Piezo-optomechanical Control of Silicon Photonic Resonator with CMOS Compatibility
CLEO: Science and Innovations, CLEO:S and I 2023
We demonstrate piezo-optomechanical phase control in a c-band silicon-photonic resonator using CMOS-compatible AlN microactuators. We achieve a frequency tuning response of 26.91 ± 0.77 MHz/V DC, operating at picowatt to nanowatt power levels.