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Fully micro-fabricated VECSEL at 850 nm

Serkland, Darwin K.; Geib, K.M.; Keeler, Gordon A.; Peake, Gregory M.

We report the demonstration of a fully micro-fabricated vertical-external-cavity surface-emitting laser (VECSEL) operating at wavelengths near 850 nm. The external-cavity length is on the order of 25 microns, and the external mirror is a dielectric distributed Bragg reflector with a radius of curvature of 130 microns that is micro-fabricated on top of the active semiconductor portion of the device. The additional cavity length, relative to a VCSEL, enables higher output power and narrower laser linewidth, and micro-fabrication of the external mirror preserves the manufacturing cost advantages of parallel lithographic alignment. © 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).