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Novel near-field optical probe for 100-nm critical dimension measurements

Stallard, Brian R.

Although the theoretical resolution for a conventional optical microscope is about 300 nm, it is normally difficult to obtain satisfactory critical dimension (CD) measurements below about 600 nm. E-beam technology has been popular for sub-500 nm metrology but also has well known limitations. Scanning probe and near-field optical methods have high spatial resolution. Yet they are ill-suited for routine CD metrology of high aspect ratio features because of a combination of short working distances (< 10 nm) and large tips. In this paper the authors present the concept and initial modeling results for a novel near-field optical probe that has the potential of overcoming these limitations. The idea is to observe resonance shifts in a waveguide cavity that arise from the coupling of the evanescent field of the waveguide to perturbations beneath the waveguide plane. The change in resonance frequency is detected as a change in the transmission of a monochromatic probe beam through the waveguide. The transmitted intensity, together with the appropriate signal processing, gives the topography of the perturbation. The model predicts that this probe is capable of determining the width of photoresist lines as small as 100 nm. The working distance is much more practical than other probe techniques at about 100 to 250 nm.

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Implantation activation annealing of Si-implanted gallium nitride at temperatures > 1,100 C

Zolper, J.C.

The activation annealing of Si-implanted GaN is reported for temperatures from 1,100 to 1,400 C. Although previous work has shown that Si-implanted GaN can be activated by a rapid thermal annealing at {approximately}1,100 C, it was also shown that significant damage remained in the crystal. Therefore, both AlN-encapsulated and uncapped Si-implanted GaN samples were annealed in a metal organic chemical vapor deposition system in a N{sub 2}/NH{sub 3} ambient to further assess the annealing process. Electrical Hall characterization shows increases in carrier density and mobility for annealing up to 1,300 C before degrading at 1,400 C due to decomposition of the GaN epilayer. Rutherford backscattering spectra show that the high annealing temperatures reduce the implantation induced damage profile but do not completely restore the as-grown crystallinity.

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Processing of PbTiO{sub 3} and Pb(Zr{sub x}Ti{sub 1{minus}x})O{sub 3} thin films by novel single-solid-source metalorganic chemical vapor deposition

Tuttle, Bruce

Ferroelectric PbTiO{sub 3} (PT) and Pb(Zr{sub x}Ti{sub 1{minus}x})O{sub 3} (PZT) thin films have been deposited on (100) MgO and (111) Pt/SiO{sub 2}/(100)Si substrates by using a novel single-solid-source metalorganic chemical vapor deposition (MOCVD) technique. The new technique uses a powder delivery system to deliver the mixed precursor powders directly into a hot vaporizer from room temperature, therefore, avoiding any problems associated with polymerization or decomposition of the precursors before evaporation. The technique simplifies MOCVD processing significantly and can improve process reliability and reproducibility. The deposited PT and PZT films have a perovskite structure and are highly oriented with respect to the substrate. With improvement of process control, systematic studies of film evolution under various growth conditions have been carried out. Effects of substrate, substrate temperature, system vacuum, and precursor ratios in the mixture on film microstructure and properties will be presented in this paper.

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Radiation transport Part B: Applications with examples

Beutler, David E.

In the previous sections Len Lorence has described the need, theory, and types of radiation codes that can be applied to model the results of radiation effects tests or working environments for electronics. For the rest of this segment, the author will concentrate on the specific ways the codes can be used to predict device response or analyze radiation test results. Regardless of whether one is predicting responses in a working or test environment, the procedures are virtually the same. The same can be said for the use of 1-, 2-, or 3-dimensional codes and Monte Carlo or discrete ordinates codes. No attempt is made to instruct the student on the specifics of the code. For example, the author will not discuss the details, such as the number of meshes, energy groups, etc. that are appropriate for a discrete ordinates code. For the sake of simplicity, he will restrict himself to the 1-dimensional code CEPXS/ONELD. This code along with a wide variety of other radiation codes can be obtained form the Radiation Safety Information Computational Center (RSICC) for a nominal handling fee.

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NET-1.2 post-irradiation examination report

Rightley, Michael J.

