Publications Details

Development of a high-k gate stack for atomic-precision advanced manufacturing

Lu, Tzu M.; Anderson, Evan M.; Campbell, Deanna M.; Marshall, Michael; Lu, Ping; Schmucker, Scott W.; Tracy, Lisa A.; Robison, Mitchell; Arghavani, Reza; Maurer, Leon; Baczewski, Andrew D.; Ward, Daniel; Misra, Shashank

Abstract not provided.