Publications Details

Publications / Conference Poster

Integrating atomic layer doping (ALDo) with CMOS circuitry for reduced contact resistance

Anderson, Evan M.; Schmucker, Scott W.; Ivie, Jeffrey A.; Campbell, DeAnna M.; Lu, Tzu-Ming L.; Lu, Ping L.; Bussmann, Ezra B.; Leenheer, Andrew J.; Scrymgeour, David S.; Misra, Shashank M.

Abstract not provided.