The post-irradiation examination (PIE) of the NET-1.2 fuel element was completed in December, 1993. The goal of the PIE work was to gather data regarding the fracture of the hot frit during the experiment. Five cracks were observed in the hot frit at various locations although only two were believed to have initiated the overall component failure. These two cracks were complete circumferential failures and were located near the open and closed ends of the frit within the active flow region. The location and orientation of these fractures suggested that failure was the result of thermally-induced stresses that exceeded pre-test predictions. The cause of the failure was the temperature difference between the coolant flowing through the hot frit and the thermally massive end fittings. The resulting axial temperature gradients in the hot frit imposed thermal stresses that exceeded failure in the frit coating material. This coating fracture then propagated through the graphite substrate. Post-test analyses of the frit response based on measured data from the experiment verified that the frit coating failure stresses were exceeded. Additionally, the cold frit behaved unexpectedly. The PIE inspection of this component showed that a majority of the compliant panels were permanently deformed against the cold frit inner wall even though the transients that the bed was exposed to were not thought to be capable of creating this magnitude of bed expansion. No evidence of bed locking was observed. A calculational error in the prediction of the total bed expansion was found (post-PIE) which certainly contributed to the underestimation of the bed displacement. Additionally, temperature differences between the bulk of the frit and the panels created a bowing force which may have allowed some amount of bed settling at relatively low temperatures while particle thermal expansion was minimal.

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Performance assessment overview for subseabed disposal of high level radioactive waste

Anderson, D.R.

The Subseabed Disposal Project (SDP) was part of an international program that investigated the feasibility of high-level radioactive waste disposal in the deep ocean sediments. This report briefly describes the seven-step iterative performance assessment procedures used in this study and presents representative results of the last iteration. The results of the performance are compared to interim standards developed for the SDP, to other conceptual repositories, and to related metrics. The attributes, limitations, uncertainties, and remaining tasks in the SDP feasibility phase are discussed.

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An implicit fast Fourier transform method for integration of the time dependent Schrodinger or diffusion equation

Riley, Merle E.

The authors have found that the conventional exponentiated split operator procedure is subject to difficulties in energy conservation when solving the time-dependent Schrodinger equation for Coulombic systems. By rearranging the kinetic and potential energy terms in the temporal propagator of the finite difference equations, one can find a propagation algorithm for three dimensions that looks much like the Crank-Nicholson and alternating direction implicit methods for one- and two-space-dimensional partial differential equations. They report comparisons of this novel implicit split operator procedure with the conventional exponentiated split operator procedure on hydrogen atom solutions. The results look promising for a purely numerical approach to certain electron quantum mechanical problems.

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Environment, Safety, and Health (ES&H) self-assessment guide

Romero, John R.

This document has been prepared as a guide for conducting self-assessments of ES&H functional programs and organizational (line) implementation of these programs. This guide is intended for use by individuals and/or teams involved in or familiar with ES&H programs and line operations (e.g., the {open_quotes}self{close_quotes}in self-assessment). Essential elements of the self-assessment process are described including: schedule and priorities, scope and approach, assessment criteria (e.g., performance objectives and measures), information gathering and analysis techniques, and documentation of planning efforts and results. The appendices in this guide include: (1) an assessment prioritization process, (2) generic performance objectives for line implementation and for ES&H functional programs, (3) sources for ES&H assessment information, (4) systemic factors (developed for SNL`s root cause analysis program), (5) Lockheed Martin audit questions for management systems, compliance and validation, and specific areas and concerns, (6) DOE facility representatives checklist, and (7) assessment tools and resources developed at SNL and other DOE/Lockheed Martin sites. This document is a product of the efforts associated with the SNL ES&H Oversight Pilot Project conducted from June 1995 to January 1997. This Pilot was part of the overall initiative by DOE to reduce burdensome agency oversight by placing greater reliance on contractor self-assessment.

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Environmental fate and transport of chemical signatures from buried landmines -- Screening model formulation and initial simulations

Phelan, James M.

