Two major problems associated with Si-based MEMS (MicroElectroMechanical Systems) devices are stiction and wear. Surface modifications are needed to reduce both adhesion and friction in micromechanical structures to solve these problems. In this paper, we will present a CVD (Chemical Vapor Deposition) process that selectively coats MEMS devices with tungsten and significantly enhances device durability. Tungsten CVD is used in the integrated-circuit industry, which makes this approach manufacturable. This selective deposition process results in a very conformal coating and can potentially address both stiction and wear problems confronting MEMS processing. The selective deposition of tungsten is accomplished through the silicon reduction of WF6. The self-limiting nature of this selective. We deposition process ensures the consistency necessary for process control. The tungsten is deposited after the removal of the sacrificial oxides to minimize stress and process integration problems. Tungsten coating adheres well and is hard and conducting, requirements for device performance. Furthermore, since the deposited tungsten infiltrates under adhered silicon parts and the volume of W deposited is less than the amount of Si consumed, it appears to be possible to release stuck parts that are contacted over small areas such as dimples. The wear resistance of selectively coated W parts has been shown to be significantly improved on microengine test structures.
A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external ring gear through a ratcheting scheme. The actuator can be operated with a single square wave, has minimal rubbing surfaces, maximizes comb finger density, and can be used for open-loop position control. The prototypes function as intended with a minimum demonstrated operating voltage of 18V. The equations of motion are developed for the torsional electrostatic comb drive. The resonant frequency, voltage vs. displacement and force delivery characteristics are predicted and compared with the fabricated device's performance.
An increasing number of applications are requiring fiber transmission of high-intensity laser pulses. Our particular interests have led us to examine carefully the fiber transmission of Q-switched pulses from multimode Nd:YAG lasers at their fundamental wavelength. The maximum pulse energy that can be transmitted through a particular fiber is limited by the onset of laser-induced breakdown and damage mechanisms. Laser breakdown at the fiber entrance face is often the first limiting process to be encountered, but other mechanisms can result in catastrophic damage at either fiber face, within the initial `entry' segment of the fiber, and at other internal sites along the fiber path. In the course of our studies we have examined a number of factors that govern the relative importance of different mechanisms, including laser characteristics, the design and alignment of injection optics, fiber end-face preparation, and fiber routing. The present study emphasizes the important criteria for injection optics in high-intensity fiber transmission, and illustrates the opportunities that now exist for innovative designs of optics to meet these criteria. Our consideration of diffractive optics to achieve desired injection criteria began in 1993, and we have evaluated a progression of designs since that time. In the present study, two recent designs for injection optics are compared by testing a sufficient number of fibers with each design to establish statistics for the onset of laser-induced breakdown and damage. In this testing we attempted to hold constant other factors that can influence damage statistics. Both designs performed well, although one was less successful in meeting all injection criteria and consequently showed a susceptibility to a particular damage process.
A transient, multidimensional model has been developed to simulate proton exchange membrane fuel cells. The model accounts simultaneously for electrochemical kinetics, current distribution, hydrodynamics, and multicomponent transport. A single set of conservation equations valid for flow channels, gas-diffusion electrodes, catalyst layers, and the membrane region are developed and numerically solved using a finite-volume-based computational fluid dynamics technique. The numerical model is validated against published experimental data with good agreement. Subsequently, the model is applied to explore hydrogen dilution effects in the anode feed. The predicted polarization curves under hydrogen dilution conditions are in qualitative agreement with recent experiments reported in the literature. The detailed two-dimensional electrochemical and flow/transport simulations further reveal that in the presence of hydrogen dilution in the fuel stream, hydrogen is depleted at the reaction surface, resulting in substantial anode mass transport polarization and hence a lower current density that is limited by hydrogen transport from the fuel stream to the reaction site. Finally, a transient simulation of the cell current density response to a step change in cell voltage is reported.
