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Publications / Conference Presentation

Development and Processing of Al1-xScxN (x ≤ 0.40) Films for Resonator and Filter Applications

Esteves, Giovanni; Yen, Sean; Young, Travis; Tang, Zichen; Schmidt, Ethan; Gastian, Loren; Henry, Michael D.; Bauer, Todd M.; Nordquist, Christopher D.; Olsson, Roy H.

Abstract not provided.