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Effect of substrate and growth method on vanadium dioxide thin films by RF magnetron sputtering: Vanadium metal oxidation vs reactive sputtering

Journal of Applied Physics

Christensen, A.; Posadas, A.B.; Zutter, Brian T.; Finnegan, Patrick S.; Bhullar, S.; Talin, Albert A.; Demkov, A.A.

Vanadium dioxide (VO2) undergoes a metal-insulator phase transition at ∼70 °C and has attracted substantial interest for potential applications in electronics, including those in neuromorphic computing. The vanadium-oxygen system has a rather complicated phase diagram, and controlling the stoichiometry and the phase of thin films of vanadium oxides is a well-known challenge. We explore the novel combination of two methods of VO2 thin film deposition using off-axis RF magnetron sputtering on (100)- and (111)-oriented yttria-stabilized zirconia (YSZ) substrates: reactive sputtering of vanadium in an oxygen environment and sputtering of vanadium metal followed by oxidation to VO2. Interestingly, the reactive sputtering process on both substrate orientations yields the metastable semiconducting VO2 (B) phase, which is structurally stabilized by the YSZ surface. The metal sputtering and oxidation process on YSZ produces mainly the equilibrium monoclinic (or M1) phase of VO2 that exhibits a metal-insulator transition. Using this method, we obtained thin films of (010)-textured polycrystalline VO2 (M1) that show a metal-insulator transition with an on/off ratio larger than 1000.

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Single-Particle Measurements Reveal the Origin of Low Solar-to-Hydrogen Efficiency of Rh-Doped SrTiO3Photocatalysts

ACS Nano

Zutter, Brian T.; Chen, Zejie; Gaieck, William; Barrera, Luisa; Lapp, Aliya S.; Watanabe, Kenta; Kudo, Akihiko; Esposito, Daniel V.; Bala Chandran, Rohini

Solar-powered photochemical water splitting using suspensions of photocatalyst nanoparticles is an attractive route for economical production of green hydrogen. SrTiO3-based photocatalysts have been intensely investigated due to their stability and recently demonstrated near-100% external quantum yield (EQY) for water splitting using wavelengths below 360 nm. To extend the optical absorption into the visible, SrTiO3nanoparticles have been doped with various transition metals. Here we demonstrate that doping SrTiO3nanoparticles with 1% Rh introduces midgap acceptor states which reduce the free electron concentration by 5 orders of magnitude, dramatically reducing built-in potentials which could otherwise separate electron-hole (e-h) pairs. Rhodium states also function as recombination centers, reducing the photocarrier lifetime by nearly 2 orders of magnitude and the maximum achievable EQY to 10%. Furthermore, the absence of built-in electric fields within Rh-doped SrTiO3nanoparticles suggests that modest e-h separation can be achieved by exploiting a difference in mobility between electrons and holes.

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5 Results
5 Results