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Visible light LVP on bulk silicon devices

Beutler, Joshua; Clement, John J.; Foulk, James W.; Stevens, Jeffrey; Hodges, V.C.; Silverman, Scott; Chivas, Robert

Visible light laser voltage probing (LVP) for improved backside optical spatial resolution is demonstrated on ultrathinned bulk Si samples. A prototype system for data acquisition, a method to produce ultra-thinned bulk samples as well as LVP signal, imaging, and waveform acquisition are described on bulk Si devices. Spatial resolution and signal comparison with conventional, infrared LVP analysis is discussed.