Publications Details

Publications / Conference Poster

Low-temperature silicon epitaxy for atomic precision devices

Anderson, Evan M.; Katzenmeyer, Aaron M.; Luk, Ting S.; Campbell, Deanna M.; Marshall, Michael; Bussmann, Ezra; Ohlhausen, J.A.; Lu, Ping; Kotula, Paul G.; Ward, Daniel R.; Lu, Tzu M.; Misra, Shashank

We discuss chemical, structural, and ellipsometry characterization of low temperature epitaxial Si. While low temperature growth is not ideal, we are still able to prepare crystalline Si to cap functional atomic precision devices.