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Rapid thermal pyrolysis of interferometrically patterned resist

Carbon

Spoerke, Erik D.; Polsky, Ronen; Burckel, David B.; Bunker, B.C.

In recent years pyrolysis of interferometrically-patterned photoresists has produced three-dimensionally nanopatterned, electrically conductive carbon films with applications from energy storage to biological sensing. We investigate here conditions for rapid thermal pyrolysis that drastically reduce film processing time (from hours to minutes) while preserving the films' unique nanoscale morphology, film adhesion, and electrochemical properties. We specifically show that heating rate dramatically affects nanoscale morphology, while reducing atmosphere composition, dwell time, and dwell temperature impact the electrochemical performance of these rapidly pyrolyzed nanostructures. Accelerated processing with rapid thermal pyrolysis may facilitate the expanded applicability and rapid fabrication of these promising nanostructured materials. © 2012 Elsevier Ltd. All rights reserved.

More Details
TYPE Journal Article YEAR 2012
OSTIScopus
Results 251–275 of 302
Results 251–275 of 302