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Compact, Pull-in-Free Electrostatic MEMS Actuated Tunable Ring Resonator for Optical Multiplexing

Ruyack, Alexander R.; Grine, Alejandro J.; Finnegan, Patrick S.; Serkland, Darwin K.; Robinson, Samuel; Weatherred, Scott E.; Frost, Megan D.; Nordquist, Christopher N.; Wood, Michael G.

We present an optical wavelength division multiplexer enabled by a ring resonator tuned by MEMS electrostatic actuation. Analytical analysis, simulation and fabrication are discussed leading to results showing controlled tuning greater than one FSR.