Publications

Results 26–29 of 29

Development of a high-k gate stack for atomic-precision advanced manufacturing

Lu, Tzu-Ming L.; Anderson, Evan M.; Campbell, DeAnna M.; Marshall, Michael T.; Lu, Ping L.; Schmucker, Scott W.; Tracy, Lisa A.; Robison, Mitchell R.; Arghavani, Reza A.; Maurer, Leon; Baczewski, Andrew D.; Ward, Daniel; Misra, Shashank M.

Abstract not provided.

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TYPE Conference Poster YEAR 2020

OSTI

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

Katzenmeyer, Aaron M.; Dmitrovic, Sanja; Baczewski, Andrew D.; Bussmann, Ezra B.; Lu, Tzu-Ming L.; Anderson, Evan M.; Schmucker, Scott W.; Ivie, Jeffrey A.; Campbell, DeAnna M.; Ward, Daniel; Wang, George T.; Misra, Shashank M.

Abstract not provided.

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TYPE Conference Poster YEAR 2020

DOI OSTI

Modeling Assisted Atomic Precision Advanced Manufacturing (APAM) Towards Room Temperature Operation

Gao, Xujiao G.; Mamaluy, Denis M.; Anderson, Evan M.; Campbell, DeAnna M.; Grine, Albert D.; Katzenmeyer, Aaron M.; Lu, Tzu-Ming L.; Schmucker, Scott W.; Tracy, Lisa A.; Ward, Daniel R.; Misra, Shashank M.

Abstract not provided.

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TYPE Conference Poster YEAR 2019

OSTI

Low Thermal Budget Gate Stack for Atomic Precision Devices

Anderson, Evan M.; Schmucker, Scott W.; Campbell, DeAnna M.; Lu, Tzu-Ming L.; Baczewski, Andrew D.; Arghavani, Reza A.; Ward, Daniel R.

Abstract not provided.

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TYPE Presentation YEAR 2019

OSTI

Results 26–29 of 29

Results 26–29 of 29