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Publications / Conference Presentation

Reduced temperature preparation of atomically clean Si surfaces to augment CMOS with atomic precision devices

Pena, Luis F.; Anderson, Evan M.; Mudrick, John P.; Campbell, Deanna M.; Katzenmeyer, Aaron M.; Lu, T.M.; Leenheer, Andrew J.; Ivie, Jeffrey A.; Schmucker, Scott W.; Scrymgeour, David A.; Misra, Shashank

Abstract not provided.