Miller, 1998 IEEE International Reliability Physics Symposium Proceedings, March 30 – April 2, 1998, pp. 26-35.
Copyright © 1998 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Dynamic Effects of Linkage Joints in Electrostatic Microengines, J. J. Allen, S. L. Miller, G. F. LaVigne, M. S. Rodgers, Presented at Modeling and Simulation of Microsystems 1998, Santa Clara, CA, April 6-8, 1998.
Copyright © 1998 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

First Reliability Test of a Surface Micromachined Microengine Using SHiMMeR, D. M. Tanner, N. F. Smith, D. J. Bowman. W. P. Eaton, and K. A Peterson, Presented at the 1997 Symposium on Micromachining and Microfabrication, September 29, Austin, TX. Proceedings of SPIE, Volume 3224, pp. 14-23, 1997.
Copyright © 1997 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Routes to failure in rotating MEMS devices experiencing sliding friction, S. L. Miller, G. LaVigne, M. S. Rodgers, J. J. Sniegowski, J. P. Waters, and P. J. McWhorter, Proc. SPIE Micromachined Devices and Components III Vol. 3324, Austin, Sept. 29-30, 1997, pp. 24-30.
Copyright © 1997 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process, J. H. Comtois, M. A. Michalicek, and C. C. Baron, (Invited Paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 769-772.
Copyright © 2002 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Prediction of Release-Etch Times for Surface-Micromachined Structures, W. P. Eaton, R. L. Jarecki, and J. H. Smith, (Invited paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 1, pp. 249-252.
Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Friction in Surface Micromachined Microengines, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Smart Electronics and MEMS Vol. 2722, San Diego, Feb. 28-29, 1996, pp. 197-204.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Performance Tradeoffs for a Surface Micromachined Microengine, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Micromachined Devices and Components Vol. 2882, Austin, Oct. 14-15, 1996, pp. 182-191.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Characterization of a Surface Micromachined Pressure Sensor Array, W.P. Eaton, J.H. Smith, Micromachining and Microfabrication Symposium, Proceedings of the SPIE, Vol 2642, pp. 256-264(October 23-24, 1995).
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Release-etch modeling for complex surface micromachined structures, W.P. Eaton, J.H. Smith, and R.L. Jarecki, Micromachining and Microfabrication Symposium, Proceedings of the SPIE, Vol 2879, pp. 80-93 (October 1996).
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Supercritical Carbon Dioxide Drying of Surface-Micromachined Micromechanical Structures, C. Dyck, J. Smith, E. Russick, and C. Adkins, SPIE vol. 2879, Oct. 1996.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Characterization of the Embedded Micromechanical Device Approach to the Monolithic Integration of MEMS with CMOS, J. Smith, S. Montague, J. Sniegowski, R. Manginell, P. McWhorter, and R. Huber, SPIE vol. 2879, Oct. 1996.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Diffusion-Limited Release-Etch Rate Modeling for Complex Surface Micromachined Structures, W. Eaton, J. Smith, and R. Jarecki, SPIE vol. 2879, Oct. 1996.
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Actuators; SUMMiT Technology

NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe’s Web Site.Simulation, Measurement, and Mitigation of Non-Ideal Thermal Microactuator Performance, Wittwer, J.W., Baker, M.S., and Howell, L.L., 2006, Sensors and Actuators, A: Physical, Vol. 128, No. 2, pp. 395-401.

Spatially Resolved Temperature Mapping of Electrothermal Actuators by Surface Raman Scattering, Kearney,S.P., Phinney,L.M. and Baker,M.S., Journal of Microelectromechanical Systems, Transactions of the IEEE and ASME, vol. 15, No. 2, pp. 314-321, April, 2006.

Techniques in the Design of Thermomechanical Microactuators, Howell, L.L., McLain, T.W., Baker, M.S., and Lott, C.D., Chapter 7, MEMS/NEMS Handbook, Techniques and Applications, Vol 4, Editor: C.T. Leondes, Springer, pp. 187-200, 2006.

Raman Thermometry of Electro-Thermal Microactuators, Kearney,S.P., Phinney,L.M, and Baker,M.S., Proceedings of the 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, Florida, November 5-11, 2005.