The fate and transport of chemical signature molecules that emanate from buried landmines is strongly influenced by physical chemical properties and by environmental conditions of the specific chemical compounds. Published data have been evaluated as the input parameters that are used in the simulation of the fate and transport processes. A one-dimensional model developed for screening agricultural pesticides was modified and used to simulate the appearance of a surface flux above a buried landmine, estimate the subsurface total concentration, and show the phase specific concentrations at the ground surface. The physical chemical properties of TNT cause a majority of the mass released to the soil system to be bound to the solid phase soil particles. The majority of the transport occurs in the liquid phase with diffusion and evaporation driven advection of soil water as the primary mechanisms for the flux to the ground surface. The simulations provided herein should only be used for initial conceptual designs of chemical pre-concentration subsystems or complete detection systems. The physical processes modeled required necessary simplifying assumptions to allow for analytical solutions. Emerging numerical simulation tools will soon be available that should provide more realistic estimates that can be used to predict the success of landmine chemical detection surveys based on knowledge of the chemical and soil properties, and environmental conditions where the mines are buried. Additional measurements of the chemical properties in soils are also needed before a fully predictive approach can be confidently applied.

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Automation of ORIGEN2 calculations for the transuranic waste baseline inventory database using a pre-processor and a post-processor

Troup, Jennifer L.

The purpose of the work described in this report was to automate ORIGEN2 calculations for the Waste Isolation Pilot Plant (WIPP) Transuranic Waste Baseline Inventory Database (WTWBID); this was done by developing a pre-processor to generate ORIGEN2 input files from WWBID inventory files and a post-processor to remove excess information from the ORIGEN2 output files. The calculations performed with ORIGEN2 estimate the radioactive decay and buildup of various radionuclides in the waste streams identified in the WTWBID. The resulting radionuclide inventories are needed for performance assessment calculations for the WIPP site. The work resulted in the development of PreORG, which requires interaction with the user to generate ORIGEN2 input files on a site-by-site basis, and PostORG, which processes ORIGEN2 output into more manageable files. Both programs are written in the FORTRAN 77 computer language. After running PreORG, the user will run ORIGEN2 to generate the desired data; upon completion of ORIGEN2 calculations, the user can run PostORG to process the output to make it more manageable. All the programs run on a 386 PC or higher with a math co-processor or a computer platform running under VMS operating system. The pre- and post-processors for ORIGEN2 were generated for use with Rev. 1 data of the WTWBID and can also be used with Rev. 2 and 3 data of the TWBID (Transuranic Waste Baseline Inventory Database).

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A methodology for design of a linear referencing system for surface transportation

Vonderohe, A.; Hepworth, T.

The transportation community has recently placed significant emphasis on development of data models, procedural standards, and policies for management of linearly-referenced data. There is an Intelligent Transportation Systems initiative underway to create a spatial datum for location referencing in one, two, and three dimensions. Most recently, a call was made for development of a unified linear reference system to support public, private, and military surface transportation needs. A methodology for design of the linear referencing system was developed from geodetic engineering principles and techniques used for designing geodetic control networks. The method is founded upon the law of propagation of random error and the statistical analysis of systems of redundant measurements, used to produce best estimates for unknown parameters. A complete mathematical development is provided. Example adjustments of linear distance measurement systems are included. The classical orders of design are discussed with regard to the linear referencing system. A simple design example is provided. A linear referencing system designed and analyzed with this method will not only be assured of meeting the accuracy requirements of users, it will have the potential for supporting delivery of error estimates along with the results of spatial analytical queries. Modeling considerations, alternative measurement methods, implementation strategies, maintenance issues, and further research needs are discussed. Recommendations are made for further advancement of the unified linear referencing system concept.

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LDRD final report on a unified linear reference system

Espinoza Jr., J.; Mackoy, R.D.; Fletcher, D.R.

The purpose of the project was to describe existing deficiencies in Geographic Information Systems for transportation (GIS-T) applications and prescribe solutions that would benefit the transportation community in general. After an in-depth literature search and much consultation with noted transportation experts, the need for a common linear reference system that integrated and supported the planning and operational needs of the transportation community became very apparent. The focus of the project was set on a unified linear reference system and how to go about its requirements definition, design, implementation, and promulgation to the transportation community.

