Reactive, ion-assisted deposition of e-beam evaporated Ti for high refractive index TiO2 layers and laser damage resistant, broad bandwidth, high reflection coatings
Optics InfoBase Conference Papers
We optimize reactive, ion-assisted deposition (O2 levels, deposition rate and ion beam settings) using e-beam evaporated Ti for high refractive index, low absorption TiO2 layers and laser damage resistant, broad bandwidth high reflection coatings. © OSA 2013.