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Gasb-to-Si Direct Wafer Bonding and Thermal Budget Considerations for Photonic Applications

Martinez, William M.; Anderson, Evan M.; Wood, Michael G.; Friedmann, Thomas A.; Arterburn, Shawn C.; Reyna, Robert; Gutierrez, Jordan E.; Harris, Christian A.; Kotula, Paul G.; Cummings, Damion P.; Bahr, Matthew N.; Patel, Victor J.; Muhowski, Aaron; Hawkins, Samuel D.; Long, Christopher M.; Klem, John F.; Shank, Joshua; Wygant, Melissa L.

Abstract not provided.