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Shock mitigation for the PFLs at the SATURN accelerator

Craven, R.E.

Accelerometer measurements were made on the SATURN pulse forming lines (PFL) to determine the mechanism responsible for severe metal deformation around the water switch openings and cracking of welded seams. A reason for this problem and a solution were established. A simple shock mitigating pad under the support stand for the PFL provides more than adequate protection from shock damage and will greatly extend the useful life of the power flow sections of SATURN.

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ES&H self-assessment and improvement program

Romero, John R.

This document provides an overview of the environment, safety, and health (ES&H) self-assessment and improvement process at Sandia National Laboratories (SNL). It also suggests further developments for self-assessment and improvement. Section 1 explains the many purposes of the self-assessment and improvement program. Section 2 is a description of ES&H self-assessment and improvement and includes information on performance objectives and performance indicators, self-assessment of work areas and activities, reporting of self-assessment results, improvements and corrective actions, and records retention. The sub-section on self-assessment of work areas and activities includes detailed descriptions of organizational self-assessment, ES&H functional program self-assessments, internal independent ES&H assessment, Lockheed Martin Corporate ES&H assessments, and ES&H self-assessment information analysis and integration. Section 3 defines the roles and responsibilities of the ES&H Assessment Department, ES&H Center, SNL management, SNL employees, and contractors, SNL {open_quotes}Line{close_quotes} organizations, and ES&H functional program owners. Section 4 references associated manuals, policies, and companion documents. The appendix is a glossary of terms used in ES&H assessments.

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Software requirements specification for the GIS-T/ISTEA pooled fund study phase C linear referencing engine

Amai, W.; Espinoza Jr., J.; Fletcher, D.R.

This Software Requirements Specification (SRS) describes the features to be provided by the software for the GIS-T/ISTEA Pooled Fund Study Phase C Linear Referencing Engine project. This document conforms to the recommendations of IEEE Standard 830-1984, IEEE Guide to Software Requirements Specification (Institute of Electrical and Electronics Engineers, Inc., 1984). The software specified in this SRS is a proof-of-concept implementation of the Linear Referencing Engine as described in the GIS-T/ISTEA pooled Fund Study Phase B Summary, specifically Sheet 13 of the Phase B object model. The software allows an operator to convert between two linear referencing methods and a datum network.

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The case for unified linear reference system

Espinoza Jr., J.; Mackoy, R.D.; Fletcher, D.R.

The transportation industry distinguishes its activities and data into three functionally and institutionally distinct domains. Transportation infrastructure management activities make transport links (e.g., roads, rail lines, transit routes) available for travel. In contrast, civilian and military transport operations focus on finding and using the best transport links. Each of these three transportation interest groups - transportation facility operators, civilian and military transportation users - currently collects and maintains separate, often redundant or inconsistent information concerning the location and status of the transportation system, the vehicles using the system, and the passengers and freight (or material) being conveyed. Although there has been some progress made in integrating data within each domain, little emphasis has been placed on identifying and improving the flow of information between them. Because activities initiated in one domain affect conditions in the others, defining these flows is crucial to the next generation of planners, traffic managers and customers of transportation services. For example, construction and maintenance activities affect civilian and military route choices and travel times; large scale military movements disrupt civilian travel and have potentially major effects on the infrastructure and so on. This intertwined interest in the transportation system implies the need for data integration not only within each sphere of interest but among the spheres as well. Although recent policy statements by the U.S. Departments of Transportation and Defense and ITS America indicate a desire to combine and share information resources, there are enormous technical and institutional barriers that need to be overcome.

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Design considerations for the development of a space qualification Short Wavelength Imaging Fourier Transform Spectrometer (SWIFTS)

Abbink, R.E.