Correctly identifying the possible alteration products and accurately predicting their occurrence in a repository-relevant environment are the key for source-term calculations in a repository performance assessment. Uraninite in uranium deposits has long been used as a natural analog to spent fuel in a repository because of their chemical and structural similarity. In this paper, a SEM/AEM investigation has been conducted on a partially alterated uraninite sample from a uranium ore deposit of Shinkolobwe of Congo. The mineral formation sequences were identified: uraninite→uranyl hydrates→uranyl silicates→Ca-uranyl silicates or uraninite→uranyl silicates→Ca-uranyl silicates. Reaction-path calculations were conducted for the oxidative dissolution of spent fuel in a representative Yucca Mountain groundwater. The predicted sequence is in general consistent with the SEM observations. The calculations also show that uranium carbonate minerals are unlikely to become major solubility-controlling mineral phases in a Yucca Mountain environment. Some discrepancies between model predictions and field observations are observed. Those discrepancies may result from poorly constrained thermodynamic data for uranyl silicate minerals.
Crystalline phases of pyrochlore (e.g., CaPuTi2O7, CaUTi2O7) have been proposed as a durable ceramic waste form for disposal of high level radioactive wastes including surplus weapons-usable plutonium. In this paper, we use a linear free energy relationship to predict the Gibbs free energies of formation of pyrochlore phases (CaMTi2O7). The Pu-pyrochlore phase is predicted to be stable with respect to PuO2, CaTiO3, and TiO2 at room temperatures. Pu-pyrochlore is expected to be stable in a geologic repository where silica and carbonate components are absent or limited. We suggest that a repository in a salt formation be an ideal environment for disposal of high level, pyrochlore-based ceramic wastes. In such environment, adding CaO as a backfill will make pyrochlore minerals thermodynamically stable and therefore effectively prevents actinide release from these mineral phases.
Interfaces play an important role in determining the effect of electric fields on the mechanism of the formation of spinel by solid-state reaction. The reaction occurs by the movement of phase boundaries but the rate of this movement can be affected by grain boundaries in the reactants or in the reaction product. Only by understanding these relationships will it be possible to engineer their behavior. As a particular example of such a study, MgIn2O4 can be formed by the reaction between single-crystal MgO substrate and a thin film of In2O3 with or without an applied electric field. High-resolution backscattered electron (BSE) imaging and electron backscattered diffraction (EBSD) in a scanning electron microscope (SEM) has been used to obtain complementary chemical and crystallographic information.
A new class of semiconductor lasers that can potentially produce much more short pulse energy is presented. This new laser is not limited in volume or aspect ratio by the depth of a p-n junction and are created from current filaments in semi-insulating GaAs. A current filament semiconductor lasers (CFSL) that have produced 75 nJ of 890 nm radiation in 1.5 ns were tested. A filaments as long as 3.4 cm and several hundred microns in diameter in high gain GaAs photoconductive switches were observed. Their smallest dimension can be more than 100 times the carrier diffusion length in GaAs. The spectral narrowing, lasing thresholds, beam divergence, temporal narrowing and energies which imply lasing for several configurations of CFSL are reported.
Failure analysis (FA) tools have been applied to analyze tungsten coated polysilicon microengines. These devices were stressed under accelerated conditions at ambient temperatures and pressure. Preliminary results illustrating the failure modes of microengines operated under variable humidity and ultra-high drive frequency will also be shown. Analysis of tungsten coated microengines revealed the absence of wear debris in microengines operated under ambient conditions. Plan view imaging of these microengines using scanning electron microscopy (SEM) revealed no accumulation of wear debris on the surface of the gears or ground plane on microengines operated under standard laboratory conditions. Friction bearing surfaces were exposed and analyzed using the focused ion beam (FIB). These cross sections revealed no accumulation of debris along friction bearing surfaces. By using transmission electron microscopy (TEM) in conjunction with electron energy loss spectroscopy (EELS), we were able to identify the thickness, elemental analysis, and crystallographic properties of tungsten coated MEMS devices. Atomic force microscopy was also utilized to analyze the surface roughness of friction bearing surfaces.