Final Report: Compliant Thermo-Mechanical MEMS Actuators LDRD #52553, M.S. Baker, R.A. Plass, T.J. Headley, and J.A. Walraven, Sandia report SAND2004-6635, printed December 2004. Download

High-performance surface-micromachined inchworm actuator, M. P. de Boer, D. L. Luck, W. R. Ashurst, A. D. Corwin, J. A. Walraven, and J. M. Redmond, J. Microelectromech. Syst., 13 (1) 63 (2004).

Electrothermal Actuator Reliability Studies, Plass, R., Baker, M.S. and Walraven, J.A., Proceedings of SPIE, San Jose, CA, vol. 5343, pp. 15-21, January, 2004.

Failure Analysis of Electrothermal Actuators Subjected to Electrical Overstress (EOS) and Electrostatic Discharge (ESD), Walraven, J.A., Plass, R.A., Baker, M.S. and Shaw, M.J., Proceedings from the 30th International Symposium for Testing and Failure Analysis, Worchester, MA, Nov. 14-18, 2004.

Design and Analysis of an OutofPlane Micro Thermal Actuator, B. P. Trease, J. J. Allen, C. C. Wong. M. S. Baker, IMECE2003_41393, International Mechanical engineering Congress and Exposition, 15-21 November, 2003, Washington, D. C.

Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems, T.M. Mayer, M.P. de Boer, N.D. Shinn, P.J. Clews, T.A. Michalske, J. Vac. Sci. Technol. B 18(5), Sep/Oct 2000.

A New Class of High Force, Low-Voltage, Compliant Actuation Systems, M. Steven Rodgers, Sridhar Kota, Joel Hetrick, Zhe Li, Brian D. Jensen, Thomas W. Krygowski, Samuel L. Miller, Stephen M. Barnes, Michael S. Burg, Presented at Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina, June 4-8, 2000.

Torsional Ratcheting Actuating System, Stephen M. Barnes, Samuel L. Miller, M. Steven Rodgers, Fernando Bitsie, Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems, San Diego, California, March 27-29, 2000, pp. 273-276.
Copyright © 2000 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any Copyrighted component of this work in other works must be obtained from Computational Publications. I Accept

Parallel-Plate Electrostatic Dual-Mass Oscillator, Christopher W. Dyck, James J. Allen, Robert J. Huber, Presented at the SPIE Micromachining and Microfabrication Symposium, Santa Clara, California, September 20-22, 1999.
Copyright © 1999 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Micromachine Wedge Stepping Motor, James J. Allen, Heather K. Schriner, Presented at the 1998 ASME International Mechanical Engineering Congress and Exposition, Anaheim, CA, November 15-20, 1998.

Design Tools and Issues of Silicon Micromachined (MEMS) Devices, F. R. Davies, M. S. Rodgers, S. Montague, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Designing Microelectromechanical Systems-on-a-Chip in a 5-Level Surface Micromachine Technology, Steven Rodgers, J. J. Sniegowski, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Manufacturing Micro-Systems-on-a-Chip with a 5-Level Surface Micromachining Technology, J. J. Sniegowski, M. S. Rodgers, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program, H. Schriner, B. Davies, J. Sniegowski, M. S. Rodgers, J. Allen, C. Shepard, Presented at the 2nd International Conference on Engineering Design and Automation, Maui, Hawaii, August 9-12, 1998.

Improved Polysilicon Surface-micromachined Micromirror Devices using Chemical-mechanical Polishing, Dale L. Hetherington, Jeffry J. Sniegowski, Presented at the International Symposium on Optical Science, Engineering, and Instrumentation, SPIE’s 43rd Annual Meeting, San Diego, CA, July 22, 1998.
Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Dynamic Effects of Linkage Joints in Electrostatic Microengines, J. J. Allen, S. L. Miller, G. F. LaVigne, M. S. Rodgers, Presented at Modeling and Simulation of Microsystems 1998, Santa Clara, CA, April 6-8, 1998.
Copyright © 1998 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any Copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

