Publications

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The thermal performance of microelectromechanical systems devices is governed by the structure and composition of the constituent materials as well as the geometrical design. With the continued reduction in the characteristic sizes of these devices, experimental determination of the thermal properties becomes more difficult. In this study, the thermal conductivity of polycrystalline silicon (polysilicon) microbridges are measured with the transient 3ω technique and compared with measurements on the same structures using a steady state Joule heating technique. The microbridges with lengths from 200 μm to 500 μm were designed and fabricated using the Sandia National Laboratories SUMMiT V™ surface micromachining process. The advantages and disadvantages of the two experimental methods are examined for suspended microbridge geometries. The differences between the two measurements, which arise from the geometry of the test structures and electrical contacts, are explained by bond pad heating and thermal resistance effects. Copyright © 2009 by ASME.

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Due to the coupling of thermal and mechanical behaviors at small scales, a Campaign 6 project was created to investigate thermomechanical phenomena in microsystems. This report documents experimental measurements conducted under the auspices of this project. Since thermal and mechanical measurements for thermal microactuators were not available for a single microactuator design, a comprehensive suite of thermal and mechanical experimental data was taken and compiled for model validation purposes. Three thermal microactuator designs were selected and fabricated using the SUMMiT V{sup TM} process at Sandia National Laboratories. Thermal and mechanical measurements for the bent-beam polycrystalline silicon thermal microactuators are reported, including displacement, overall actuator electrical resistance, force, temperature profiles along microactuator legs in standard laboratory air pressures and reduced pressures down to 50 mTorr, resonant frequency, out-of-plane displacement, and dynamic displacement response to applied voltages.

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This report documents technical work performed to complete the ASC Level 2 Milestone 2841: validation of thermal models for a prototypical MEMS thermal actuator. This effort requires completion of the following task: the comparison between calculated and measured temperature profiles of a heated stationary microbeam in air. Such heated microbeams are prototypical structures in virtually all electrically driven microscale thermal actuators. This task is divided into four major subtasks. (1) Perform validation experiments on prototypical heated stationary microbeams in which material properties such as thermal conductivity and electrical resistivity are measured if not known and temperature profiles along the beams are measured as a function of electrical power and gas pressure. (2) Develop a noncontinuum gas-phase heat-transfer model for typical MEMS situations including effects such as temperature discontinuities at gas-solid interfaces across which heat is flowing, and incorporate this model into the ASC FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (3) Develop a noncontinuum solid-phase heat transfer model for typical MEMS situations including an effective thermal conductivity that depends on device geometry and grain size, and incorporate this model into the FEM heat-conduction code Calore to enable it to simulate these effects with good accuracy. (4) Perform combined gas-solid heat-transfer simulations using Calore with these models for the experimentally investigated devices, and compare simulation and experimental temperature profiles to assess model accuracy. These subtasks have been completed successfully, thereby completing the milestone task. Model and experimental temperature profiles are found to be in reasonable agreement for all cases examined. Modest systematic differences appear to be related to uncertainties in the geometric dimensions of the test structures and in the thermal conductivity of the polycrystalline silicon test structures, as well as uncontrolled nonuniform changes in this quantity over time and during operation.

The thermal properties of microelectromechanical systems (MEMS) devices are governed by the structure and composition of the constituent materials as well as the geometrical design. With the continued reduction of the characteristic sizes of these devices, experimental determination of the thermal properties becomes more difficult. In this study, the thermal conductivity of polycrystalline silicon (polysilicon) microbridges are measured with the transient 3ω technique and compared to measurements on the same structures using a steady state joule heating technique. The microbridges with lengths from 200 microns to 500 microns were designed and fabricated using the Sandia National Laboratories SUMMiT™ V surface micromachining process. The differences between the two measurements, which arise from the geometry of the test structures, are explained by bond pad heating and thermal boundary resistance effects. Copyright © 2008 by ASME.

This study examines the effects of bond pads on the measurement of thermal conductivity for micromachined polycrystalline silicon using suspended test structures and a steady state resistance method. Bond pad heating can invalidate the assumption of constant temperature boundary conditions used for data analysis. Bond pad temperatures above the heat sink temperature arise from conduction out of the bridge test element and Joule heating in the bond pad. Simulations results determined correction factors for the electrical resistance offset, Joule heating effects in the beam, and Joule heating in the bond pads. Fillets at the base of the beam reduce the effect of bond pad heating until they become too large. Copyright © 2007 by ASME.

