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Ceramic-Metal Brazing, From Fundamentals to Applications: A Review of Sandia National Laboratories Brazing Capabilities, Needs and Opportunities

Hosking, Floyd M.; Cadden, Charles H.; Stephens, John J.; Glass, Sarah J.; Johannes, Justine E.; Kotula, Paul G.; Lapetina, Neil A.; Loehman, Ronald E.; Swiler, Thomas P.; Webb, Edmund B.

The purpose of the report is to summarize discussions from a Ceramic/Metal Brazing: From Fundamentals to Applications Workshop that was held at Sandia National Laboratories in Albuquerque, NM on April 4, 2001. Brazing experts and users who bridge common areas of research, design, and manufacturing participated in the exercise. External perspectives on the general state of the science and technology for ceramics and metal brazing were given. Other discussions highlighted and critiqued Sandia's brazing research and engineering programs, including the latest advances in braze modeling and materials characterization. The workshop concluded with a facilitated dialogue that identified critical brazing research needs and opportunities.

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Chemical Reaction Mechanisms for Modeling the Fluorocarbon Plasma Etch of Silicon Oxide and Related Materials

Ho, Pauline H.; Johannes, Justine E.; Buss, Richard J.

As part of a project with SEMATECH, detailed chemical reaction mechanisms have been developed that describe the gas-phase and surface chemistry occurring during the fluorocarbon plasma etching of silicon dioxide and related materials. The fluorocarbons examined are C{sub 2}F{sub 6}, CHF{sub 3} and C{sub 4}F{sub 8}, while the materials studied are silicon dioxide, silicon, photoresist, and silica-based low-k dielectrics. These systems were examined at different levels, ranging from in-depth treatment of C{sub 2}F{sub 6} plasma etch of oxide, to a fairly cursory examination of C{sub 4}F{sub 8} etch of the low-k dielectric. Simulations using these reaction mechanisms and AURORA, a zero-dimensional model, compare favorably with etch rates measured in three different experimental reactors, plus extensive diagnostic absolute density measurements of electron and negative ions, relative density measurements of CF, CF{sub 2}, SiF and SiF{sub 2} radicals, ion current densities, and mass spectrometric measurements of relative ion densities.

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Gemini: A hybrid plasma modelling capability for low pressure systems. User`s manual - V.1.7

Johannes, Justine E.

Gemini is the coupling of Icarus, the Sandia National Laboratories (SNL) 2-D Direct Simulation Monte Carlo (DMSC) code, to MPRES, the University of Houston 2-D finite element plasma reactor code. Thus, Gemini is not a stand alone code. The primary application of Gemini is the simulation of inductively coupled plasma reactors that operate at low pressures (< 10mtorr) where continuum formulations of the transport equations begin to break down. Plasma parameters (electron density (ne), electron temperature (Te) and electrostatic fields (Er and Ez)) are computed in MPRES and interpolated onto the DSMC grid. This allows transport of the neutrals and ions to be performed using the DSMC method while including electron impact reactions and field transport effects. A sample calculation including appropriate input files is given.

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18 Results
18 Results