One method of providing the mode selectivity necessary to insure single mode operation in a large diameter VCSEL is to independently control the size of the gain region and that of the optical mode. Numerical simulations quantity this approach by predicting lateral mode discrimination for different sized gain apertures. Calculations are experimentally confirmed by the fabrication and testing of 850 nm VCSELs employing hybrid ion implantation/selective oxidation that produce a single-mode output of more than 5 mW.
In this paper we concern ourselves with modified versions of the traditional brachistochrone and tautochrone problems. In the modified version of each problem the constant gravity model is replaced with an attractive inverse square law, consequently we name these the 1/r2 brachistochrone and 1/r2 tautochrone problems. With regard to the 1/r2 brachistochrone problem, we show that the shape of the minimizing curve is formally constructed from an infinite series of elliptic integrals, and we use a numerical optimal control technique to generate the trajectories. The 1/r2 tautochrone problem is solved using fractional calculus techniques and we show that the solution satisfies Lagrange's rule for tautochronous curves.
Electrostatic discharge (ESD) and electrical overstress (EOS) damage of Micro-Electro-Mechanical Systems (MEMS) has been identified as a new failure mode. This failure mode has not been previously recognized or addressed primarily due to the mechanical nature and functionality of these systems, as well as the physical failure signature that resembles stiction. Because many MEMS devices function by electrostatic actuation, the possibility of these devices not only being susceptible to ESD or EOS damage but also having a high probability of suffering catastrophic failure due to ESD or EOS is very real. Results from previous experiments have shown stationary comb fingers adhered to the ground plane on MEMS devices tested in shock, vibration, and benign environments. Using Sandia polysilicon microengines, we have conducted tests to establish and explain the ESD/EOS failure mechanism of MEMS devices. These devices were electronically and optically inspected prior to and after ESD and EOS testing. This paper will address the issues surrounding MEMS susceptibility to ESD and EOS damage as well as describe the experimental method and results found from ESD and EOS testing. The tests were conducted using conventional IC failure analysis and reliability assessment characterization tools. In this paper we will also present a thermal model to accurately depict the heat exchange between an electrostatic comb finger and the ground plane during an ESD event.
Thermally-Induced Voltage Alteration (TIVA) is a relatively new technique for locating electrical defects in integrated circuits [1,2]. This paper describes a novel application of TIVA, to locate design anomalies. A newly designed integrated circuit with high and inconsistent Quiescent Power Supply Current (IDDQ) was initially diagnosed with limited success using various failsite isolation techniques. The TIVA technique was successful in accurately locating design anomalies. Results from TIVA identified a spurious ring oscillator in the design. Design modifications carried out using a focussed ion beam (FIB), verified the accuracy of the results from TIVA. This study clearly extends the use of TIVA beyond that of locating electrical defects and anomalies into the realm of design debugging.
LM111 voltage comparators exhibit a wide range of total-dose-induced degradation. Simulations show this variability may be a natural consequence of the low base doping of the substrate PNP (SPNP) input transistors. Low base doping increases the SPNPs collector to base breakdown voltage, current gain, and densities. The build-up of oxide trapped charge (N OT) and interface traps (N IT) is shown to be a function of pre-irradiation bakes. Experimental data indicate that, despite its structural similarities to the LM111, irradiated input transistors of the LM124 operational amplifier do not exhibit the same sensitivity to variations in pre-irradiation thermal cycles. Further disparities in LM111 and LM124 responses may result from a difference in the oxide defect build-up in the two part types. Variations in processing, packaging, and circuit effects are suggested as potential explanations.
