Publications Details

Unraveling fundamental mechanisms of silicon nitride crystallization in microelectronics manufacturing

Bishop, Christopher; Janicki, Tesia D.; Chiu, Edwin; Davis, Elijah; Parkin, Calvin; Gibson, Jason; Hire, Ajinkya; Chacon, Carlos M.; Kotula, Paul G.; Hennig, Richard; Lim, Hojun; Hattar, Khalid; Lane, James M.D.

This research project investigates the fundamental mechanisms of silicon nitride (SiN) crystallization, aiming to enhance the understanding of this critical material in microelectronics manufacturing. Through a collaborative effort between Sandia National Laboratories, the University of Tennessee, and the University of Florida, we developed a comprehensive framework that integrates experimental techniques, atomistic modeling, meso-scale simulations, and an integrated multi-scale model to capture