Publications

Global thinning of integrated circuits is a technique that enables backside failure analysis and radiation testing. Prior work also shows increased thresholds for single-event latchup and upset in thinned devices. We present impacts of global thinning on device performance and reliability of 28 nm node field programmable gate arrays (FPGA). Devices are thinned to values of 50, 10, and 3 microns using a micromachining and polishing method. Lattice damage, in the form of dislocations, extend about 1 micron below the machined surface. The damage layer is removed after polishing with colloidal SiO2 slurry. We create a 2D finite-element model with liner elasticity equations and flip-chip packaged device geometry to show that thinning increases compressive global stress in the Si, while C4 bumps increase stress locally. Measurements of stress using Raman spectroscopy qualitatively agree with our stress model but also reveal the need for more complex structural models to account for nonlinear effects occurring in devices thinned to 3 microns and after temperature cycling to 125 °C. Thermal imaging shows that increased local heating occurs with increased thinning but the maximum temperature difference across the 3-micron die is less than 2 °C. Ring oscillators (ROs) programmed throughout the FPGA fabric slow about 0.5% after thinning compared to full thickness values. Temperature cycling the devices to 125 °C further decreases RO frequency about 0.5%, which we attribute to stress changes in the Si.

Abstract not provided.

Advances in FinFET design and fabrication enable manufacturing of denser, more compact integrated circuits (ICs) with substantially reduced leakage while shortening the channel-lengths. The same stress-induced leakage and breakdown degradation mechanisms that affect planar transistors also impact FinFET devices. Reliability concerns such as Bias Temperature Instability (BTI), Time Dependent Dielectric Breakdown (TDDB), and Hot Carrier Injection (HCI) become very important with changes to transistor geometry and fin sidewall crystal orientation. Recent testing has shown that FinFETs respond differently to radiation (radiation effects such as total ionizing dose) when compared to planar transistors. These reliability and radiation effects issues become very important when changing transistor geometry and scaling FinFETs towards smaller feature sizes (22-nm, 16-nm, 14- nm, 10-nm, and smaller critical dimensions). The comparable 2019 state of the art transistor densities in current high-volume manufacturing silicon-based foundries is 7-nm (ISMC, Samsung) and 10-nm (Intel) [www.anandtech.com,fuse.wikichip.org]. Released products include supporting components for the cellphone and commercial microprocessor markets respectively. Extensive development in the foundry industry is driving to a 5-nm technology node in late 2020.