A record high fundamental-mode power of 5.1 mW was achieved from coupled-resonator vertical-cavity lasers (CRVCLs). In conventional VCSELs, the extent to which the gain volume may be increased is limited by the onset of multi-mode operation. Results indicate that this limitation is circumvented in a coupled-resonator device allowing high power fundamental-mode operation.
Critical infrastructures are central to our national defense and our economic well being, but many are taken for granted. Presidential Decision Directive (PDD) 63 highlights the importance of eight of our critical infrastructures and outlines a plan for action. Greatly enhanced physical security systems will be required to protect these national assets from new and emerging threats. Sandia National Laboratories has been the lead laboratory for the Department of Energy (DOE) in developing and deploying physical security systems for the past twenty-five years. Many of the tools, processes, and systems employed in the protection of high-consequence facilities can be adapted to the civilian infrastructure.
Over the past several years, extensive databases have been developed for the S-N behavior of various mate&& used in wind turbine blades, primarily fiberglass composites. These data are typically presented both in their "raw" form and curve fit to define their average properties. For design, confidence limits must be placed on these descriptions. In particular, most designs call for the "95195" design values; namely, with a 95 percent level of confidence, thedesiguerisassuredthat95percentofthematerial will 'meet or exceed the design value. For such material properties as the ultimate streng& the procedures for estimating its value at a particular confidence level is wellffiedifthemeasured values follow a normal or a log-normal distribution. Namely, based upon the number of sample points and their standard deviation, a commonly-found table may be used to determine the survival percentagea t a particular confidencel evel with respect to its mean value. The same is true for fatigue data at a constaut stress level (the number of cycles to failure N at stress level SI). However, when the stress level is allowed to vary, as with a typical S-N fatigue curve, the proceduresf or determmingc onfidencel imits are not as well delked. This paper outlines techn.iques for determimng confklence limits of fatigue data Different approachesto estimating the 95195l evel are compared. Data from the MSUIDOE and the FACT fatigue databam are used to illustrate typical results.
A MEMS test structure capable of measuring friction between polysilicon surfaces under a variety of test conditions has been refined from previous designs. The device is applied here to measuring friction coefficients of polysilicon surfaces under different environmental, loading, and surface conditions. Two methods for qualitatively comparing friction coefficients (μ) using the device are presented. Samples that have been coated with a self-assembled monolayer of the lubricating film perfluorinated-decyltrichlorosilane (PFTS) have a coefficient of friction that is approximately one-half that of samples dried using super-critical CO2 (SCCO2) drying. Qualitative results indicate that μ is independent of normal pressure. Wear is shown to increase μ for both supercritically dried samples and PFTS coated samples, though the mechanisms appear to be different. Super critically dried surfaces appear to degrade continuously with increased wear cycles, while PFTS coated samples reach a steady state friction value after about 105 cycles.
In 1993, the Government Performance and Results Act (GPRA, PL 103-62) was enacted. GPRA, which applies to all federal programs, has three components: strategic plans, annual performance plans, and metrics to show how well annual plans are being followed. As part of meeting the GRPA requirement in FY2000, a 14-member external peer review panel (the Garwin Committee) was convened on May 17-19, 2000 to review Sandia National Laboratories' Pulsed Power Programs as a component of the Performance Appraisal Process negotiated with the Department of Energy (DOE). The scope of the review included activities in inertial confinement fission (ICF), weapon physics, development of radiation sources for weapons effects simulation, x-ray radiography, basic research in high energy density physics (HEDP), and pulsed power technology research and development. In his charge to the committee, Jeffrey Quintenz, Director of Pulsed Power Sciences (1600) asked that the review be based on four criteria (1) quality of science, technology, and engineering, (2) programmatic performance, management, and planning, (3) relevance to national needs and agency missions, and (4) performance in the operation and construction of major research facilities. In addition, specific programmatic questions were posed by the director and by the DOE-Defense Programs (DP). The accompanying report, produced as a SAND document, is the report of the committee's findings.