Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry
Optics InfoBase Conference Papers
We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.