Thin-Film Lithium Niobate Electro-Optic Modulators with Integrated Silicon Photonic Thermo-Optic Phase Shifters
CLEO: Science and Innovations, CLEO:S and I 2023
TFLN/silicon photonic modulators featuring active silicon photonic components are reported with a Vπ of 3.6 Vcm. This hybrid architecture utilizes the bottom of the buried oxide as the bonding surface which features minimum topology.