Publications Details
Development and Processing of Al1-xScxN (x ≤ 0.40) Films for Resonator and Filter Applications
Esteves, Giovanni; Yen, Sean; Young, Travis R.; Tang, Zichen; Schmidt, Ethan; Gastian, Loren; Henry, David; Bauer, Todd M.; Nordquist, Christopher D.; Olsson, Roy H.
Abstract not provided.