Fabricating Micro-Instruments in Surface-Micromachine Polycrystalline Silicon, J. H. Comtois, M. A. Michalicek, and C. C. Baron, (Invited Paper) 43rd International Instrumentation Symposium, Instrument Society of America, 1997, pp. 169-178. Copyright © 1997 Instrument Society of America. This paper is available as an electronic reprint with permission of ISA. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level, Planarized Surface-Micromachined Polycrystalline Silicon Process, J. H. Comtois, M. A. Michalicek, and C. C. Baron, (Invited Paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 2, pp. 769-772. Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Thin Teflon-Like Films for Eliminating Adhesion in Released Polysilicon Microstructures, B. K. Smith, J. J. Sniegowski, and G. J. LaVigne, (Invited paper) 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, June 16-19, 1997, Vol. 1, pp. 245-248. Copyright © 1997 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Chemical Mechanical Polishing: Enhancing the Manufacturability of MEMS, J. J. Sniegowski, (Invited paper) SPIE Micromachining and Microfabrication Process Technology, Austin, TX, Oct. 14, 1996, Vol. 2879, pp. 104-115.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Multi-level polysilicon surface-micromachining technology: applications and issues, J. J. Sniegowski, (Invited Paper) ASME 1996 International Mechanical Engineering Congress and Exposition, Proc. of the ASME Aerospace Division, November 17-22, 1996, Atlanta, GA, AD-Vol. 52, pp. 751-759.

Surface Micromachined Gear Trains Driven by an On-Chip Electrostatic Microengine, J. J. Sniegowski and E. J. Garcia, IEEE Electron Device Letters, Vol. 17, No. 7, 366, July 1996.
Copyright © 1996 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Monolithic Geared-Mechanisms Driven by a Polysilicon Surface-micromachined On-Chip Electrostatic Microengine, J. J. Sniegowski, S. M. Miller, G. F. LaVigne, M.S. Rodgers and P. J. McWhorter, Solid-State Sensor and Actuator Workshop, Hilton Head Is., South Carolina, June 2-6, 1996, pp. 178-182.

Moving the World with Surface Micromachining, J. J. Sniegowski, Solid State Technology, Feb. 1996, pp. 83-90.

Microfabricated Actuators and Their Application to Optics, J. J. Sniegowski and E. J. Garcia, Proc. SPIE Miniaturized Systems with Micro-Optics and Micromechanics, 2383, 2/7-9/95, San Jose, CA, (1995) pp. 46-64.
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

An Application of Mechanical Leverage to Microactuation, J. J. Sniegowski and C. Smith, 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proc. TRANSDUCERS ’95/Eurosensors IX, Stockholm, Sweden, June 25-29, 1995, Vol. 2, pp. 364-367 (paper 325-PB9).
Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Surface Micromachined Microengine as a Driver for Micromechanical Gears, E. J. Garcia and J. J. Sniegowski, 8th International Conference on Solid-State Sensors and Actuators, Proc. TRANSDUCERS ’95, Stockholm, Sweden, June 25-29, 1995 (accepted).

Surface Micromachined Microengine, E. J. Garcia and J. J. Sniegowski, Sensors and Actuators A 48 (1995) 203-214. (note: rcvd Oct 5 1994, accepted Feb. 7 1995)

Late News Results on Preliminary Fabrication and Testing of a Comb-Drive-Based Microengine for Mechanism Drive Applications, E. J. Garcia and J. J. Sniegowski, ’94 Solid State Sensor and Actuator Workshop, Hilton Head Is. SC, Jun. 13-16, 1994.

Friction in Surface Micromachined Microengines, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Smart Electronics and MEMS Vol. 2722, San Diego, Feb. 28-29, 1996, p. 197-204.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Performance Tradeoffs for a Surface Micromachined Microengine, S. L. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, Proc. SPIE Micromachined Devices and Components Vol. 2882, Austin, Oct. 14-15, 1996, p. 182-191.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Micromachined Sensor and Actuator Research at Sandia’s Microelectronics Development Laboratory, J. Smith, Invited Presentation, Proc. Sensors Expo Anaheim ’96, pp. 119-123, April, 1996.

