Publications Details
Atomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects
Scrymgeour, David A.; Frederick, Esther; Halsey, Connor; Campbell, Deanna M.; Anderson, Evan; Schmucker, Scott W.; Ivie, Jeffrey A.; Gao, Xujiao; Lu, T.M.; Tracy, Lisa A.; Misra, Shashank
Abstract not provided.