Publications Details

Integrating atomic layer doping (ALDo) with CMOS circuitry for reduced contact resistance

Anderson, Evan M.; Schmucker, Scott W.; Ivie, Jeffrey A.; Campbell, Deanna M.; Lu, Tzu M.; Lu, Ping; Bussmann, Ezra; Leenheer, Andrew J.; Scrymgeour, David; Misra, Shashank

Abstract not provided.