Monolithic Integration of Waveguide Structures with Surface-Micromachined Polysilicon Actuators, J. Smith, R. Carson, C. Sullivan, and G. McClellan, SPIE Smart Electronics and MEMS, vol. 2722, pp. 75-81, Feb. 1996.
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Non-Inertial Sensors

NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe’s Web Site.

Piezoresistive sensing of bistable micro mechanism state, Anderson, J.K., Howell, L.L., Wittwer, J.W., and McLain, T.W., 2006, Journal of Micromechanics and Microengineering, Vol. 16, pp. 943-950.

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor, William P. Eaton, Fernando Bitsie, James H. Smith, David W. Plummer, to be published at the International Conference on Modeling and Simulation of Microsystems, MSM 99, April 19-21, 1999.
Copyright © 2000 Computational Publications. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from Computational Publications. I Accept.

Polycrystalline-Silicon Microbridge Combustible Gas Sensor, Ph.D. dissertation, University of New Mexico, 1997.

Comparison of Bulk- and Surface-Micromachined Pressure Sensors, William P. Eaton, James H. Smith, David J. Monk, Gary O’Brien, and Todd F. Miller, Presented at the SPIE Proceedings, Santa Clara, CA, September 21-22, 1998, Vol. 3514, pp. 471.
Copyright © 1998 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Surface Micromachined Pressure Sensors, William P. Eaton, Ph.D. dissertation, University of New Mexico, 1997.

Selective, pulsed CVD of platinum on microfilament gas sensors, R.P. Manginell, J.H. Smith, A.J. Ricco, D.J. Moreno, R.C. Hughes, R.J. Huber and S.D. Senturia, Tech. Digest 1996 Sol.-State Sensor and Actuator Workshop, Hilton Head Isl., SC, June 1996.

Planar Surface-Micromachined Pressure Sensor with a Sub-Surface, Embedded Reference Pressure Cavity, W.P. Eaton and J.H. Smith, Micromachined Devices and Components, Proceedings of the SPIE, Vol 2882, pp. 259-265(October 1996).
Copyright © 1996 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electroniccopy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

A CMOS-compatible, surface-micromachined pressure sensor for aqueous ultrasonic application, W.P. Eaton and J.H. Smith, Smart Structures and Materials 1995, Proceedings of the SPIE, 2448, pp. 258-265 (March 1995).
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

Planar Surface-Micromachined Pressure Sensors by Chemical-Mechanical Polishing, W.P. Eaton and J.H. Smith, Micromachining Workshop II, (September, 1996).

Selective, Pulsed CVD of Platinum on Microfilament Gas Sensors, R. Manginell, J. Smith, A. Ricco, R. Hughes, R. Huber, and S. Senturia, Proc. Solid-State Sensor and Actuator Workshop, pp. 23-27, Jun. 1996.

Characterization of a Surface Micromachined Pressure Sensor Array, W. Eaton and J. Smith, SPIE Micromachining and Microfabrication `95, vol. 2642, pp. 256-264, Oct. 1995.
Copyright © 1995 Society of Photo-Optical Instrumentation Engineers. This paper is available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.I Accept.

Self-Consistent Temperature Compensation for Resonant Sensors with Application to Quartz Bulk Acoustic Wave Chemical Sensors, J. Smith and S. Senturia, Proc. Transducers’ 95, vol. 2, pp. 724-727, Jun. 1995.
Copyright © 1995 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

BioMEMS; Microfluidics

BioMEMS/µFluidics NOTE: The full technical presentations of some papers in this bibliography are available on-line. These papers have clickable links, which point to Adobe Portable Display Format (PDF) files. To view or print these files, you must have Adobe Acrobat Reader 3.0 or greater installed. You can download a free copy from Adobe’s Web Site.

Monolithic surface micromachined fluidic devices for dielectrophoretic preconcentration and routing of particles, James, C.D., Okandan, M., Mani, S.S., Galambos, P.C., Shul, R., Journal of Micromechanics and Microengineering, 2006, 16, pp.1909-1918. Abstract

Surface micromachined dielectrophoretic gates for the front-end device of a biodetection system, James, C.D., Okandan, M., Galambos, P.C., Mani, S.S., Bennett, D., Khusid, B., Acrivos, A., ASME Journal of Fluids Engineering, 2006, 128(1), pp.14-19.

