Publications

Abstract not provided.

The objective of this LDRD project was to develop a programmable diffraction grating fabricated in SUMMiT V{trademark}. Two types of grating elements (vertical and rotational) were designed and demonstrated. The vertical grating element utilized compound leveraged bending and the rotational grating element used vertical comb drive actuation. This work resulted in two technical advances and one patent application. Also a new optical configuration of the Polychromator was demonstrated. The new optical configuration improved the optical efficiency of the system without degrading any other aspect of the system. The new configuration also relaxes some constraint on the programmable diffraction grating.

The nano electrode arrays for in-situ identification and quantification of chemicals in water progress in four major directions. (1) We developed and engineering three nanoelectrode array designs which operate in a portable field mode or as distributed sensor network for water systems. (2) To replace the fragile glass electrochemical cells using in the lab, we design and engineered field-ready sampling heads that combine the nanoelectrode arrays with a high-speed potentiostat. (3) To utilize these arrays in a portable system we design and engineered a light weight high-speed potentiostat with pulse widths from 2 psec. to 100 msec. or greater. (4) Finally, we developed the parameters for an analytical method in low-conductivity solutions for Pb(II) detection, with initial studies for the analysis of As(III) and As(V) analysis in natural water sources.

Abstract not provided.

Monitoring the condition of critical structures is vital for not only assuring occupant safety and security during naturally occurring and malevolent events, but also to determine the fatigue rate under normal aging conditions and to allow for efficient upgrades. This project evaluated the feasibility of applying integrated, remotely monitored micro-sensor systems to assess the structural performance of critical infrastructure. These measurement systems will provide forensic data on structural integrity, health, response, and overall structural performance in load environments such as aging, earthquake, severe wind, and blast attacks. We have investigated the development of ''self-powered'' sensor tags that can be used to monitor the state-of-health of a structure and can be embedded in that structure without compromising the integrity of the structure. A sensor system that is powered by converting structural stresses into electrical power via piezoelectric transducers has been demonstrated including work toward integration of that sensor with a novel radio frequency (RF) tagging technology as a means of remotely reading the data from the sensor.

Application of the World Wide Web (WWW) for the transfer of sensor data from remote locations to laboratories and offices is a largely ignored application of the WWW. We have investigated several architectures for this application including simple web server/client architectures and variations of this approach. In addition, we have evaluated several commercial approaches and other techniques that have been investigated and are in the literature. Finally, we have provided conclusions based on the results of our study offering suggestions about the advantages and disadvantages of each of the approaches studied.

Solid Polymer Electrolytes (SPE) are widely used in batteries and fuel cells because of the high ionic conductivity that can be achieved at room temperature. The ions are usually Li or protons, although other ions can be shown to conduct in these polymer films. There has been very little published work on SPE films used as chemical sensors. The authors have found that thin films of polymers like polyethylene oxide (PEO) are very sensitive to low concentrations of volatile organic compounds (VOCs) such as common solvents. Evidence of a new sensing mechanism involving the percolation of ions through narrow channels of amorphous polymer is presented. They present impedance spectroscopy of PEO films in the frequency range 0.0001 Hz to 1 MHz for different concentrations of VOCs and relative humidity. They find that the measurement frequency is important for distinguishing ionic conductivity from the double layer capacitance and the parasitic capacitance.

Abstract not provided.

Solid Polymer Electrolytes (SPE) are widely used in batteries and fuel cells because of the high ionic conductivity that can be achieved at room temperature. The ions are usually Li or protons, although other ions can be shown to conduct in these polymer films. There has been very little work on using these films as chemical sensors. We have found that thin films of polymers like polyethyleneoxide (PEO) are very sensitive to low concentrations of volatile organic compounds (VOCS) like common solvents. We will present impedance spectroscopy of PEO films in the frequency range 0.01 Hz to 1 MHz for different concentrations of VOCS. We find that the measurement frequency is important for distinguishing ionic conductivity from the double layer capacitance and parasitic capacitances.

Semiconductor processing tools that use a plasma to etch polysilicon or oxides produce residue polymers that build up on the exposed surfaces of the processing chamber. These residues are generally stressed and with time can cause flaking onto wafers resulting in yield loss. Currently, residue buildup is not monitored, and chambers are cleaned at regular intervals resulting in excess downtime for the tool. In addition, knowledge of the residue buildup rate and index of refraction is useful in determining the state of health of the chamber process. We have developed a novel optical fiber-based robust sensor that allows measurements of the residue polymer buildup while not affecting the plasma process.

We describe the design and fabrication of two types of solid state moisture sensors, and discuss the results of an evaluation of the sensors for the detection of trace levels of moisture in semiconductor process gases. The first sensor is based on surface acoustic wave (SAW) technology. A moisture sensitive layer is deposited onto a SAW device, and the amount of moisture adsorbed on the layer produces a proportional shift in the operating frequency of the device. Sensors based on this concept have excellent detection limits for moisture in inert gas (100 ppb) and corrosive gas (150 ppb in HCl). The second sensor is a simple capacitor structure that uses porous silicon as a moisture-sensitive dielectric material. The detection limits of these sensors for moisture in inert gas are about 700 ppb prior to HCl exposure, and about 7 ppm following HCl exposure.

A novel technique to monitor thin film deposition has been developed using optical fibers. The system measures the optical thickness of a film and not the physical thickness which results in accurate film deposition for optical applications regardless of deposition conditions. A discussion of the mathematics necessary to understand the operation of the system is presented. The details of the circuitry and software are presented. The performance of the system is then demonstrated for the deposition of SnO{sub 2} on an optical fiber. An analysis of the inherent errors present in the monitor electronics and measurement system and their effects on the accuracy of the deposition is presented. The system is then applied to several practical situations. First, the system is used to monitor the deposition of SnO{sub 2} films on microscope slides. The films on the slides are then shown to have optical thicknesses which are within 1% of the expected values. The system is next used to deposit SiO anti-reflective coatings on Si. The system is then used to monitor the aging effects seen in SiO and SnO{sub 2}. Finally, a seven layer dielectric mirror made from SnO{sub 2} and MgF{sub 2} films is deposited using the monitor. 25 figs., 1 tabs.

A design for a photodetector quantum efficiency measurement test system is presented. The system hardware and control software are explained and the measurement theory is given. A brief discussion of the operation of the prototype is given. Finally, the article concludes with an example of a quantum efficiency measurement of a sample and a discussion of the errors involved in the measurement. 9 refs., 7 figs.