Publications Details
High Speed (Ghz) Ultra-high pressure (GPa) Sensor array fabricated in Integrated CMOS+MEMS process
Okandan, Murat O.; Olsson, Roy H.; Baker, Michael S.; Resnick, Paul J.; Hill, Thomas A.; Pearson, Sean P.; Castaneda, Jaime N.; Trott, Wayne T.; Jones, David A.
Abstract not provided.