Combined field-induced dielectrophoresis and phase separation for manipulating particles in microfluidics, Bennett, D.J., Khusid, B., James, C.D., Galambos, P.C., Okandan, M., Jacqmin, D., Acrivos, A., Applied Physics Letters, 2003, 83(23): pp. 4866-4868.

Precision Alignment Packaging for Microsystems with Multiple Fluid Connections, Paul Galambos, Gilbert L. Benavides, Murat Okandan, Mark W. Jenkins, Dale Hetherington, presented at ASME Winter Annual Meeting, New York, NY, November 2001.

Surface Micromachined Cell Manipulation Device for Transfection and Sample Preparation, Murat Okandan, Paul Galambos, Sita Mani, Jay Jakubczak, presented at MicroTAS ’01, Monteray, CA, October 2001.

Development of Surface Micromachining Technologies for MIcrofluidics and BioMEMS, Murat Okandan, paul Galambos, Sita Mani, Jay Jakubczak, presented at SPIE Micromachining and Microfabrication Conference, San Francisco, CA, October 2001.

A Surface Micromachined Electrostatic Drop Ejector, Paul Galambos, Kevin Zavadil, Rick Givler, Frank Peter, Art Gooray, George Roller, Joe Crowley, presented at Transducers ’01 conference, Munich, Germany, June 2001.
Copyright © 2001 Institute of Electrical and Electronics Engineers. This paper is available as an electronic reprint with permission of IEEE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. I Accept.

A MEMS Ejector for Printing Applications, A. Gooray, G. Roller, P. Galambos, K. Zavadil, R. Givler, F. Peter, J. Crowley, presented at NIP 2001, Fort Lauderdale, Florida, September 2001.

Electrical and Fluidic Packaging of Surface Micromachined Electro-Microfluidic Devices, Paul Galambos and Gil Benavides, presented at SPIE Micromachining and Microfabrication Conference, San Jose, CA, September 2000.

Silicon Nitride Membranes for Filtration and Separation, Paul Galambos*, Kevin Zavadil, Randy Shul, Christi Gober Willison, and Sam Miller, presented at SPIE Micromachining and Micrfabrication Conference, San Jose, CA, September 1999.

An Optical Micro-Fluidic Viscometer, Paul Galambos, Fred K. Forster, presented at ASME Winter Annual Meeting, Los Angelos, CA, November 1998.

Micro-Fluidic Diffusion Coefficient Measurement, Paul Galambos, Fred K. Forster, presented at MicroTAS ’98, Banff, Canada, October 1998.

µOptics

Mechanical Dissipation in Tetrahedral Amorphous Carbon, D.A. Czaplewski, J.P. Sullivan, T.A. Friedmann, D.W. Carr, B.E.N. Keeler, and J.R. Wendt, Journal of Applied Physics, 2005. Accepted for publication.

Measurement of a laterally deformable optical NEMS grating transducer, B.E.N. Keeler , D.W. Carr, J.P. Sullivan, T.A. Friedmann, J.R. Wendt, submitted to the Journal of Intelligence Community Research and Development, 2004.

Experimental demonstration of a laterally deformable optical NEMS grating transducer, B.E.N. Keeler , D.W. Carr, J.P. Sullivan, T.A. Friedmann, J.R. Wendt, Optics Letters, vol. 29, pp. 1182-1184, 2004.

Tetrahedral amorphous-carbon MEMS processing and properties,T.A. Friedmann, J.P. Sullivan, D.A. Czaplewski, J.R. Webster, C.W. Dyck, D.W. Carr, B.E.N. Keeler, J.R. Wendt, S. Cho, and I. Chasiotis, submitted to 2004 MRS Spring Meeting, San Francisco, CA (March 28 April 1, 2005).

Mechanical Dissipation in Tetrahedral Amorphous Diamond-Like Carbon Oscillators, D.A. Czaplewski, J.P. Sullivan, T.A. Friedmann, D.W. Carr, B.E.N. Keeler, and J.R. Wendt, submitted to 2004 MRS Fall Meeting, Boston, MA (November 29 – December 3, 2004).