This document is the final report on work performed at Sandia National Laboratories during FY 1992 and 1993 for a Laboratory Directed Research and Development (LDRD) program to look at problems associated with the design and long term operation of a short wavelength imaging Fourier Transform (FT) spectrometer for use in space. In attempts to answer two fundamental questions: is a FT spectrometer with a resolution of 1 cm{sup {minus}1} covering the silicon detector wavelength range of 0.4 to 1.1 microns feasible in a long life space instrument and, if so, is it the best method of obtaining the desired information? Emphasis has been on identifying methods which minimize reliance on precision mechanical alignment and precise velocity control. An important consideration has also been to develop methods which will be compatible with a variety of self-scanning solid state imaging devices. A breadboard instrument was constructed using cube corner retroreflectors and a laser diode position reference. Some preliminary results are reported. This work is primarily intended to act as an aid to engineers at Sandia who wish to pursue the fabrication of a flight qualified instrument. The theoretical parts are intended to be somewhat tutorial in nature to aid the engineer who is not familiar with FT spectroscopy.

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Geographic Information Systems-Transportation ISTEA management systems server-net prototype pooled fund study: Phase B summary

Espinoza Jr., J.; Dean, C.D.; Armstrong, H.M.

The Geographic Information System-Transportation (GIS-T) ISTEA Management Systems Server Net Prototype Pooled Fund Study represents the first national cooperative effort in the transportation industry to address the management and monitoring systems as well as the statewide and metropolitan transportation planning requirements of the Intermodal Surface Transportation Efficiency Act of 1991 (ISTEA). The Study was initiated in November 1993 through the Alliance for Transportation Research and under the leadership of the New Mexico State Highway and Transportation Department. Sandia National Laboratories, an Alliance partner, and Geographic Paradigm Computing. Inc. provided technical leadership for the project. In 1992, the Alliance for Transportation Research, the New Mexico State Highway and Transportation Department, Sandia National Laboratories, and Geographic Paradigm Computing, Inc., proposed a comprehensive research agenda for GIS-T. That program outlined a national effort to synthesize new transportation policy initiatives (e.g., management systems and Intelligent Transportation Systems) with the GIS-T server net ideas contained in the NCHRP project {open_quotes}Adaptation of GIS to Transportation{close_quotes}. After much consultation with state, federal, and private interests, a project proposal based on this agenda was prepared and resulted in this Study. The general objective of the Study was to develop GIS-T server net prototypes supporting the ISTEA requirements for transportation planning and management and monitoring systems. This objective can be further qualified to: (1) Create integrated information system architectures and design requirements encompassing transportation planning activities and data. (2) Encourage the development of functional GIS-T server net prototypes. (3) Demonstrate multiple information systems implemented in a server net environment.

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Verification of the integrity of barriers using gas diffusion

Williams, Cecelia V.

In-situ barrier materials and designs are being developed for containment of high risk contamination as an alternative to immediate removal or remediation. The intent of these designs is to prevent the movement of contaminants in either the liquid or vapor phase by long-term containment, essentially buying time until the contaminant depletes naturally or a remediation can be implemented. The integrity of the resultant soil-binder mixture is typically assessed by a number of destructive laboratory tests (leaching, compressive strength, mechanical stability with respect to wetting and freeze-thaw cycles) which as a group are used to infer the likelihood of favorable long-term performance of the barrier. The need exists for a minimally intrusive yet quantifiable methods for assessment of a barrier`s integrity after emplacement, and monitoring of the barrier`s performance over its lifetime. Here, the authors evaluate non-destructive measurements of inert-gas diffusion (specifically, SF{sub 6}) as an indicator of waste-form integrity. The goals of this project are to show that diffusivity can be measured in core samples of soil jet-grouted with Portland cement, validate the experimental method through measurements on samples, and to calculate aqueous diffusivities from a series of diffusion measurements. This study shows that it is practical to measure SF{sub 6} diffusion rates in the laboratory on samples of grout (Portland cement and soil) typical of what might be used in a barrier. Diffusion of SF{sub 6} through grout (Portland cement and soil) is at least an order of magnitude slower than through air. The use of this tracer should be sensitive to the presence of fractures, voids, or other discontinuities in the grout/soil structure. Field-scale measurements should be practical on time-scales of a few days.

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Event triggered data acquisition in the Rock Mechanics Laboratory upgrades and revisions

Hardy, Robert D.

