Publications Details

Stabilization of ferroelectric phase of Hf_0.6Zr_0.4O₂ on NbN and Nb [slides]

Henry, Michael D.; Davids, Paul; Esteves, Giovanni; Young, Travis; Wolfley, Steven; Smith, Sean W.; Fields, Shelby; Ihlefeld, Jon F.

This work demonstrated both NbN and Nb make good electrodes for stabilizing orthorhombic phase of Hf_0.6Zr_0.4O₂ ferroelectric films. Wake up are < 100 cycles. P_r can be as high as 30 µC/cm² - respectively 14 and 18 µC/cm² here. Further, capacitance suggests an orthorhombic phase can be stabilized. Addition of a linear dielectric under modest thickness can tune the P_r and reduce leakage.