Advanced PiezoMEMS: Advanced PiezoMEMs:Wafer Level Packaged AlN RF Filters
Abstract not provided.
Abstract not provided.
Conference Record of the IEEE Photovoltaic Specialists Conference
We present ultra-thin single crystal mini-modules built with specific power of 450 W/kg capable of voltages of >1000 V/cm2. These modules are also ultra-flexible with tight bending radii down to 1 mm. The module is composed of hundreds of back contact microcells with thicknesses of approximately 20 μm and diameters between 500-720 μm. The cells are interconnected to a flexible circuit through solder contacts. We studied the characteristics of several mini-modules through optical inspection, evaluation of quantum efficiency, measurement of current-voltage curves, and temperature dependence. Major efficiency losses are caused by missing cells or non-interconnected cells. Secondarily, damage incurred during separation of 500 μm cells from the substrate caused material detachment. The detachment induced higher recombination and low performance. Modules made with the larger cells (720 μm) performed better due to having no missing cells, no material detachment and optimized AR coatings. The conversion efficiency of the best mini module was 13.75% with a total Voc = 7.9 V. © 2013 IEEE.
Conference Record of the IEEE Photovoltaic Specialists Conference
We present ultra-thin single crystal mini-modules built with specific power of 450 W/kg capable of voltages of >1000 V/cm2. These modules are also ultra-flexible with tight bending radii down to 1 mm. The module is composed of hundreds of back contact microcells with thicknesses of approximately 20 μm and diameters between 500-720 μm. The cells are interconnected to a flexible circuit through solder contacts. We studied the characteristics of several mini-modules through optical inspection, evaluation of quantum efficiency, measurement of current-voltage curves, and temperature dependence. Major efficiency losses are caused by missing cells or non-interconnected cells. Secondarily, damage incurred during separation of 500 μm cells from the substrate caused material detachment. The detachment induced higher recombination and low performance. Modules made with the larger cells (720 μm) performed better due to having no missing cells, no material detachment and optimized AR coatings. The conversion efficiency of the best mini module was 13.75% with a total Voc = 7.9 V. © 2013 IEEE.
Vertical wafer stacking will enable a wide variety of new system architectures by enabling the integration of dissimilar technologies in one small form factor package. With this LDRD, we explored the combination of processes and integration techniques required to achieve stacking of three or more layers. The specific topics that we investigated include design and layout of a reticle set for use as a process development vehicle, through silicon via formation, bonding media, wafer thinning, dielectric deposition for via isolation on the wafer backside, and pad formation.