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Impact of Surface Recombination on Single-Event Charge Collection in an SOI Technology

Tonigan, Andrew M.; Ball, Dennis; Vizkelethy, Gyorgy V.; Black, Jeffrey B.; Black, Dolores A.; Trippe, James M.; Bielejec, Edward S.; Alles, Michael L.; Reed, Robert S.; Schrimpf, Ronald D.

Semiconductor-insulator interfaces play an important role in the reliability of integrated devices; however, the impact of these interfaces on the physical mechanisms related to single-event effects has not been previously reported. We present experimental data that demonstrate that single-event charge collection can be impacted by changes in interface quality. The experimental data, combined with simulations, show that single-event response may depend on surface recombination at interface defects. The effect depends on strike location and increases with increasing linear energy transfer (LET). Surface recombination can affect single-event charge collection for interfaces with a surface recombination velocity (SRV) of 1000 cm/s and is a dominant charge collection mechanism with SRV > 10^{5} cm/s.