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Nanomechanical switch for integration with CMOS logic

Proposed for publication in the Journal of Microelectronics and Micromechanics.

Czaplewski, David A.; Patrizi, Gary; Kraus, Garth K.; Wendt, Joel R.; Nordquist, Christopher D.; Wolfley, Steven; De Boer, Maarten P.

We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage of 5 V. The switches operated laterally with unmeasurable leakage current in the 'off' state. Surface micromachining techniques were used to fabricate the switches. All processing was CMOS compatible. A single metal layer, defined by a single mask step, was used as the mechanical switch layer. The details of the modeling, fabrication and testing of the NEMS switches are reported.

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Results 76376–76400 of 99,299
Results 76376–76400 of 99,299