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Optical actuators are fundamental building blocks in the development of all-optical microelectromechanical devices. Photothermally actuated devices are inevitably limited by overheating and device damage resulting from the absorption of laser power. Optimal actuator design requires an efficient use of the applied laser power while minimizing the susceptibility of device damage. Surface micromachined polycrystalline silicon flexure-style optical actuators, which are powered using an 808-nm continuous-wave laser, were evaluated for displacement performance and susceptibility to damage. Actuator displacement is linear with incident power for laser powers below those that cause damage to the irradiated surface, up to a maximum displacement of 7-9 μm. Damage of the irradiated surface causes viscous relaxation of the polysilicon film and leads to recession of the displacement during the heating and additional recession after the optical power is removed. The first spatially resolved temperature measurements during device operation were obtained using micro-Raman thermometry. The temperature measurements revealed the influence of temperature-dependent optical properties in the thermal behavior of the irradiated devices. © 2008 IEEE.

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Optically powered devices are typically irradiated by high intensity lasers and rely on the temperature excursion generated by the laser for operation. While numerical modeling can estimate the temperature profile of the irradiated devices, only direct measurements can determine the actual device temperatures. Available surface thermometry techniques, such as infrared imaging, scanning thermal microscopy and thermoreflectance are generally incompatible with an optical powering scheme, the micron-scale layer thicknesses of microsystem devices, or both. In this paper we discuss the use of micro-Raman thermometry to obtain the first spatiallyresolved temperature measurements of various polycrystalline silicon (polysilicon) surfaces heated with an 808 nm continuous wave (CW) laser at a 60° angle of incidence. The micron-scale resolution of the micro-Raman technique permitted mapping of the surface temperature in the vicinity of the heating laser spot and throughout the device. In addition to discussing the requirements for accurate data collection, the implications of optical interference on the heated structures are also considered. Copyright © 2007 by ASME.

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Analysis of the Raman Stokes peak position and its shift has been frequently used to estimate either temperature or stress in microelectronics and microelectromechanical system devices. However, if both fields are evolving simultaneously, the Stokes shift represents a convolution of these effects, making it difficult to measure either quantity accurately. By using the relative independence of the Stokes linewidth to applied stress, it is possible to deconvolve the signal into an estimation of both temperature and stress. Using this property, a method is presented whereby the temperature and stress were simultaneously measured in doped polysilicon microheaters. A data collection and analysis method was developed to reduce the uncertainty in the measured stresses resulting in an accuracy of ±40 MPa for an average applied stress of -325 MPa and temperature of 520 °C. Measurement results were compared to three-dimensional finite-element analysis of the microheaters and were shown to be in excellent agreement. This analysis shows that Raman spectroscopy has the potential to measure both evolving temperature and stress fields in devices using a single optical measurement. © 2007 American Institute of Physics.

Capillary condensation of water can have a significant effect on rough surface adhesion. To explore this phenomenon between micromachined surfaces, the authors perform microcantilever experiments as a function of surface roughness and relative humidity (RH). Below a threshold RH, the adhesion is mainly due to van der Waals forces across extensive noncontacting areas. Above the threshold RH, the adhesion jumps due to capillary condensation and increases towards the upper limit of Γ = 144 mJ/m2. A detailed model based on the measured surface topography qualitatively agrees with the experimental data only when the topographic correlations between the upper and lower surfaces are considered. © 2007 American Institute of Physics.

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The electrical, thermal, and mechanical responses of surface micromachined (SMM) 2-beam actuators have been simulated using the Calagio code, a coupled physics analysis tool. The present analysis, unlike previous analyses, includes the surrounding air in the computational domain so that heat losses from the beams onto the silicon substrate will be accurately modeled. This setup is essential because the existing 'shape factor' correlations have difficulty capturing the threedimensional geometric effect of the heat loss in the shuttle at the center that connects the bent beams. In addition, results from the present analysis reveal that because the local heat flux can be extremely high, a significant temperature jump can occur across the air-structure interfaces.