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Publications / Conference Poster

Integrating atomic layer doping (ALDo) with CMOS circuitry for reduced contact resistance

Anderson, Evan M.; Schmucker, Scott W.; Ivie, Jeffrey A.; Campbell, Deanna M.; Lu, T.M.; Lu, Ping; Bussmann, Ezra; Leenheer, Andrew J.; Scrymgeour, David A.; Misra, Shashank

Abstract not provided.