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Identification of the defect dominating high temperature reverse leakage current in vertical GaN power diodes through deep level transient spectroscopy

DasGupta, Sandeepan D.; Slobodyan, O.S.; Smith, Trevor S.; Binder, Andrew B.; Flicker, Jack D.; Kaplar, Robert K.; Mueller, Jacob M.; Garcia Rodriguez, Luciano A.; Atcitty, Stanley A.

Deep level defects in wide bandgap semiconductors, whose response times are in the range of power converter switching times, can have a significant effect on converter efficiency. Here, we use deep level transient spectroscopy (DLTS) to evaluate such defect levels in the n-drift layer of vertical gallium nitride (v-GaN) power diodes with VBD ~ 1500 V. DLTS reveals three energy levels that are at ~0.6 eV (highest density), ~0.27 eV (lowest density), and ~45 meV (a dopant level) from the conduction band. Dopant extraction from capacitance–voltage measurement tests (C–V) at multiple temperatures enables trap density evaluation, and the ~0.6 eV trap has a density of 1.2 × 1015 cm-3. The 0.6 eV energy level and its density are similar to a defect that is known to cause current collapse in GaN based surface conducting devices (like high electron mobility transistors). Analysis of reverse bias currents over temperature in the v-GaN diodes indicates a predominant role of the same defect in determining reverse leakage current at high temperatures, reducing switching efficiency.