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Atomic precision advanced manufacturing (APAM) of ultra-doped nanostructures for advanced CMOS devices and interconnects

Scrymgeour, David; Frederick, Esther; Halsey, Connor; Campbell, Deanna M.; Anderson, Evan M.; Schmucker, Scott W.; Ivie, Jeffrey A.; Gao, Xujiao; Lu, Tzu M.; Tracy, Lisa A.; Misra, Shashank

Abstract not provided.