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Publications / Conference Presentation

Development of low thermal budget Si epitaxy and high-k/ metal gate stack for atomically precise electronic devices

Anderson, Evan M.; Campbell, Deanna M.; Ivie, Jeffrey A.; Schmucker, Scott W.; Lu, Ping; Gao, Xujiao; Tracy, Lisa A.; Arghavani, Reza; Bussmann, Ezra; Baczewski, Andrew D.; Lu, T.M.; Katzenmeyer, Aaron M.; Scrymgeour, David A.; Misra, Shashank

Abstract not provided.