This paper describes updates and revisions to the data acquisition computer program DATAVG which has served as the basic data collection system for the Sandia National Laboratories Geomechanics Department, Rock Mechanics Laboratory since late 1992. DATAVG was first described in Event Triggered Data Acquisition in the Rock Mechanics Laboratory, [Hardy, 1993]. DATAVG has been modified to incorporate numerous user-requested enhancements and a few bug fixes. In this paper these changes to DATAVG are described.

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Trace water vapor determination in nitrogen and corrosive gases using infrared spectroscopy

Stallard, Brian R.

The generation of particles in gas handling systems as a result of corrosion is a major concern in the microelectronics industry. The corrosion can be caused by the presence of trace quantities of water in corrosive gases such as HCl or HBr. FTIR spectroscopy has been shown to be a method that can be made compatible with corrosive gases and is capable of detecting low ppb levels of water vapor. In this report, the application of FTIR spectroscopy combined with classical least squares multivariate calibration to detect trace H{sub 2}O in N{sub 2}, HCl and HBr is discussed. Chapter 2 discusses the gas handling system and instrumentation required to handle corrosive gases. A method of generating a background spectrum useful to the measurements discussed in this report, as well as in other application areas such as gas phase environmental monitoring, is discussed in Chapter 3. Experimental results obtained with the first system are presented in Chapter 4. Those results made it possible to optimize the design options for the construction of a dedicate system for low ppb water vapor determination. These designs options are discussed in Chapter 5. An FTIR prototype accessory was built. In addition, a commercially available evacuable FTIR system was obtained for evaluation. Test results obtained with both systems are discussed in Chapter 6. Experiments dealing with the interaction between H{sub 2}O-HCl and potential improvements to the detection system are discussed in Chapter 7.

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Balance-of-system improvements for photovoltaic applications resulting from the PVMaT phase 4A1 program

Bower, Ward

The Photovoltaic Manufacturing Technology Program (PVMaT) program began in 1990 as a cost-shared partnership among the US photovoltaic industry and the US Photovoltaic Program. Balance-of-systems (BOS) components and concepts were included under Phase 4A1 of the program. BOS contracts ranged from newly developed AC PV modules to 100kW inverters for photovoltaic applications. Utility-interactive, stand-alone and hybrid components were also improved, while better manufacturing processes were developed. Specific products developed through Phase 4A1 contracts included AC modules and module integrated inverters, an advanced polymer system to reduce BOS costs, low cost integrated tracking PV systems, improved inverters, new concept inverters, communications links for BOS, and advanced modular PV systems for remote applications. This paper summarizes the research and development work, presents product and applications improvements, and describes manufacturing improvements while analyzing performance and cost benefits.

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Joint DOE/industry photovoltaic system reliability program

Maish, Alexander B.

To achieve the lowest life-cycle cost (LCC), photovoltaic (PV) systems must have the optimum mix of low first cost, low operation and maintenance (O&M) cost, and high availability. Additionally, the long-term health of the photovoltaic (PV) industry requires that PV systems work as expected. Although PV modules now enjoy high reliability due to a significant multi-year effort by both the U.S. Department of Energy (DOE) and industry, the same is not always true of PV systems. Even for systems that do operate reliably, customers, suppliers, and manufacturers can benefit from knowing what O&M expenses to expect. This knowledge will reduce technology risk to the customer and improve likelihood of commitment to PV projects. System integrators and utilities may benefit from O&M cost information to improve system designs, to properly price service agreements and warranties, and to optimize maintenance strategies. The DOE and component manufacturers may benefit from identifying cost drivers to optimally focus research and quality assurance resources to improve product reliability. This paper discusses the first of five tasks identified for this project, quantifying system reliability and life cycle cost by collecting, analyzing and reporting data on PV system reliability and cost. Industry participants collect the necessary O&M data on systems they are monitoring. Sandia provides support in the form of assistance identifying data that needs to be collected, helping develop forms or databases to collect the data, and analyzing the data.

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Results 95576–95600 of 100,993
Results 95576–95600 of 100,993
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