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Development and Processing of Al1-xScxN (x ≤ 0.40) Films for Resonator and Filter Applications

Esteves, Giovanni E.; Yen, Sean Y.; Young, Travis R.; Tang, Zichen; Schmidt, Ethan W.; Gastian, Loren G.; Henry, Michael D.; Bauer, Todd B.; Nordquist, Christopher N.; Olsson, Roy H.

Abstract not provided.