Laterally deformable optical NEMS grating transducers for sensor applications, B.E.N. Keeler, SPIE Optics East Conference 2004, Philadelphia , PA ( October 25-28, 2004 ). Invited talk.

Micro-scale and Nano-scale Tetrahedral Amorphous Carbon Mechanical Oscillators: Material Properties and Performance, J.P. Sullivan, D.A. Czaplewski, T.A. Friedmann, J.R. Wendt, D.W. Carr, and B.E.N. Keeler, Electrochemical Society 2004 Joint International Meeting, Honolulu , Hawaii ( October 3-8, 2004 ).

Mechanical properties of diamond-like tetrahedral amorphous-carbon thin films, T.A. Friedmann, J.P. Sullivan, D.W. Carr, B.E.N. Keeler, J.R. Wendt, S. Cho1 and I. Chasiotis, Specialist Meeting on Amorphous Carbon, Trento, Italy (September 9-10, 2004). Invited talk.

Femto-photonics: optical transducers utilizing novel sub-wavelength dual layer grating structures, D.W. Carr, G.R. Bogart, B.E.N. Keeler, Solid-State Sensors and Actuators Workshop, Hilton Head Island , SC ( June 6-10, 2004 ). Late news paper.

Integrated NEMS and optoelectronics for sensor applications, B.E.N. Keeler, D.W. Carr, G.R. Bogart, J.P. Sullivan, T.A. Friedmann, J.R. Wendt, DCI Postdoctoral Research Fellowship Colloquium, McLean, VA (April 7-8, 2004).

Nanophotonics and MEMS integration for sensor applications, D.W. Carr, B.E.N. Keeler , G.R. Bogart, J.P. Sullivan, T.A. Friedmann, J.R. Wendt, SPIE Photonics West Conference 2004, San Jose, CA (January 24-29, 2004). Paper 5342-08.

Measurement of a laterally deformable optical NEMS grating transducer, D.W. Carr, B.E.N. Keeler , J.P. Sullivan, T.A. Friedmann, J.R. Wendt, SPIE Photonics West Conference 2004, San Jose, CA (January 24-29, 2004). Paper 5346-06.

Out-of-plane, rotary micromirrors for reconfigurable photonic applications, Dagel, DJ; Spahn, OB; Allen, JJ; Kemme, SA; Grossetete, GD; Gass, FR, Proceedings of the SPIE, vol.4983, p.114-21, 2003.

Laterally deformable nanomechanical zeroth-order gratings: anomalous diffraction studied by rigorous coupled-wave analysis, D.W. Carr, J.P. Sullivan, T.A. Friedmann,Optics Letters, vol. 28, pp. 1636-1638, 2003.

Optical NEMS Grating Transducers, D.W. Carr, B.E.N. Keeler , J.P. Sullivan, T.A. Friedmann, J.R. Wendt, International Conference on Optical MEMS and Their Applications 2003, Waikoloa, Hawaii (August 18-21, 2003). Postdeadline paper.

MEMS Patents

Erected Mirror Optical Switch, U.S. Patent No. 6,903,861, issued 6/7/2005.

Microelectromechanical Mirrors and Electrically-Programmable Diffraction Gratings Based on Two-Stage Actuation, U.S. Patent No. 6,967,757, issued 11/22/2005.

Planar-Constructed Spatial Micro-Stage, U.S. Patent No. 6,675,671, Issued 01/13/2004.

Micromechanical Apparatus for Measurement of Forces, U.S. Patent No. 6,739,201, issued 5/25/2004.

Surface-Micromachined Microfluidic Devices, U. S. Patent No. 6,797,187, issued 9/28/2004.

Surface Micromachined Microfluidic Devices, U.S. Patent No. 6,537,437, Issued 03/25/2003.

Microelectromechanical Dual-Mass Resonator Structure, U.S.Patent No. 6,393,913, issued May 28, 2002.

Surface Micromachined Counter meshing Gears Discrimination Device, U.S.Patent No. 6,158,297, issued 12/12//2000.

Mechanical Reciprocating Tooth Indexing Apparatus, U.S.Patent No. 5,959,376, issued 9/28/1999.

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