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Reduction of Defects at or near ALD-Al2O3/GaN Interfaces for Improved Electrical Performance of GaN Power Devices

Glaser, Caleb E.; Rummel, Brian D.; Klesko, Joseph P.; Wygant, Melissa L.; Dickens, Peter T.; Binder, Andrew T.; Kaplar, Robert J.; Feezell, Daniel; Steinfeldt, Jeffrey A.

Abstract not provided.

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